Qhov sib txawv ntawm kev ua tau zoo ntawm cov khoom granite hauv cov khoom siv semiconductor nyob rau hauv cov xwm txheej ib puag ncig sib txawv yog dab tsi?

Granite yog ib yam khoom siv uas siv ntau hauv kev tsim cov khoom siv hauv cov khoom siv semiconductor. Cov khoom no, feem ntau yog cov chucks thiab pedestals, muab lub platform ruaj khov rau kev txav thiab tso cov semiconductor wafers thaum lub sijhawm ntau theem ntawm cov txheej txheem tsim khoom. Kev ua tau zoo thiab kev ntseeg tau ntawm cov khoom granite no raug cuam tshuam los ntawm ntau yam, suav nrog ib puag ncig uas lawv siv.

Ib qho ntawm cov yam tseem ceeb tshaj plaws uas cuam tshuam rau cov khoom granite hauv cov khoom siv semiconductor yog qhov kub. Granite muaj cov coefficient qis ntawm thermal expansion, uas txhais tau tias nws tuaj yeem tiv taus ntau yam kub yam tsis muaj warping lossis tawg. Txawm li cas los xij, qhov kub hloov pauv ntau heev tuaj yeem ua rau muaj kev ntxhov siab hauv cov khoom, ua rau tawg lossis delamination ntawm qhov chaw. Tsis tas li ntawd, kev raug rau qhov kub siab rau lub sijhawm ntev tuaj yeem ua rau cov khoom mos, ua rau nws yooj yim rau deformation thiab hnav.

Qhov av noo yog lwm yam tseem ceeb uas cuam tshuam rau kev ua haujlwm ntawm cov khoom granite hauv cov khoom siv semiconductor. Cov av noo siab tuaj yeem ua rau cov av noo nkag mus rau hauv qhov chaw ntawm granite, ua rau delamination lossis tawg. Tsis tas li ntawd, cov av noo tuaj yeem ua rau hluav taws xob luv luv, uas tuaj yeem ua rau cov khoom siv hluav taws xob uas tab tom ua rau ntawm qhov chaw granite puas tsuaj. Txhawm rau tiv thaiv cov teeb meem no, nws yog ib qho tseem ceeb kom tswj hwm qhov chaw qhuav thaum lub sijhawm tsim khoom semiconductor.

Kev raug tshuaj lom neeg kuj yog ib qho tseem ceeb uas yuav tsum xav txog thaum siv cov khoom granite hauv cov khoom siv semiconductor. Granite feem ntau tiv taus feem ntau cov tshuaj lom neeg, tab sis qee cov kuab tshuaj thiab cov kua qaub tuaj yeem ua rau nws qhov chaw puas tsuaj. Cov tshuaj ntxuav xws li isopropyl cawv lossis hydrofluoric acid tuaj yeem ua rau lub ntsej muag granite puas tsuaj, ua rau qhov chaw ntxhib thiab txo qhov tiaj tiaj. Txhawm rau kom tsis txhob muaj cov teeb meem no, yuav tsum ceev faj thaum xaiv cov tshuaj ntxuav thiab cov txheej txheem los tiv thaiv kev puas tsuaj los ntawm tshuaj lom neeg.

Lwm yam ib puag ncig uas cuam tshuam rau kev ua haujlwm ntawm cov khoom granite yog kev co. Kev co tuaj yeem ua rau muaj cov kab nrib pleb me me hauv qhov chaw granite, ua rau qhov chaw tiaj tus puas tsuaj. Txhawm rau kom txo qhov kev co, nws yog ib qho tseem ceeb uas yuav tsum ua cov kauj ruam tsim nyog xws li kev teeb tsa cov txheej txheem cais kev co thiab zam kev txav mus los tsis tsim nyog ntawm cov khoom granite.

Xaus lus, kev ua tau zoo ntawm cov khoom granite hauv cov khoom siv semiconductor yog cuam tshuam los ntawm ntau yam ib puag ncig xws li qhov kub thiab txias, av noo, kev raug tshuaj lom neeg, thiab kev co. Los ntawm kev ua cov kev ntsuas kom tsim nyog los txo qhov kev raug rau cov yam no, cov chaw tsim khoom tuaj yeem ua kom ntseeg tau tias cov khoom granite hauv cov khoom siv semiconductor muaj kev ntseeg siab thiab lub neej ntev. Nrog kev saib xyuas zoo rau cov yam ntxwv ib puag ncig thiab kev saib xyuas kom zoo, cov khoom granite yuav txuas ntxiv ua lub luag haujlwm tseem ceeb hauv kev lag luam semiconductor.