Raws li kev lag luam semiconductor thiab optical thoob ntiaj teb thawb mus rau qhov me me dua thiab qhov yuav tsum tau ua kom raug dua, cov cuab yeej tseem ceeb uas ua rau kev ntsuas thiab kev sib dhos tau dhau los ua qhov tseem ceeb dua. Hauv kev tsim khoom semiconductor, qhov twg qhov ntev ntawm transistor tam sim no ncav cuag ib tus lej nanometers, thiab hauv cov kab ke optical qhov twg kev sib dhos ua kom haum rau cov feem ntawm qhov ntev ntawm qhov ntev, qhov ruaj khov thiab qhov tseeb ntawm cov cuab yeej ntsuas ncaj qha txiav txim siab cov khoom tsim tawm thiab kev ua tau zoo. Tsab xov xwm no tshawb nrhiav vim li cas cov cuab yeej ntsuas granite - suav nrog cov phaj granite, cov hauv paus granite precision, thiab cov khoom metrology - tau dhau los ua tus qauv kev lag luam rau cov ntawv thov siab, ua tau zoo dua li cov hlau ib txwm muaj.
Qhov kev thov rau qhov tseeb ntawm sub-micron tau tsim kev hloov pauv paradigm hauv metrology. Cov cuab yeej ntsuas hlau thiab hlau ib txwm muaj, thaum txaus rau kev tsim khoom ib txwm muaj, tab sis muaj teeb meem los tswj kev ruaj khov nyob rau hauv cov xwm txheej nruj uas xav tau rau kev tshuaj xyuas semiconductor wafer, kev sib dhos lithography, thiab kev sib dhos optical. Granite, nrog nws cov khoom sib xyaw ua ke ntawm cov khoom siv lub cev uas tau tsim ntau lab xyoo hauv qab lub ntiaj teb lub plhaub, muab cov kev daws teeb meem uas daws tau cov kev xav tau kev ua haujlwm nyuaj tshaj plaws ntawm kev lag luam niaj hnub no.
Cov Khoom Siv Lub Cev Tseem Ceeb: Vim Li Cas Granite Zoo Tshaj Plaws Hauv Cov Ntawv Thov Precision
Kev Ruaj Ntseg Thermal: Lub Hauv Paus ntawm Kev Ntsuas Tsis Tu Ncua
Ib qho ntawm cov txiaj ntsig tseem ceeb tshaj plaws ntawm cov cuab yeej ntsuas granite yog lawv qhov kev ruaj khov thermal tshwj xeeb. Nrog rau tus coefficient ntawm thermal expansion ntawm 6.5 ± 0.5 × 10⁻⁶ / ℃, granite qhia txog kwv yees li ib feem peb ntawm thermal expansion ntawm cov hlau cam khwb cia thiab ib feem kaum ntawm cov txhuas. Qhov kev nthuav dav thermal qis no txhais tau tias cov txheej txheem ntsuas granite-raws li tswj lawv qhov tseeb txawm tias thaum raug rau qhov kub thiab txias hloov pauv uas tshwm sim hauv cov chaw tsim khoom.
Hauv cov ntawv thov semiconductor metrology, qhov twg qhov kub hloov pauv ntawm tsuas yog 1 ℃ tuaj yeem ua rau 300mm silicon wafer nthuav dav li ntawm 7.5 μm, qhov ruaj khov thermal ntawm granite dhau los ua qhov tseem ceeb. Lub phaj granite nto raug tib qhov kub hloov pauv yuav nthuav dav tsuas yog 1.95 μm hla tib lub cheeb, muab lub dav hlau siv ruaj khov dua rau kev ntsuas tseem ceeb. Cov cuab yeej no muaj txiaj ntsig zoo hauv 24/7 kev ua haujlwm tsim khoom qhov twg cov khoom siv tsim cov cua sov tas mus li uas tuaj yeem cuam tshuam rau qhov tseeb ntawm kev ntsuas.
Kev Nyuaj Siab thiab Kev Tiv Thaiv Kev Hnav Zoo Tshaj Plaws
Qhov ntsuas Mohs hardness ntawm Granite yog 6–7 ua rau nws yog cov khoom siv hauv kev lag luam uas nyuaj tshaj plaws uas siv rau kev ntsuas qhov tseeb. Qhov kev nyuaj siab no txhais tau tias nws tiv taus kev hnav zoo heev, ua kom cov cuab yeej ntsuas granite tseem ua tau raws li qhov tseeb ntev. Tsis zoo li cov hlau uas tuaj yeem khawb, lwj, thiab hnav nrog kev sib cuag ntau zaus, cov qauv crystalline ntawm granite tiv taus kev puas tsuaj ntawm qhov chaw.
Qhov kev tiv thaiv kev hnav no yog ntsuas los ntawm cov ntaub ntawv kev lag luam uas qhia tias cov chaw granite precision muaj tsawg dua 0.3μm ntawm kev hnav dhau kaum xyoo ntawm kev siv tas li, piv rau kwv yees li 0.8μm ib xyoos rau cov hlau cam khwb cia. Rau cov chaw tsim khoom semiconductor thiab optical, qhov no txhais tau tias txo qhov zaus rov kho dua, txo cov nqi kho, thiab kev ntsuas qhov tseeb tas li thoob plaws lub neej ua haujlwm ntawm cov cuab yeej.
Kev Muaj Peev Xwm Ua Kom Muaj Kev Cob Qhia Zoo Tshaj Plaws
Kev co yog tus yeeb ncuab ntawm kev ntsuas qhov tseeb. Hauv cov chaw tsim khoom semiconductor, qhov twg cov motors linear, robotic handling systems, thiab HVAC cov khoom siv tsim cov kev co tas li, lub peev xwm los cais thiab ua kom cov kev cuam tshuam no tsis zoo yog qhov tseem ceeb. Granite cov qauv crystalline ntuj muab cov khoom siv damping kev co uas muaj txiaj ntsig zoo dua 3-5 npaug dua li cov hlau cam khwb cia.
Qhov hnyav siab thiab cov yam ntxwv sab hauv ntawm granite tsim cov lim dej qis qis uas nqus cov kev co siab ua ntej lawv tuaj yeem ncav cuag cov ntsuas ntsuas rhiab heev lossis cov khoom siv kho qhov muag. Qhov kev rho tawm kev co tsis siv neeg no yog qhov tshwj xeeb tshaj yog rau cov tshuab ntsuas sib koom ua ke (CMMs), laser interferometers, thiab wafer inspection systems, qhov twg txawm tias nanometer-scale vibrations tuaj yeem ua rau cov ntaub ntawv ntsuas puas tsuaj.
Cov Khoom Uas Tsis Yog Sib Nqus Thiab Cov Khoom Uas Tsis Muaj Tshuaj Lom Zem
Cov khoom sib xyaw ua ke ntawm Granite uas tsis yog hlau tshem tawm qhov kev pheej hmoo ntawm kev cuam tshuam magnetic, uas yog qhov zoo tseem ceeb hauv kev siv semiconductor thiab optical measurement applications. Cov teb magnetic tuaj yeem cuam tshuam cov khoom siv ntsuas hluav taws xob rhiab heev thiab ua rau muaj qhov yuam kev sib phim hauv cov kab ke optical. Nrog rau cov cuab yeej ntsuas granite, tsis muaj kev pheej hmoo ntawm magnetization cuam tshuam rau qhov tseeb ntawm kev ntsuas lossis nyiam cov khoom ferromagnetic uas tuaj yeem ua puas rau cov wafers lossis cov khoom optical.
Tsis tas li ntawd xwb, granite tsis muaj zog tshuaj lom neeg, tiv taus cov kua qaub, alkalis, thiab cov tshuaj ntxuav uas feem ntau siv hauv chav huv. Qhov kev tiv thaiv tshuaj lom neeg no ua kom cov nplaim granite tseem ua tiav thiab ruaj khov txawm tias raug cov tshuaj lom neeg hnyav siv hauv kev ua semiconductor thiab kev ntxuav cov khoom siv kho qhov muag.
Cov Ntawv Thov Kev Lag Luam Semiconductor: Pab kom muaj Nano-Revolution
Kev Tshuaj Xyuas Wafer thiab Metrology Systems
Hauv kev tsim khoom semiconductor, kev tshuaj xyuas wafer yog ib qho txheej txheem tseem ceeb uas cuam tshuam ncaj qha rau cov txiaj ntsig thiab cov khoom zoo. Cov cuab yeej ntsuas granite ua haujlwm ua lub hauv paus rau kev tshuaj xyuas qhov muag tsis siv neeg (AOI) cov kab ke, cov cuab yeej ntsuas tuab wafer, thiab cov cuab yeej ntsuas qhov ntev tseem ceeb.
Cov nplaim tiaj tiaj ntawm cov hauv paus granite precision muab lub dav hlau ruaj khov uas xav tau rau kev ntsuas geometry wafer raug. Qib 000 granite nto phaj, nrog rau kev kam rau siab ntawm ≤1.5μm / m, xyuas kom meej tias 300mm thiab txawm tias 450mm wafers tau txhawb nqa sib npaug thaum lub sijhawm tshuaj xyuas. Qhov kev txhawb nqa sib npaug no tiv thaiv wafer bowing lossis distortion uas tuaj yeem ua rau muaj qhov yuam kev ntsuas thiab nrhiav pom qhov tsis zoo.
Cov Theem Tshuab Lithography thiab Cov Txheej Txheem Sib Tov
Kev siv tshuab semiconductor lithography yog qhov kev thov uas xav tau tshaj plaws rau cov khoom siv granite precision. Hauv cov tshuab lithography ultraviolet heev (EUV) thiab ultraviolet tob (DUV), cov theem wafer thiab reticle yuav tsum ua tiav qhov tseeb ntawm qhov chaw sub-nanometer thiab tswj kev sib phim thoob plaws thaj chaw raug.
Granite txoj kev sib xyaw ua ke ntawm kev ruaj khov thermal, kev co damping, thiab qhov ntev nyob mus ib txhis ua rau nws yog cov khoom siv zoo tshaj plaws rau cov khoom tseem ceeb no. Qhov kev nthuav dav thermal qis ua kom ntseeg tau tias cov qauv theem tseem ruaj khov thaum cov motors linear tsim cua sov thaum lub sijhawm ua haujlwm ceev ceev, tiv thaiv kev ua yuam kev overlay uas tuaj yeem ua rau tag nrho cov chips puas tsuaj. Cov ntaub ntawv kev lag luam qhia tau hais tias cov theem lithography raws li granite ua tiav qhov rov ua dua ntawm tsawg dua 5nm, ua rau cov qauv ntawm 2nm thiab cov transistor me dua.
Chaw Tshawb Fawb thiab Kev Ntsuas Hluav Taws Xob
Kev siv cov wafer probing ntawm semiconductor yuav tsum tau ua kom raug qhov sib phim ntawm cov probe cards thiab cov wafer test pads. Cov cuab yeej ntsuas granite muab lub hauv paus ruaj khov rau cov chaw soj ntsuam, kom ntseeg tau tias qhov sib phim zoo ntawm cov probes thiab cov pads raug tswj hwm thoob plaws hauv cov kab ke sim. Cov khoom tsis muaj hlau nplaum ntawm granite tshem tawm txhua qhov kev cuam tshuam hlau nplaum nrog cov teeb liab sim hluav taws xob, kom ntseeg tau tias qhov ntsuas tam sim no thiab voltage raug.
Cov Tshuab Ntsuas Sib Koom Tes (CMMs)
Cov tshuab ntsuas sib koom ua ke yog qhov tseem ceeb rau kev txheeb xyuas qhov ntev ntawm cov khoom ntim semiconductor, MEMS cov khoom siv, thiab cov khoom siv. Granite ua haujlwm ua ob qho tib si lub hauv paus qauv thiab qhov chaw siv rau cov tshuab no, muab qhov ruaj khov geometric uas xav tau rau qhov tseeb ntawm kev ntsuas peb-seem. Kev sib xyaw ua ke ntawm lub hauv paus granite, choj granite, thiab granite cua bearing txoj kev tsim ib lub kaw lus ntsuas nrog kev ruaj khov thermal thiab mechanical zoo heev, ua tiav qhov tsis paub meej ntawm kev ntsuas hauv qhov ntau ntawm sub-micron.
Kev Siv Hauv Kev Lag Luam Optical: Txhawb Kev Tswj Lub Teeb Kom Zoo
Lub Rooj Sab Laj Optical thiab Platforms
Kev lag luam kho qhov muag vam khom cov cuab yeej ntsuas granite los muab cov platforms ruaj khov rau cov tshuab laser, interferometers, thiab cov chaw ua haujlwm sib dhos kho qhov muag. Txawm hais tias cov rooj kho qhov muag niaj hnub no feem ntau siv cov hlau honeycomb saum toj kawg nkaus, granite tseem yog cov khoom siv nyiam rau cov qauv hauv paus thiab rau cov ntawv thov uas xav tau qhov kawg hauv kev ruaj khov thermal thiab mechanical.
Cov platforms granite optical muaj qhov tiaj tiaj thiab ruaj khov, ua kom ntseeg tau tias cov khoom siv optical tswj lawv qhov sib dhos raws sijhawm. Qhov no yog qhov tseem ceeb rau kev ntsuas interferometric, qhov twg qhov sib txawv ntawm txoj kab ntev ntawm ob peb nanometers tuaj yeem cuam tshuam rau cov txiaj ntsig ntsuas. Cov khoom siv vibration damping ntawm granite kuj pab cais cov kab ke optical los ntawm kev co ntawm lub tsev thiab cov khoom siv tsim kev cuam tshuam.
Cov Hauv Paus Laser Interferometer thiab Cov Qauv Siv
Cov laser interferometers sawv cev rau daim ntawv thov ntsuas qhov muag uas xav tau tshaj plaws, xav tau kev ruaj khov tshwj xeeb kom tswj tau qhov sib phim ntawm cov iav, cov beam splitters, thiab cov khoom siv kho qhov muag. Cov hauv paus granite muab cov hauv paus ruaj khov, thermally ruaj khov uas tsim nyog rau cov cuab yeej siv siab no.
Hauv cov tshuab ntsuas semiconductor wafer flatness metrology, xws li XCALIBIR interferometer tsim los ntawm National Institute of Standards and Technology (NIST), cov rooj granite ua haujlwm ua lub platform ruaj khov txhawb nqa tag nrho lub tshuab kho qhov muag. Ua haujlwm ntawm kev tswj qhov kub ntawm (20 ± 0.02) ° C, cov kab ke no ua tiav qhov tsis paub meej ntawm kwv yees li 1nm RMS - qib ntawm qhov tseeb uas yuav tsis ua tiav nrog cov qauv hlau.
Kev Sib Dhos thiab Kev Sib Tshuam Optical Precision
Kev sib dhos ua ke ntawm cov tshuab kho qhov muag uas nyuaj heev, suav nrog cov iav koob yees duab, cov iav tsom iav, thiab cov tshuab xa hluav taws xob laser, yuav tsum tau muaj kev sib dhos kom raug ntawm ntau yam khoom siv kho qhov muag. Cov cuab yeej ntsuas granite—xws li cov phaj saum npoo av, cov ntug ncaj, thiab cov phaj kaum sab xis—muab cov ntaub ntawv geometric tsim nyog los xyuas kom meej tias sib dhos zoo thaum sib dhos.
Cov kws kho qhov muag siv cov phaj granite ua cov qauv siv los sib dhos cov khoom siv lens, kom ntseeg tau tias txhua yam khoom tau muab tso rau qhov chaw raug rau lub axis optical. Qhov ruaj khov ntawm granite zoo heev ua kom cov cuab yeej siv no tswj tau lawv qhov tseeb rau ntau xyoo, muab cov qauv sib dhos sib xws thoob plaws lub voj voog tsim khoom ntawm lub tshuab optical.
Cov Kev Zoo Sib Piv: Granite vs. Cov Khoom Siv Hlau Ib Txwm Muaj
Lub Neej Pabcuam Ntev
Cov cuab yeej ntsuas granite muaj lub neej ua haujlwm ntev dua piv rau lwm cov hlau. Nrog rau lub neej ntev li ntawm 30+ xyoo, cov cuab yeej granite tuaj yeem siv tau ntau tiam neeg ntawm cov khoom siv tsim khoom, muab cov txiaj ntsig zoo kawg nkaus ntawm kev nqis peev. Qhov sib piv, cov phaj hlau cam khwb cia feem ntau yuav tsum tau rov ua dua txhua 5-10 xyoo thiab muaj lub neej siv tau ntawm 10-15 xyoo ua ntej yuav tsum tau hloov.
Lub neej ua haujlwm ntev no txhais tau tias yuav txuag tau nyiaj ntau heev rau lub sijhawm ntev. Ib txoj kev tshawb fawb xyoo 2023 los ntawm American Society of Mechanical Engineers (ASME) pom tias cov khoom siv granite muab cov nqi qis dua 27% piv rau cov hlau lossis cov hlau cam khwb cia rau lub sijhawm 10 xyoo. Rau cov chaw tsim khoom semiconductor thiab cov chaw tsim khoom kho qhov muag, qhov no txhais tau tias txo cov peev txheej thiab tsawg dua kev cuam tshuam kev tsim khoom los ntawm kev hloov cov cuab yeej.
Cov Kev Cai Tswj Xyuas Qis Dua
Cov cuab yeej ntsuas granite tsis tas yuav tsum tau saib xyuas ntau dua li cov hlau uas siv. Tsis zoo li cov hlau cam khwb uas yuav tsum tau roj tsis tu ncua kom tiv thaiv xeb thiab khawb ntau zaus kom rov qab tiaj tus, cov granite tsis tas yuav tsum tau saib xyuas thaum ua haujlwm ib txwm.
Qhov tsis muaj qhov porous, tshuaj lom neeg inert ntawm granite txhais tau tias nws tsis xeb, tsis xav tau cov txheej tiv thaiv, thiab tiv taus kev kis kab mob los ntawm cov khib nyiab hauv chaw ua haujlwm thiab cov tshuaj lom neeg. Cov nqi lwj txhua xyoo ntawm kwv yees li 1% txhais tau tias cov cuab yeej granite tswj lawv qhov kev ntsuas ntev dua li cov cuab yeej hlau, uas tuaj yeem ntsib 5-10% txhua xyoo qhov tseeb lwj los ntawm kev hnav thiab cov yam ntxwv ib puag ncig.
Kev Ruaj Ntseg Ntev Ntev
Tej zaum qhov zoo tshaj plaws ntawm cov cuab yeej ntsuas granite yog lawv qhov ruaj khov ntev. Vim tias granite tau raug kev nyuaj siab ntuj tsim ntau lab xyoo hauv qab lub ntiaj teb, nws tsis muaj kev ntxhov siab sab hauv uas ua rau cov qauv hlau khoov thiab deform dhau sijhawm.
Qhov kev ruaj khov no txhais tau tias thaum twg cov cuab yeej ntsuas granite raug txiav kom raug rau nws qhov ntev kawg, nws yuav tswj tau cov qhov ntev ntawd rau ntau xyoo. Cov ntaub ntawv kev lag luam qhia tau tias cov phaj granite tseem khaws tau 95% ntawm lawv qhov tseeb thawj tom qab 10 xyoo ntawm kev siv tas li, piv rau 70-80% rau cov phaj hlau zoo. Rau cov chaw tsim khoom semiconductor thiab optical, qhov no txhais tau tias qhov tseeb ntawm kev ntsuas tas li txhua xyoo, txo qhov kev pheej hmoo ntawm kev ua yuam kev ntau lawm los ntawm kev hloov pauv cov cuab yeej calibration.
Kev Ua Tau Zoo Hauv Lub Ntiaj Teb Tiag: Cov Kev Kawm Txog Cov Ntaub Ntawv thiab Cov Ntaub Ntawv
Kev Tshuaj Xyuas Semiconductor Wafer Zoo
Ib lub tuam txhab tsim khoom semiconductor hauv Tebchaws Europe tau siv cov platform tshuaj xyuas wafer uas ua los ntawm granite thiab tau tshaj tawm txog kev txhim kho tseem ceeb hauv kev ntseeg siab ntawm kev ntsuas. Kev hloov pauv ntawm cov hlau cam khwb cia mus rau cov chaw siv granite ua rau:
- Txo 40% ntawm kev ntsuas qhov sib txawv ntawm kev hloov pauv kub
- Txo 60% ntawm qhov zaus rov kho dua (los ntawm 6-hli mus rau 2-xyoo)
- Kev txhim kho 2.3% ntawm tag nrho cov txiaj ntsig ntawm kev tsim khoom vim muaj kev tshuaj xyuas zoo sib xws
Qhov kev ruaj khov ntawm cov granite platforms tau muaj txiaj ntsig zoo hauv lub tuam txhab 24/7 qhov chaw tsim khoom, qhov twg cov cua sov tsim los ntawm cov khoom siv ua rau muaj kev hloov pauv ntawm qhov kub uas yav dhau los cuam tshuam rau qhov tseeb ntawm kev ntsuas.
Kev Ua Haujlwm ntawm Lub Chaw Kuaj Mob Optical Metrology
Lub Koom Haum Tebchaws ntawm Cov Qauv thiab Kev Siv Tshuab (NIST) tau sau tseg kev ua tau zoo ntawm cov txheej txheem interferometer raws li granite hauv nws lub chaw kuaj mob wafer flatness metrology. Lub XCALIBIR interferometer, uas tau teeb tsa rau ntawm lub rooj granite precision, ua tiav:
- Kev ntsuas qhov tsis meej ntawm ~ 1nm RMS rau 300mm wafers
- 0.01μrad angular stability rau kev sib dhos tseem ceeb ntawm cov khoom siv kho qhov muag
- Kev ua tau zoo tas li thoob plaws 10+ xyoo ntawm kev ua haujlwm tas mus li yam tsis muaj kev puas tsuaj ntawm cov qauv
Qib kev ua tau zoo no, uas tau ua los ntawm granite cov khoom tshwj xeeb, txhawb nqa kev tsim cov thev naus laus zis semiconductor tiam tom ntej.
Kev Txheeb Xyuas Kev Ruaj Ntseg Mus Ntev
Kev sim ywj pheej los ntawm UK's National Physical Laboratory tau soj ntsuam qhov kev ua tau zoo mus sij hawm ntev ntawm cov cuab yeej ntsuas granite hauv qab cov xwm txheej kev lag luam. Tom qab 15 xyoo ntawm kev siv tas mus li hauv ib puag ncig kev tsim khoom raug, cov phaj granite uas tau sim tau qhia tias:
- Tsawg dua 1.2μm qhov sib txawv ntawm qhov sib txawv ntawm cov lus qhia thawj (zoo nyob hauv Qib 000 kev kam rau siab)
- Tsis muaj kev ntsuas qhov chaw hnav txawm tias muaj ntau txhiab lub voj voog ntsuas
- Kev ua tau zoo ntawm kev nthuav dav thermal sib xws nrog cov lus qhia ntawm cov khoom qub
Cov txiaj ntsig no lees paub qhov ua tau zoo thiab ruaj khov ntev ntawm cov cuab yeej ntsuas granite hauv cov ntawv thov kev lag luam uas nyuaj heev.
Cov Qauv Yav Tom Ntej thiab Xaus Lus
Raws li kev lag luam semiconductor txuas ntxiv nws txoj kev nce qib mus rau sub-2nm transistor nodes thiab kev lag luam optical thawb cov ciam teb ntawm kev ua kom raug hauv laser systems, imaging, thiab quantum optics, qhov kev thov rau cov cuab yeej ntsuas ruaj khov, raug yuav tsuas yog nce ntxiv. Cov cuab yeej ntsuas granite, nrog lawv cov kev sib xyaw ua ke ntawm kev ruaj khov thermal, kev tiv thaiv hnav, kev co damping, thiab kev ruaj khov ntev, tau zoo-positioned kom tau raws li cov kev xav tau hloov pauv no.
Cov qauv tshiab hauv cov khoom siv sib xyaw ua ke, kev sib xyaw ua ke ntawm granite nrog cov khoom sib xyaw ua ke lossis cov khoom siv ceramics, cog lus tias yuav txhim kho kev ua haujlwm ntawm cov cuab yeej ntsuas qhov tseeb thaum daws cov kev xav tau tshwj xeeb xws li kev txo qhov hnyav lossis kev ua kom muaj cua sov zoo dua. Txawm li cas los xij, cov txiaj ntsig tseem ceeb ntawm cov granite ntuj - forged hla lub sijhawm geological thiab refined los ntawm kev tsim khoom raug - yuav tseem tsis tau hloov pauv rau cov ntawv thov raug tshaj plaws.
Rau cov chaw tsim khoom semiconductor thiab optical, kev nqis peev rau hauv cov cuab yeej ntsuas granite muab cov txiaj ntsig los ntawm kev txhim kho qhov tseeb ntawm kev ntsuas, txo cov nqi txij nkawm, lub neej ua haujlwm ntev dua, thiab thaum kawg, cov khoom lag luam siab dua. Thaum kev kam rau siab ntawm kev ntsuas txuas ntxiv mus nruj dua thiab cov txheej txheem tsim khoom dhau los ua qhov nyuaj dua, qhov txiaj ntsig ntawm cov cuab yeej ntsuas granite dhau los ua qhov tseem ceeb dua.
Xaus lus, qhov zoo ntawm cov cuab yeej ntsuas granite hauv kev lag luam semiconductor thiab optical yog qhov tseeb thiab tau sau tseg zoo. Los ntawm lawv qhov kev ruaj khov thermal zoo heev thiab kev tiv thaiv kev co mus rau lawv cov peev xwm ua kom lub zog co zoo dua thiab 30+ xyoo kev pabcuam lub neej, cov cuab yeej granite muab lub hauv paus rau kev ntsuas qhov tseeb uas ua rau muaj kev nce qib niaj hnub no. Raws li kev lag luam txuas ntxiv thawb cov ciam teb ntawm qhov ua tau hauv nanomanufacturing thiab optical precision, cov cuab yeej ntsuas granite yuav tseem yog tus qauv kub rau kev ntsuas thiab kev sib dhos.
Lub sijhawm tshaj tawm: Tsib Hlis-08-2026