Vim li cas Silicon Carbide Ceramic Cheebtsam tseem ceeb rau Next-Gen Machinery?

Silicon Carbide (SiC) ceramics, nrog lawv cov kev ruaj khov siab heev thiab qhov hnyav sib dua, yog qhov kev xaiv zoo tshaj plaws rau cov modules txav ceev ceev xws li lithography reticle stages.

Lub teeb yuag nrog High Frequency Response

Hauv cov txheej txheem txav uas xav tau kev pib-nres sai, kev txo qhov hnyav yog qhov tseem ceeb heev.Cov khoom siv ua los ntawm cov av nplaummuaj qhov ceev zoo ib yam li txhuas tab sis muaj kev tawv dua hlau, txo qis qhov inertia ntawm lub cev thiab ua rau lub tshuab teb ntau zaus.

Kev Hnav Khaub Ncaws Heev thiab Kev Tiv Thaiv Kub Siab

Cov ntaub ntawv ceramic muaj qhov nyuaj ntawm qhov chaw zoo kawg nkaus, tswj kev hnav qis txawm tias nyob rau hauv qhov chaw tsis muaj lubrication. Rau cov rails precision lossis cov nplhaib foob, Silicon Carbide tswj nws qhov Geometry Accuracy nyob rau hauv qhov kub heev lossis cov xwm txheej corrosive yam tsis muaj softening.

Kev Ntsuas thiab Kev Ruaj Ntseg Mus Ib Txhis

Tsis zoo li cov hlau, cov khoom siv ceramics tsis oxidize. Lawv cov khoom siv lub cev tseem nyob ruaj khov thoob plaws lub tshuab lub neej. ZHHIMG muab Precision Machining nrog kev sib txuas ceramic-hlau los xa cov khoom uas ruaj khov thiab muaj zog rau kev siv hauv kev lag luam.

Kev Sib Piv Txog Cov Khoom Siv

Khoom siv Kev Nyuaj Tshwj Xeeb (E/ρ) Mohs Hardness Kev Pheej Hmoo ntawm Oxidation
Silicon Carbide (SiC) ~110 9.5 Tsis muaj dab tsi
Granite (Ntuj) ~30 6 – 7 Tsis muaj dab tsi
Hlau tsis xeb ~26 5 – 6 Siab

granite rau metrology

Cov Lus Nug Feem Ntau: Cov Cheebtsam Ceramic

  1. Vim li cas cov khoom ua los ntawm av nplaum thiaj nyuaj rau tshuab? Nws qhov tawv heev xav tau cov cuab yeej tshwj xeeb uas muaj lub taub hau pob zeb diamond thiab kev sib tsoo me me.

  2. Puas yog SiC ceramic tawg yooj yim dhau? Txawm hais tias tawg yooj yim, peb txo qhov no los ntawm kev siv cov qauv tsim sib xyaw ua ke ntawm cov khoom siv ceramic-hlau zoo tshaj plaws.

  3. Koj puas ua tau cov khoom uas muaj phab ntsa nyias? Yog, nws zoo tagnrho rau cov nqaj hlau uas muaj phab ntsa nyias lossis cov sliders uas khoob.

  4. Qhov txwv kub yog dab tsi? Nws khaws cov khoom siv kho tshuab zoo heev ntawm qhov kub tshaj 1000°C.

  5. Lub sijhawm ua khoom ntev npaum li cas? Vim yog sintering thiab hard-machining, nws feem ntau yuav siv sijhawm 8-12 lub lis piam.

  6. Koj ua li cas thiaj paub tseeb tias zoo? Txhua qhov khoom raug tshuaj xyuas tag nrho los ntawm CMM thiab laser interferometry.


Lub sijhawm tshaj tawm: Tsib Hlis-29-2026