Hauv thaj chaw ntawm cov tshuab kho qhov muag uas muaj qhov tseeb siab—los ntawm cov khoom siv lithography mus rau laser interferometers—qhov tseeb ntawm kev sib dhos txiav txim siab qhov ua tau zoo ntawm lub kaw lus. Kev xaiv cov khoom siv substrate rau cov platform sib dhos optical tsis yog tsuas yog kev xaiv ntawm qhov muaj xwb tab sis kev txiav txim siab tseem ceeb ntawm engineering uas cuam tshuam rau kev ntsuas qhov tseeb, kev ruaj khov thermal, thiab kev ntseeg tau mus sij hawm ntev. Qhov kev tshuaj xyuas no tshuaj xyuas tsib qhov tseem ceeb uas ua rau cov iav substrates precision yog qhov kev xaiv zoo tshaj plaws rau cov tshuab sib dhos optical, txhawb nqa los ntawm cov ntaub ntawv ntau thiab cov kev coj ua zoo tshaj plaws hauv kev lag luam.
Kev Taw Qhia: Lub Luag Haujlwm Tseem Ceeb ntawm Cov Khoom Siv Hauv Paus Hauv Kev Teeb Pom Kev Zoo
Cov txheej txheem sib dhos kho qhov muag xav tau cov ntaub ntawv uas tswj tau qhov ruaj khov zoo kawg nkaus thaum muab cov khoom siv kho qhov muag zoo tshaj plaws. Txawm hais tias sib dhos cov khoom photonic hauv cov chaw tsim khoom tsis siv neeg lossis tswj cov chaw siv interferometric hauv cov chaw soj nstuam metrology, cov khoom siv substrate yuav tsum ua kom pom tseeb hauv qab cov khoom siv thermal sib txawv, kev ntxhov siab ntawm lub cev, thiab cov xwm txheej ib puag ncig.
Qhov Kev Sib Tw Tseem Ceeb:
Xav txog ib qho xwm txheej sib dhos kho qhov muag: kev sib dhos cov fibers kho qhov muag hauv lub tshuab sib dhos photonics yuav tsum tau qhov tseeb ntawm qhov chaw hauv ± 50 nm. Nrog rau qhov coefficient thermal ntawm kev nthuav dav (CTE) ntawm 7.2 × 10⁻⁶ /K (ib txwm ntawm txhuas), qhov kub thiab txias hloov pauv ntawm tsuas yog 1 ° C hla 100 hli substrate ua rau muaj kev hloov pauv ntawm 720 nm - ntau dua 14 npaug ntawm qhov kev kam rau siab. Qhov kev suav yooj yim no qhia txog vim li cas kev xaiv cov khoom siv tsis yog kev xav tom qab tab sis yog qhov tsim qauv tseem ceeb.
Kev Qhia Tshwj Xeeb 1: Kev Xa Mus Los Ntawm Optical thiab Spectral Performance
Kev Ntsuas: Kev Kis > 92% hla qhov ntau thiab tsawg ntawm qhov ntev (feem ntau yog 400-2500 nm) nrog qhov roughness ntawm qhov chaw Ra ≤ 0.5 nm.
Vim Li Cas Nws Tseem Ceeb Rau Cov Txheej Txheem Sib Tov:
Kev xa hluav taws xob ntawm lub teeb ncaj qha cuam tshuam rau qhov sib piv ntawm lub teeb liab thiab lub suab nrov (SNR) ntawm cov txheej txheem sib dhos. Hauv cov txheej txheem sib dhos nquag, cov ntsuas hluav taws xob ntawm lub teeb lossis cov khoom ntsuas duab ntsuas kev xa hluav taws xob los ntawm lub kaw lus kom ua kom zoo dua qhov chaw ntawm cov khoom. Kev xa hluav taws xob ntawm cov khoom siv siab dua ua rau kev ntsuas raug thiab txo lub sijhawm sib dhos.
Kev Cuam Tshuam Ntau:
Rau cov tshuab teeb tsa optical alignment uas siv cov kev sib txuas lus los ntawm kev xa mus (qhov twg cov kab teeb tsa hla dhau lub substrate), txhua 1% nce hauv kev xa mus tuaj yeem txo lub sijhawm sib dhos los ntawm 3-5%. Hauv cov chaw tsim khoom tsis siv neeg uas qhov kev ntsuas throughput yog qhov ntsuas hauv ib feeb, qhov no txhais tau tias muaj kev nce ntxiv ntawm kev tsim khoom.
Kev Sib Piv Khoom Siv:
| Khoom siv | Pom Kev Kis Tau (400-700 nm) | Kev Sib Kis Ze-IR (700-2500 nm) | Kev Muaj Peev Xwm Nto Roughness |
|---|---|---|---|
| N-BK7 | >95% | >95% | Ra ≤ 0.5 nm |
| Silica sib xyaw ua ke | >95% | >95% | Ra ≤ 0.3 nm |
| Borofloat®33 | ~92% | ~90% | Ra ≤ 1.0 nm |
| AF 32® eco | ~93% | >93% | Ra <1.0 nm RMS |
| Zerodur® | N/A (pob tshab hauv qhov pom) | Tsis muaj | Ra ≤ 0.5 nm |
Qhov Zoo ntawm Qhov Chaw thiab Kev Tawg:
Qhov roughness ntawm qhov chaw ncaj qha cuam tshuam nrog kev poob ntawm kev tawg. Raws li Rayleigh scattering theory, kev poob ntawm kev tawg nplai nrog lub zog thib rau ntawm qhov roughness ntawm qhov chaw piv rau wavelength. Rau 632.8 nm HeNe laser alignment beam, kev txo qhov roughness ntawm qhov chaw los ntawm Ra = 1.0 nm mus rau Ra = 0.5 nm tuaj yeem txo qhov sib zog ntawm lub teeb tawg los ntawm 64%, txhim kho qhov tseeb ntawm kev sib dhos.
Daim Ntawv Thov Hauv Lub Ntiaj Teb Tiag:
Hauv cov txheej txheem sib dhos photonics wafer-level, kev siv cov fused silica substrates nrog Ra ≤ 0.3 nm nto tiav ua rau qhov tseeb sib dhos zoo dua 20 nm, qhov tseem ceeb rau cov khoom siv silicon photonic nrog hom teb diameters hauv qab 10 μm.
Kev Qhia Tshwj Xeeb 2: Qhov Chaw Nto thiab Kev Ruaj Ntseg ntawm Qhov Ntev
Parameter: Qhov tiaj tiaj ntawm qhov chaw ≤ λ/20 ntawm 632.8 nm (kwv yees li 32 nm PV) nrog rau qhov tuab sib xws ±0.01 hli lossis zoo dua.
Vim Li Cas Nws Tseem Ceeb Rau Cov Txheej Txheem Sib Tov:
Qhov tiaj tiaj ntawm qhov chaw yog qhov tseem ceeb tshaj plaws rau kev sib dhos cov khoom siv, tshwj xeeb tshaj yog rau cov tshuab kho qhov muag thiab cov ntawv thov interferometric. Kev hloov pauv ntawm qhov tiaj tiaj ua rau muaj qhov yuam kev ntawm nthwv dej uas cuam tshuam ncaj qha rau qhov tseeb ntawm kev sib dhos thiab kev ntsuas qhov tseeb.
Cov Kev Cai ntawm Kev Ua Haujlwm ntawm Qhov Chaw tiaj tus:
Rau lub laser interferometer nrog 632.8 nm HeNe laser, qhov chaw tiaj tiaj ntawm λ / 4 (158 nm) ua rau muaj qhov yuam kev ntawm nthwv dej ntawm ib nrab nthwv dej (ob npaug ntawm qhov sib txawv ntawm qhov chaw) ntawm qhov xwm txheej ib txwm muaj. Qhov no tuaj yeem ua rau muaj qhov yuam kev ntsuas ntau dua 100 nm - tsis lees txais rau cov ntawv thov precision metrology.
Kev faib tawm los ntawm Daim Ntawv Thov:
| Kev Qhia Txog Kev Sib Npaug | Chav Kawm Ntawv Thov | Cov Qauv Siv Ib Txwm Muaj |
|---|---|---|
| ≥1λ | Qib lag luam | Kev teeb pom kev dav dav, kev sib dhos tsis tseem ceeb |
| λ/4 | Qib ua haujlwm | Cov lasers fais fab tsawg-nruab nrab, cov tshuab thaij duab |
| ≤λ/10 | Qib kev ua kom raug | Cov lasers muaj zog heev, cov txheej txheem ntsuas |
| ≤λ/20 | Ultra-precision | Interferometry, lithography, photonics sib dhos |
Cov Kev Sib Tw Tsim Khoom:
Kev ua tiav λ/20 qhov tiaj tiaj thoob plaws cov substrates loj (200 mm+) muaj cov teeb meem loj heev rau kev tsim khoom. Kev sib raug zoo ntawm qhov loj ntawm substrate thiab qhov tiaj tiaj uas ua tau raws li txoj cai square: rau tib qho kev ua tiav zoo, qhov yuam kev ntawm qhov tiaj tiaj yuav kwv yees li ntawm qhov square ntawm txoj kab uas hla. Kev ua ob npaug ntawm qhov loj ntawm substrate los ntawm 100 mm txog 200 mm tuaj yeem ua rau qhov sib txawv ntawm qhov tiaj tiaj los ntawm 4.
Cov Ntaub Ntawv Hauv Lub Ntiaj Teb Tiag:
Ib lub tuam txhab tsim khoom siv lithography thaum xub thawj siv cov iav borosilicate uas muaj λ/4 tiaj tiaj rau cov theem sib dhos lub ntsej muag. Thaum hloov mus rau 193 nm immersion lithography nrog cov kev cai sib dhos qis dua 30 nm, lawv tau hloov kho mus rau fused silica substrates nrog λ/20 tiaj tiaj. Qhov tshwm sim: qhov tseeb sib dhos tau zoo dua los ntawm ±80 nm mus rau ±25 nm, thiab cov nqi tsis zoo tau txo qis 67%.
Kev Ruaj Ntseg Dhau Lub Sijhawm:
Tsis yog tsuas yog yuav tsum ua kom tiaj tiaj ntawm qhov chaw thaum pib xwb tab sis yuav tsum tswj hwm kom ruaj khov mus txog thaum kawg ntawm lub neej ntawm cov khoom. Cov khoom siv iav muaj kev ruaj khov zoo heev mus sij hawm ntev nrog kev hloov pauv ntawm qhov tiaj tiaj feem ntau tsawg dua λ/100 ib xyoos nyob rau hauv cov xwm txheej hauv chav kuaj ib txwm muaj. Qhov sib txawv, cov khoom siv hlau tuaj yeem ua rau muaj kev ntxhov siab thiab kev txav mus los, ua rau qhov tiaj tiaj puas tsuaj mus rau ntau lub hlis.
Cov Lus Qhia 3: Coefficient of Thermal Expansion (CTE) thiab Thermal Stability
Cov Kev Ntsuas: CTE xws li ze-xoom (±0.05 × 10⁻⁶/K) rau cov ntawv thov ultra-precision mus rau 3.2 × 10⁻⁶/K rau cov ntawv thov sib phim silicon.
Vim Li Cas Nws Tseem Ceeb Rau Cov Txheej Txheem Sib Tov:
Kev nthuav dav ntawm cua sov yog qhov loj tshaj plaws ntawm qhov tsis ruaj khov ntawm qhov ntev hauv cov kab ke sib dhos kho qhov muag. Cov ntaub ntawv substrate yuav tsum muaj kev hloov pauv me me hauv qab qhov kub hloov pauv uas ntsib thaum lub sijhawm ua haujlwm, kev ncig ib puag ncig, lossis cov txheej txheem tsim khoom.
Kev Sib Tw Thermal Expansion:
Rau qhov sib dhos substrate 200 mm:
| CTE (×10⁻⁶/K) | Kev Hloov Pauv ntawm Qhov Ntev ib ° C | Kev Hloov Pauv Qhov Loj Ib Zaug 5 ° C Kev Hloov Pauv |
|---|---|---|
| 23 (Txhuas) | 4.6 μm | 23 μm |
| 7.2 (Hlau) | 1.44 μm | 7.2 μm |
| 3.2 (AF 32® eco) | 0.64 μm | 3.2 μm |
| 0.05 (ULE®) | 0.01 μm | 0.05 μm |
| 0.007 (Zerodur®) | 0.0014 μm | 0.007 μm |
Cov Chav Kawm Khoom Siv los ntawm CTE:
Iav Uas Tsis Ntev Heev (ULE®, Zerodur®):
- CTE: 0 ± 0.05 × 10⁻⁶/K (ULE) los yog 0 ± 0.007 × 10⁻⁶/K (Zerodur)
- Daim Ntawv Thov: Kev cuam tshuam kev ntsuas siab heev, lub tshuab tsom iav qhov chaw, daim iav siv lithography
- Kev pauv pauv: Tus nqi siab dua, kev xa hluav taws xob tsawg hauv cov spectrum pom kev
- Piv txwv li: Lub iav tseem ceeb ntawm Hubble Space Telescope siv ULE iav nrog CTE < 0.01 × 10⁻⁶/K
Silicon-Matching iav (AF 32® eco):
- CTE: 3.2 × 10⁻⁶/K (zoo ib yam li silicon 3.4 × 10⁻⁶/K)
- Daim Ntawv Thov: MEMS ntim khoom, silicon photonics kev koom ua ke, kev sim semiconductor
- Qhov Zoo: Txo cov kev ntxhov siab thermal hauv cov sib dhos sib txuas
- Kev Ua Tau Zoo: Ua rau CTE tsis sib xws hauv qab 5% nrog cov khoom siv silicon
Iav Kho Qhov Muag Txheem (N-BK7, Borofloat®33):
- CTE: 7.1-8.2 × 10⁻⁶/K
- Daim Ntawv Thov: Kev teeb tsa kho qhov muag dav dav, qhov yuav tsum tau ua kom raug nruab nrab
- Qhov Zoo: Kev sib kis tau zoo heev, tus nqi qis dua
- Kev Txwv: Yuav tsum tau tswj qhov kub thiab txias rau cov ntawv thov siab
Kev Tiv Thaiv Kev Kub Ntxhov:
Tshaj li qhov loj ntawm CTE, kev tiv taus cua sov yog qhov tseem ceeb rau kev hloov pauv kub sai. Cov iav fused silica thiab borosilicate (xws li Borofloat®33) ua rau muaj kev tiv taus cua sov zoo heev, tiv taus qhov sib txawv ntawm qhov kub tshaj 100 ° C yam tsis muaj kev tawg. Cov yam ntxwv no yog qhov tseem ceeb rau cov kab ke sib dhos uas raug kev hloov pauv ib puag ncig sai lossis cua sov hauv zos los ntawm cov lasers muaj zog siab.
Daim Ntawv Thov Hauv Lub Ntiaj Teb Tiag:
Ib lub tshuab sib dhos photonics rau kev sib txuas fiber ntau ua haujlwm hauv ib puag ncig tsim khoom 24/7 nrog qhov kub thiab txias hloov pauv txog li ± 5 ° C. Siv cov khoom siv txhuas (CTE = 23 × 10⁻⁶ / K) ua rau muaj kev sib txuas ua haujlwm hloov pauv ntawm ± 15% vim muaj kev hloov pauv ntawm qhov ntev. Hloov mus rau AF 32® eco substrates (CTE = 3.2 × 10⁻⁶ / K) txo qhov sib txuas ua haujlwm hloov pauv tsawg dua ± 2%, txhim kho cov khoom tsim tau zoo.
Kev Xav Txog Qhov Kub thiab Txias:
Txawm tias muaj cov ntaub ntawv CTE qis, qhov kub thiab txias hloov pauv thoob plaws lub substrate tuaj yeem ua rau muaj kev cuam tshuam hauv zos. Rau λ/20 qhov kev kam rau siab thoob plaws lub substrate 200 hli, qhov kub thiab txias hloov pauv yuav tsum tau tswj hwm qis dua 0.05 ° C/mm rau cov ntaub ntawv nrog CTE ≈ 3 × 10⁻⁶/K. Qhov no xav tau ob qho tib si xaiv cov ntaub ntawv thiab kev tsim qauv tswj kev kub kom zoo.
Cov Lus Qhia 4: Cov Khoom Siv Kho Tshuab thiab Kev Tiv Thaiv Kev co
Cov Kev Ntsuas: Young's modulus 67-91 GPa, kev sib txhuam sab hauv Q⁻¹ > 10⁻⁴, thiab tsis muaj kev ntxhov siab sab hauv birefringence.
Vim Li Cas Nws Tseem Ceeb Rau Cov Txheej Txheem Sib Tov:
Kev ruaj khov ntawm lub tshuab suav nrog kev ruaj khov ntawm qhov ntev hauv qab qhov hnyav, cov yam ntxwv ntawm kev co, thiab kev tiv thaiv kev ntxhov siab-ua rau muaj kev sib txhuam - txhua yam tseem ceeb rau kev tswj hwm qhov tseeb ntawm kev sib dhos hauv cov chaw ib puag ncig.
Modulus Elastic thiab Rigidity:
Qhov elastic modulus siab dua txhais tau tias muaj kev tiv taus ntau dua rau kev hloov pauv hauv qab lub nra hnyav. Rau lub nqaj hlau uas yooj yim txhawb nqa ntawm qhov ntev L, tuab t, thiab elastic modulus E, kev hloov pauv hauv qab lub nra hnyav ntsuas nrog L³ / (Et³). Qhov kev sib raug zoo inverse cubic nrog tuab thiab kev sib raug zoo ncaj qha nrog qhov ntev qhia txog vim li cas qhov nruj yog qhov tseem ceeb rau cov substrates loj.
| Khoom siv | Young's Modulus (GPa) | Kev Nyuaj Tshwj Xeeb (E/ρ, 10⁶ m) |
|---|---|---|
| Silica sib xyaw ua ke | 72 | 32.6 |
| N-BK7 | 82 | 34.0 |
| AF 32® eco | 74.8 | 30.8 |
| Txhuas 6061 | 69 | 25.5 |
| Hlau (440C) | 200 | 25.1 |
Kev Soj Ntsuam: Txawm hais tias hlau muaj qhov ruaj khov siab tshaj plaws, nws qhov ruaj khov tshwj xeeb (qhov ruaj khov-rau-qhov hnyav piv) zoo ib yam li txhuas. Cov ntaub ntawv iav muaj qhov ruaj khov tshwj xeeb piv rau cov hlau nrog cov txiaj ntsig ntxiv: cov khoom tsis yog hlau nplaum thiab tsis muaj kev poob tam sim no.
Kev sib txhuam sab hauv thiab kev co:
Kev sib txhuam sab hauv (Q⁻¹) txiav txim siab lub peev xwm ntawm cov khoom siv los tshem tawm lub zog co. Iav feem ntau qhia Q⁻¹ ≈ 10⁻⁴ txog 10⁻⁵, muab kev co siab zoo dua li cov khoom siv crystalline xws li txhuas (Q⁻¹ ≈ 10⁻³) tab sis tsawg dua li cov polymers. Qhov kev co nruab nrab no pab tswj kev co siab yam tsis muaj kev cuam tshuam rau qhov tsis muaj zog ntawm qhov zaus qis.
Txoj Kev Cais Tawm Kev Co:
Rau cov platforms optical alignment, cov khoom siv substrate yuav tsum ua haujlwm ua ke nrog cov kab ke cais tawm:
- Kev Rho Tawm Zaus Qis: Muab los ntawm cov pneumatic isolators nrog resonant frequencies 1-3 Hz
- Kev Tiv Thaiv Nruab Nrab Zaus: Txo los ntawm kev sib txhuam sab hauv ntawm lub substrate thiab kev tsim qauv
- Kev Lim Zaus Siab: Ua tiav los ntawm kev thauj khoom ntau thiab kev tsis sib haum xeeb
Kev Nyuaj Siab Birefringence:
Iav yog ib yam khoom amorphous thiab yog li ntawd yuav tsum tsis muaj kev sib xyaw ua ke. Txawm li cas los xij, kev ntxhov siab los ntawm kev ua tiav tuaj yeem ua rau muaj kev sib xyaw ua ke ib ntus uas cuam tshuam rau cov kab ke sib dhos polarized. Rau cov ntawv thov sib dhos precision uas muaj cov kab polarized, kev ntxhov siab seem yuav tsum tau tswj hwm qis dua 5 nm / cm (ntsuas ntawm 632.8 nm).
Kev Ua Haujlwm Pab Txo Kev Nyuaj Siab:
Kev ua kom sov zoo tshem tawm kev ntxhov siab sab hauv:
- Qhov kub thiab txias ib txwm muaj: 0.8 × Tg (qhov kub hloov iav)
- Lub sijhawm ua kom kub: 4-8 teev rau 25 hli tuab (teev nrog tuab plaub fab)
- Tus nqi txias: 1-5 ° C / teev los ntawm qhov chaw lim
Cov Ntaub Ntawv Hauv Lub Ntiaj Teb Tiag:
Ib lub tshuab kuaj xyuas semiconductor tau ntsib qhov tsis sib xws nrog 0.5 μm amplitude ntawm 150 Hz. Kev tshawb nrhiav qhia tau tias cov tuav aluminium substrate tau co vim yog kev ua haujlwm ntawm cov khoom siv. Hloov txhuas nrog borofloat®33 iav (zoo ib yam li CTE rau silicon tab sis muaj qhov ruaj khov dua) txo qhov kev co los ntawm 70% thiab tshem tawm qhov yuam kev tsis sib xws.
Lub Peev Xwm Thauj Khoom thiab Kev Hloov Pauv:
Rau cov platform sib dhos uas txhawb nqa cov optics hnyav, yuav tsum tau xam qhov deflection hauv qab load. Ib lub 300 hli txoj kab uas hla fused silica substrate, 25 hli tuab, deflects tsawg dua 0.2 μm nyob rau hauv 10 kg centrally thov load - negligence rau feem ntau cov ntawv thov sib dhos optical uas xav tau qhov tseeb qhov chaw hauv 10-100 nm ntau yam.
Cov Lus Qhia 5: Kev Ruaj Ntseg Tshuaj thiab Kev Tiv Thaiv Ib puag ncig
Kev Ntsuas: Kev tiv taus hydrolytic Chav Kawm 1 (ib qho ISO 719), kev tiv taus kua qaub Chav Kawm A3, thiab kev tiv taus huab cua tshaj 10 xyoo yam tsis muaj kev puas tsuaj.
Vim Li Cas Nws Tseem Ceeb Rau Cov Txheej Txheem Sib Tov:
Kev ruaj khov ntawm cov tshuaj lom neeg ua kom muaj kev ruaj khov ntev thiab kev ua haujlwm pom kev zoo hauv ntau qhov chaw sib txawv - los ntawm cov chav huv nrog cov tshuaj ntxuav hnyav mus rau cov chaw lag luam nrog kev raug cov kuab tshuaj, av noo, thiab kev hloov pauv kub.
Kev faib tawm tiv thaiv tshuaj lom neeg:
Cov ntaub ntawv iav raug cais tawm los ntawm lawv qhov kev tiv thaiv rau ntau yam tshuaj lom neeg:
| Hom Kev Tiv Thaiv | Txoj Kev Ntsuas | Kev faib tawm | Qhov Rooj Kawg |
|---|---|---|---|
| Hydrolytic | ISO 719 | Chav Kawm 1 | <10 μg Na₂O sib npaug ib gram |
| Kua qaub | ISO 1776 | Chav Kawm A1-A4 | Kev poob phaus ntawm qhov chaw tom qab raug kua qaub |
| Alkali | ISO 695 | Chav Kawm 1-2 | Qhov hnyav poob ntawm qhov chaw tom qab raug alkali |
| Kev puas tsuaj | Kev raug tshav ntuj sab nraum zoov | Zoo heev | Tsis muaj kev puas tsuaj ntsuas tau tom qab 10 xyoo |
Kev Sib Haum Xeeb ntawm Kev Ntxuav:
Cov tshuab kho qhov muag yuav tsum tau ntxuav tas li kom ua haujlwm tau zoo. Cov tshuaj ntxuav feem ntau suav nrog:
- Cawv Isopropyl (IPA)
- Acetone
- Dej uas tsis muaj ionized
- Cov kev daws teeb meem tshwj xeeb rau kev ntxuav qhov muag
Cov iav fused silica thiab borosilicate ua tau zoo heev rau txhua yam tshuaj ntxuav. Txawm li cas los xij, qee cov iav kho qhov muag (tshwj xeeb tshaj yog cov iav flint uas muaj cov hmoov txhuas ntau) tuaj yeem raug tawm tsam los ntawm qee cov tshuaj yaj, ua rau cov kev xaiv ntxuav tsawg dua.
Cov av noo thiab dej nqus:
Kev nqus dej ntawm cov iav nto tuaj yeem cuam tshuam rau kev ua haujlwm ntawm qhov muag thiab kev ruaj khov ntawm qhov ntev. Thaum muaj 50% ntawm qhov av noo, fused silica nqus tsawg dua 1 monolayer ntawm cov dej molecules, ua rau muaj kev hloov pauv me me ntawm qhov ntev thiab kev poob ntawm kev xa xov ntawm qhov muag. Txawm li cas los xij, kev ua qias tuaj ntawm qhov chaw ua ke nrog cov av noo tuaj yeem ua rau muaj cov dej ua rau, ua rau qhov zoo ntawm qhov chaw poob qis.
Kev Sib Txuas Lus ntawm Kev Tawm Pa thiab Kev Siv Lub Tshuab Nqus Tsev:
Rau cov txheej txheem sib dhos ua haujlwm hauv lub tshuab nqus tsev (xws li cov txheej txheem kho qhov muag raws li qhov chaw lossis kev sim chav nqus tsev), kev tso pa tawm yog qhov teeb meem tseem ceeb. Iav muaj cov nqi tso pa tawm qis heev:
- Fused silica: < 10⁻¹⁰ Torr·L/s·cm²
- Borosilicate: < 10⁻⁹ Torr·L/s·cm²
- Txhuas: 10⁻⁸ – 10⁻⁷ Torr·L/s·cm²
Qhov no ua rau cov iav substrates yog qhov kev xaiv zoo tshaj plaws rau cov tshuab sib dhos uas sib xws nrog lub tshuab nqus tsev.
Kev Tiv Thaiv Hluav Taws Xob:
Rau cov ntawv thov uas muaj cov hluav taws xob ionizing (cov kab ke hauv qhov chaw, cov chaw tsim hluav taws xob nuclear, cov khoom siv X-ray), qhov tsaus ntuj uas tshwm sim los ntawm cov hluav taws xob tuaj yeem ua rau lub teeb pom kev tsis zoo. Cov tsom iav uas tawv tiv taus hluav taws xob muaj, tab sis txawm tias cov fused silica txheem kuj tseem ua tau zoo heev:
- Fused silica: Tsis muaj qhov poob kis tau txog li 10 krad tag nrho cov koob tshuaj
- N-BK7: Kev poob kis <1% ntawm 400 nm tom qab 1 krad
Kev Ruaj Ntseg Mus Ntev:
Cov nyhuv sib sau ua ke ntawm cov tshuaj lom neeg thiab cov yam ntxwv ib puag ncig txiav txim siab qhov ruaj khov mus sij hawm ntev. Rau cov khoom sib dhos kom raug:
- Fused silica: Kev ruaj khov ntawm qhov ntev <1 nm ib xyoos nyob rau hauv cov xwm txheej hauv chav kuaj ib txwm muaj
- Zerodur®: Kev ruaj khov ntawm qhov ntev < 0.1 nm ib xyoos (vim yog kev ruaj khov ntawm theem crystalline)
- Txhuas: Qhov ntev ntawm qhov sib txawv 10-100 nm ib xyoos vim yog kev so kom txaus thiab kev hloov pauv cua sov
Daim Ntawv Thov Hauv Lub Ntiaj Teb Tiag:
Ib lub tuam txhab tshuaj siv cov tshuab kho qhov muag teeb tsa rau kev tshuaj xyuas tsis siv neeg hauv chav huv nrog kev ntxuav IPA txhua hnub. Thaum xub thawj siv cov khoom siv kho qhov muag yas, lawv tau ntsib kev puas tsuaj ntawm qhov chaw uas yuav tsum tau hloov txhua 6 lub hlis. Hloov mus rau borofloat®33 iav substrates ua rau lub neej ntawm cov khoom ntev dua 5 xyoos, txo cov nqi kho los ntawm 80% thiab tshem tawm lub sijhawm tsis tau npaj tseg vim yog kev puas tsuaj ntawm qhov muag.
Kev Xaiv Khoom Siv: Sib phim Cov Lus Qhia rau Cov Ntawv Thov
Raws li tsib qhov tseem ceeb, cov ntawv thov kev teeb tsa kho qhov muag tuaj yeem faib ua pawg thiab phim nrog cov ntaub ntawv iav tsim nyog:
Kev Sib Tov Zoo Tshaj Plaws (≤10 nm qhov tseeb)
Cov Kev Cai:
- Kev tiaj tus: ≤ λ / 20
- CTE: Ze li xoom (≤0.05 × 10⁻⁶/K)
- Kev Sib Kis: > 95%
- Kev co damping: High-Q sab hauv kev sib txhuam
Cov Khoom Siv Pom Zoo:
- ULE® (Corning Code 7972): Rau cov ntawv thov uas xav tau kev sib kis pom/NIR
- Zerodur®: Rau cov ntawv thov uas tsis tas yuav muaj kev sib kis pom kev
- Fused Silica (qib siab): Rau cov ntawv thov nrog qhov yuav tsum tau ua kom sov nruab nrab
Cov Ntawv Thov Ib Txwm Muaj:
- Cov theem sib dhos ntawm lithography
- Kev ntsuas interferometric
- Cov tshuab kho qhov muag uas siv qhov chaw
- Kev sib dhos ua ke ntawm photonics
Kev Sib Tov Siab Siab (10-100 nm qhov tseeb)
Cov Kev Cai:
- Kev tiaj tiaj: λ/10 txog λ/20
- CTE: 0.5-5 × 10⁻⁶/K
- Kev Sib Kis: > 92%
- Kev tiv thaiv tshuaj zoo
Cov Khoom Siv Pom Zoo:
- Fused Silica: Kev ua tau zoo heev
- Borofloat®33: Tiv taus kev co thermal zoo, CTE nruab nrab
- AF 32® eco: Silicon-matching CTE rau MEMS kev koom ua ke
Cov Ntawv Thov Ib Txwm Muaj:
- Kev sib dhos ua haujlwm laser
- Kev sib dhos ua ke ntawm fiber optic
- Kev tshuaj xyuas semiconductor
- Tshawb nrhiav cov tshuab kho qhov muag
Kev Sib Tov Kom Tseeb Dav Dav (100-1000 nm qhov tseeb)
Cov Kev Cai:
- Kev tiaj tiaj: λ/4 txog λ/10
- CTE: 3-10 × 10⁻⁶/K
- Kev Sib Kis: > 90%
- Tus nqi tsim nyog
Cov Khoom Siv Pom Zoo:
- N-BK7: Cov iav kho qhov muag txheem, kev sib kis zoo heev
- Borofloat®33: Kev ua haujlwm thermal zoo, tus nqi qis dua li fused silica
- Iav dej qab zib-txiv qaub ntsuab: Tus nqi tsim nyog rau cov ntawv thov tsis tseem ceeb
Cov Ntawv Thov Ib Txwm Muaj:
- Kev kawm txog optics
- Cov txheej txheem sib dhos ua lag luam
- Cov khoom siv kho qhov muag rau cov neeg siv khoom
- Cov khoom siv hauv chav kuaj dav dav
Kev Xav Txog Kev Tsim Khoom: Ua tiav Tsib Yam Tseem Ceeb
Dhau li ntawm kev xaiv cov khoom siv, cov txheej txheem tsim khoom txiav txim siab seb cov lus qhia theoretical puas ua tiav hauv kev xyaum.
Cov Txheej Txheem Ua Kom Tiav Nto
Kev Sib Tsoo thiab Polishing:
Kev nce qib ntawm kev sib tsoo ntxhib mus rau kev sib tsoo zaum kawg txiav txim siab qhov zoo ntawm qhov chaw thiab qhov tiaj tus:
- Kev Sib Tsoo Tsis Zoo: Tshem tawm cov khoom loj, ua tiav qhov kam rau tuab ± 0.05 hli
- Kev Sib Tsoo Zoo: Txo qhov roughness ntawm qhov chaw rau Ra ≈ 0.1-0.5 μm
- Kev txhuam: Ua tiav qhov kawg ntawm qhov chaw tiav Ra ≤ 0.5 nm
Kev Sib Txhuam Pitch vs. Kev Sib Txhuam Uas Tswj Los Ntawm Computer:
Kev txhuam hniav ib txwm muaj peev xwm ua tiav λ/20 tiaj tiaj ntawm cov khoom me me mus rau nruab nrab (txog li 150 hli). Rau cov khoom loj dua lossis thaum xav tau ntau dua, kev txhuam hniav uas tswj los ntawm lub khoos phis tawj (CCP) lossis kev ua tiav magnetorheological (MRF) ua rau:
- Kev tiaj tiaj sib xws thoob plaws 300-500 hli substrates
- Txo lub sijhawm ua haujlwm los ntawm 40-60%
- Muaj peev xwm kho qhov yuam kev ntawm qhov nruab nrab ntawm qhov chaw
Kev Ua Thermal thiab Annealing:
Raws li tau hais ua ntej lawm, kev annealing kom zoo yog qhov tseem ceeb rau kev txo kev ntxhov siab:
- Kub kub annealing: 0.8 × Tg (kub hloov iav)
- Lub sijhawm ua haujlwm: 4-8 teev (siv cov roj teeb los ua kom sov)
- Tus nqi txias: 1-5 ° C / teev los ntawm qhov chaw ntxhov siab
Rau cov tsom iav uas muaj CTE qis xws li ULE thiab Zerodur, tej zaum yuav xav tau kev hloov pauv thermal ntxiv kom ua tiav qhov ruaj khov. Lub "txheej txheem laus" rau Zerodur suav nrog kev hloov pauv cov khoom siv ntawm 0 ° C thiab 100 ° C rau ntau lub lis piam kom ruaj khov cov theem crystalline.
Kev Tswj Xyuas Zoo thiab Kev Ntsuas
Kev txheeb xyuas kom meej tias cov lus qhia tau ua tiav yuav tsum muaj kev ntsuas metrology zoo:
Kev Ntsuas Qhov Sib Npaug:
- Interferometry: Zygo, Veeco, lossis cov laser interferometers zoo sib xws nrog λ/100 qhov tseeb
- Kev ntsuas wavelength: Feem ntau 632.8 nm (HeNe laser)
- Qhov qhib: Qhov qhib meej yuav tsum tshaj 85% ntawm txoj kab uas hla ntawm cov khoom siv
Kev Ntsuas Qhov Roughness Ntawm Qhov Chaw:
- Atomic Force Microscopy (AFM): Rau Ra ≤ 0.5 nm kev txheeb xyuas
- Kev Sib Txuas Lus Dawb Lub Teeb: Rau qhov roughness 0.5-5 nm
- Kev Sib Txuas Lus Profilemetry: Rau qhov roughness > 5 nm
Kev Ntsuas CTE:
- Dilatometry: Rau kev ntsuas CTE tus qauv, qhov tseeb ±0.01 × 10⁻⁶/K
- Kev ntsuas Interferometric CTE: Rau cov ntaub ntawv CTE qis heev, qhov tseeb ± 0.001 × 10⁻⁶/K
- Fizeau interferometry: Rau kev ntsuas CTE homogeneity thoob plaws cov substrates loj
Kev Xav Txog Kev Sib Koom Ua Ke: Kev Siv Cov Iav Uas Muaj Cov Khoom Siv Iav Rau Hauv Cov Txheej Txheem Sib Koom Ua Ke
Kev siv cov iav substrates kom raug yuav tsum tau ua tib zoo saib xyuas kev teeb tsa, kev tswj hwm thermal, thiab kev tswj hwm ib puag ncig.
Kev Teeb thiab Kev Kho
Cov Ntsiab Cai ntawm Kinematic Mounting:
Rau kev sib dhos kom raug, cov substrates yuav tsum tau mounted kinematically siv peb-point kev txhawb nqa kom tsis txhob muaj kev ntxhov siab. Qhov kev teeb tsa mounting nyob ntawm daim ntawv thov:
- Honeycomb mounts: Rau cov khoom loj, sib dua uas xav tau kev tawv siab
- Kev clamping ntug: Rau cov substrates uas ob sab yuav tsum nyob twj ywm nkag tau
- Cov khoom sib txuas: Siv cov nplaum kho qhov muag lossis cov epoxies uas tsis muaj pa phem
Kev Nyuaj Siab Ua Rau Muaj Kev Distortion:
Txawm tias muaj kinematic mounting, cov zog clamping tuaj yeem ua rau muaj kev cuam tshuam ntawm qhov chaw. Rau λ/20 flatness kam rau ntawm 200 mm fused silica substrate, qhov siab tshaj plaws clamping force yuav tsum tsis pub tshaj 10 N faib rau thaj chaw sib cuag> 100 mm² kom tiv thaiv kev cuam tshuam dhau qhov flatness specification.
Kev Tswj Xyuas Kub
Kev Tswj Kub Nquag:
Rau kev sib dhos ua kom raug heev, kev tswj qhov kub thiab txias feem ntau yog qhov tsim nyog:
- Kev tswj qhov tseeb: ± 0.01 ° C rau λ / 20 qhov yuav tsum tau ua kom tiaj tus
- Kev sib xws: <0.01 ° C / hli hla qhov chaw substrate
- Kev Ruaj Ntseg: Kub hloov pauv < 0.001 ° C / teev thaum lub sijhawm ua haujlwm tseem ceeb
Kev Rho Tawm Kub Tsis Siv Neeg:
Cov txheej txheem cais tawm tsis siv neeg txo cov thermal load:
- Cov ntaub thaiv cua sov: Cov ntaub thaiv hluav taws xob ntau txheej nrog cov txheej txheej emissivity qis
- Kev rwb thaiv tsev: Cov ntaub ntawv rwb thaiv tsev thermal ua tau zoo
- Qhov hnyav ntawm cov cua sov: Qhov hnyav ntawm cov cua sov loj ua rau muaj kev hloov pauv ntawm qhov kub thiab txias
Kev Tswj Xyuas Ib puag ncig
Kev Sib Tw Hauv Chav Huv Si:
Rau cov ntawv thov semiconductor thiab precision optics, cov substrates yuav tsum ua tau raws li qhov yuav tsum tau ua hauv chav huv:
- Kev tsim cov khoom me me: < 100 cov khoom me me / ft³ / feeb (Chav Kawm 100 huv)
- Kev tso pa tawm: < 1 × 10⁻⁹ Torr·L/s·cm² (rau cov ntawv thov nqus tsev)
- Kev Huv Si: Yuav tsum tau tiv taus kev ntxuav IPA ntau zaus yam tsis muaj kev puas tsuaj
Kev Tshuaj Xyuas Tus Nqi-Cov Txiaj Ntsig: Cov Khoom Siv Iav piv rau Lwm Txoj Hauv Kev
Txawm hais tias cov khoom siv iav muaj kev ua tau zoo dua, lawv sawv cev rau kev nqis peev thaum pib siab dua. Kev nkag siab txog tus nqi tag nrho ntawm kev muaj yog qhov tseem ceeb rau kev xaiv cov khoom siv uas muaj kev paub zoo.
Kev Sib Piv Tus Nqi Thaum Pib
| Cov Khoom Siv Hauv Qab | 200 hli Txoj kab uas hla, 25 hli Tuab (USD) | Tus nqi sib piv |
|---|---|---|
| Khob iav dej qab zib | $50-100 | 1 × |
| Borofloat®33 | $200-400 | 3-5 × |
| N-BK7 | $300-600 | 5-8 × |
| Silica sib xyaw ua ke | $800-1,500 | 10-20 × |
| AF 32® eco | $500-900 | 8-12 × |
| Zerodur® | $2,000-4,000 | 30-60 × |
| ULE® | $3,000-6,000 | 50-100 × |
Kev Tshuaj Xyuas Tus Nqi Siv Lub Neej
Kev Txij Nkawm thiab Kev Hloov:
- Cov khoom siv iav: siv tau 5-10 xyoo, tsis tas yuav kho ntau
- Cov khoom siv hlau: siv tau 2-5 xyoos, yuav tsum tau kho dua tshiab tas li
- Cov khoom siv yas: siv tau 6-12 lub hlis, hloov pauv ntau zaus
Cov txiaj ntsig ntawm kev sib dhos kom raug:
- Cov khoom siv iav: Ua kom qhov tseeb ntawm kev sib dhos zoo dua 2-10 × dua li lwm txoj hauv kev
- Cov khoom siv hlau: Txwv los ntawm kev ruaj khov thermal thiab kev puas tsuaj ntawm qhov chaw
- Cov khoom yas: Txwv los ntawm kev nkag mus thiab kev cuam tshuam ib puag ncig
Kev Txhim Kho Kev Ua Haujlwm:
- Kev xa hluav taws xob ntau dua: 3-5% kev sib dhos sai dua
- Kev ruaj khov thermal zoo dua: Txo qhov xav tau kev sib npaug ntawm qhov kub thiab txias
- Kev txij nkawm qis dua: Lub sijhawm tsis ua haujlwm tsawg dua rau kev hloov kho dua tshiab
Piv txwv kev suav ROI:
Ib lub tshuab photonics manufacturing alignment system ua tiav 1,000 lub rooj sib txoos ib hnub nrog lub sijhawm voj voog 60 vib nas this. Kev siv cov khoom siv fused silica uas xa tau zoo (piv rau N-BK7) txo lub sijhawm voj voog los ntawm 4% mus rau 57.6 vib nas this, ua rau cov zis txhua hnub nce mus rau 1,043 lub rooj sib txoos - qhov nce 4.3% ntawm kev tsim khoom muaj nqis $ 200,000 txhua xyoo ntawm $ 50 rau ib lub rooj sib txoos.
Cov Qauv Yav Tom Ntej: Cov Tshuab Iav Tshiab rau Kev Teeb Pom Kev Zoo
Lub teb ntawm cov iav substrates precision txuas ntxiv mus hloov pauv, tsav los ntawm kev xav tau ntxiv rau qhov tseeb, kev ruaj khov, thiab kev sib koom ua ke.
Cov Khoom Siv Iav Uas Tsim Los Ntawm Kws Tsim Khoom
Cov Iav CTE Uas Tsim Los Rau Koj:
Kev tsim khoom siab heev ua rau muaj kev tswj hwm CTE kom meej los ntawm kev kho cov khoom sib xyaw ua los ntawm iav:
- ULE® Tailored: CTE xoom-crossing kub tuaj yeem teev rau ± 5 ° C
- Cov Iav CTE Gradient: Tsim los ntawm CTE gradient los ntawm qhov chaw mus rau lub hauv paus
- Kev Hloov Pauv ntawm Cheeb Tsam CTE: Cov nqi CTE sib txawv hauv thaj chaw sib txawv ntawm tib lub substrate
Kev Sib Koom Ua Ke ntawm Cov Iav Photonic:
Cov iav tshiab ua rau muaj kev sib koom ua ke ntawm cov haujlwm kho qhov muag:
- Kev koom ua ke ntawm Waveguide: Kev sau ncaj qha ntawm waveguides hauv cov iav substrate
- Cov tsom iav uas muaj cov tshuaj ntxiv: Cov tsom iav uas muaj cov tshuaj ntxiv rau Erbium lossis cov tsom iav uas muaj cov tshuaj ntxiv rau cov khoom siv uas muaj cov tshuaj ntxiv rau cov haujlwm tseem ceeb
- Cov tsom iav tsis yog linear: Cov coefficient siab tsis yog linear rau kev hloov pauv zaus
Cov Txuj Ci Tsim Khoom Siab Tshaj Plaws
Kev Tsim Khoom Ntxiv ntawm Iav:
3D luam ntawv ntawm iav ua rau:
- Cov qauv geometries nyuaj tsis yooj yim sua nrog kev tsim cov qauv ib txwm muaj
- Cov kav dej txias sib xyaw ua ke rau kev tswj hwm thermal
- Txo cov khoom pov tseg rau cov duab tsim tshwj xeeb
Kev Tsim Kho Kom Zoo:
Cov txheej txheem tsim tshiab ua kom zoo sib xws:
- Kev txhaj tshuaj iav kom raug: Kev raug ntawm sub-micron ntawm cov nplaim kho qhov muag
- Kev poob qis nrog cov mandrels: Ua tiav qhov curvature tswj nrog qhov chaw tiav Ra <0.5 nm
Cov Iav Ntse
Cov Sensors Uas Muab Tso Rau Hauv:
Cov substrates yav tom ntej yuav muaj xws li:
- Cov ntsuas kub: Kev saib xyuas kub faib tawm
- Cov ntsuas kev ntxhov siab: Kev ntsuas kev ntxhov siab / kev hloov pauv tiag tiag
- Cov sensors txoj hauj lwm: Kev ntsuas sib xyaw ua ke rau kev ntsuas tus kheej
Kev Them Nyiaj Rov Qab:
Cov substrates ntse tuaj yeem ua rau:
- Kev ua haujlwm kub: Cov cua sov sib xyaw ua ke rau kev tswj qhov kub thiab txias
- Kev ua haujlwm Piezoelectric: Kev hloov kho qhov chaw ntawm Nanometer
- Kev kho qhov muag hloov kho: Kev kho qhov chaw ntawm qhov chaw hauv lub sijhawm tiag tiag
Xaus Lus: Cov Kev Zoo ntawm Cov Khoom Siv Iav Uas Muaj Kev Ntsuas Zoo
Tsib yam tseem ceeb uas qhia txog—kev xa hluav taws xob tau zoo, qhov tiaj tiaj ntawm qhov chaw, kev nthuav dav ntawm cua sov, cov khoom siv kho tshuab, thiab kev ruaj khov ntawm tshuaj lom neeg—piav qhia ua ke tias vim li cas cov iav uas raug xaiv thiaj yog cov khoom siv rau kev teeb tsa qhov muag. Txawm hais tias kev nqis peev thawj zaug yuav siab dua li lwm txoj hauv kev, tag nrho tus nqi ntawm kev muaj, xav txog cov txiaj ntsig ntawm kev ua tau zoo, kev saib xyuas tsawg dua, thiab kev tsim khoom zoo dua, ua rau cov iav uas siv rau lub sijhawm ntev yog qhov kev xaiv zoo tshaj plaws.
Kev Txiav Txim Siab
Thaum xaiv cov ntaub ntawv substrate rau optical alignment systems, xav txog:
- Kev Ntsuas Qhov Tseeb Uas Yuav Tsum Tau Ua: Txheeb xyuas qhov tiaj tiaj thiab CTE uas yuav tsum tau ua
- Wavelength Range: Cov lus qhia txog kev xa xov hluav taws xob
- Cov Xwm Txheej Ib Puag Ncig: Cuam Tshuam rau CTE thiab cov kev xav tau kev ruaj khov ntawm tshuaj lom neeg
- Qhov Ntim Khoom: Cuam tshuam rau kev tshuaj xyuas tus nqi thiab cov txiaj ntsig
- Cov Kev Cai Lij Choj: Tej zaum yuav yuam kom muaj cov ntaub ntawv tshwj xeeb rau kev lees paub
Qhov Zoo ntawm ZHHIMG
Ntawm ZHHIMG, peb nkag siab tias kev ua haujlwm ntawm lub tshuab kho qhov muag yog txiav txim siab los ntawm tag nrho cov khoom siv ecosystem - los ntawm cov khoom siv los ntawm cov txheej txheem mus rau cov khoom siv mounting. Peb qhov kev txawj ntse suav nrog:
Kev Xaiv Khoom Siv thiab Kev Pabcuam:
- Nkag mus rau cov ntaub ntawv iav zoo tshaj plaws los ntawm cov chaw tsim khoom ua lag luam
- Cov lus qhia tshwj xeeb rau cov ntawv thov tshwj xeeb
- Kev tswj hwm cov khoom siv rau kev zoo sib xws
Kev Tsim Khoom Zoo:
- Cov khoom siv sib tsoo thiab polishing niaj hnub no
- Kev txhuam los ntawm lub khoos phis tawj rau λ/20 qhov tiaj tiaj
- Kev ntsuas hauv tsev rau kev txheeb xyuas cov lus qhia tshwj xeeb
Kev Tsim Kho Tshwj Xeeb:
- Kev tsim cov khoom siv rau cov ntawv thov tshwj xeeb
- Kev daws teeb meem mounting thiab fixture
- Kev koom ua ke ntawm kev tswj hwm thermal
Kev Tswj Xyuas Zoo:
- Kev tshuaj xyuas thiab daim ntawv pov thawj tiav
- Cov ntaub ntawv pov thawj txog kev taug qab
- Ua raws li cov qauv kev lag luam (ISO, ASTM, MIL-SPEC)
Koom tes nrog ZHHIMG los siv peb txoj kev txawj ntse hauv kev ua cov iav substrates rau koj cov kab ke optical alignment. Txawm hais tias koj xav tau cov substrates txheem tawm ntawm lub txee lossis cov kev daws teeb meem tsim tshwj xeeb rau cov ntawv thov uas xav tau ntau, peb pab neeg npaj txhij los txhawb koj cov kev xav tau tsim khoom meej.
Tiv tauj peb pab neeg engineering hnub no los tham txog koj cov kev xav tau ntawm cov khoom siv optical alignment thiab nrhiav seb kev xaiv cov khoom siv zoo li cas tuaj yeem txhim kho koj lub cev ua haujlwm thiab tsim khoom li cas.
Lub sijhawm tshaj tawm: Lub Peb Hlis-17-2026