Cov ntaub ntawv siv rau cov khoom siv granite hauv cov khoom siv semiconductor yog dab tsi? Cov txiaj ntsig thiab qhov tsis zoo ntawm cov ntaub ntawv siv no piv rau granite yog dab tsi?

Granite tau yog ib yam khoom siv uas siv ntau hauv kev lag luam semiconductor rau nws cov khoom siv zoo heev, kev ruaj khov thermal, thiab coefficient qis ntawm thermal expansion. Txawm li cas los xij, nrog rau qhov kev thov kom muaj kev ua haujlwm siab dua thiab kev tsim khoom, lwm cov ntaub ntawv tau tshwm sim ua cov kev xaiv zoo rau kev tsim cov khoom siv semiconductor. Hauv tsab xov xwm no, peb yuav tshawb nrhiav qee cov ntaub ntawv lwm yam rau granite qhov chaw hauv cov khoom siv semiconductor thiab piv lawv cov txiaj ntsig thiab qhov tsis zoo.

Lwm Cov Khoom Siv Rau Cov Khoom Siv Granite

1. Cov ntaub ntawv iav-ceramic

Cov ntaub ntawv iav-ceramic, xws li Zerodur thiab Cervit, tau txais kev siv dav hauv kev lag luam semiconductor vim lawv cov coefficient thermal expansion qis, uas ze rau ntawm silicon. Yog li ntawd, cov ntaub ntawv no tuaj yeem muab kev ruaj khov thermal zoo dua thiab kev ua kom raug dua hauv cov txheej txheem tsim semiconductor. Zerodur, tshwj xeeb, muaj qib siab ntawm kev sib xws thiab kev ruaj khov, ua rau nws tsim nyog rau kev tsim cov khoom siv lithography.

Cov txiaj ntsig:

- Cov coefficient qis ntawm kev nthuav dav thermal
- Kev ua haujlwm siab thiab ruaj khov
- Haum rau cov ntawv thov kub siab

Qhov Tsis Zoo:

- Tus nqi siab dua piv rau granite
- Tsis yooj yim tawg, tej zaum yuav ua rau muaj kev cov nyom hauv kev siv tshuab thiab kev tuav

2. Cov Khoom Siv Ua Los Ntawm Av nplaum

Cov khoom siv ceramic, xws li txhuas oxide (Al2O3), silicon carbide (SiC), thiab silicon nitride (Si3N4), muaj cov khoom siv kho tshuab zoo heev, tiv taus kub siab, thiab coefficient nthuav dav thermal qis. Cov khoom no ua rau ceramics zoo tagnrho rau cov khoom siv semiconductor uas xav tau kev ruaj khov thermal thiab kev raug siab, xws li wafer stages thiab chucks.

Cov txiaj ntsig:

- Kev ruaj khov thermal thiab lub zog siab
- Cov coefficient ntawm kev nthuav dav thermal tsawg
- Kev hnav tsis kam thiab tshuaj lom neeg tsis muaj zog

Qhov Tsis Zoo:

- Yuav tawg yooj yim thiab yooj yim tawg, tshwj xeeb tshaj yog thaum lub sijhawm ua haujlwm thiab tuav
- Kev siv tshuab thiab kev txhuam cov khoom siv ceramics tuaj yeem nyuaj thiab siv sijhawm ntau

3. Cov Hlau

Cov ntaub ntawv ua los ntawm hlau, xws li hlau tsis xeb thiab titanium, tau siv rau qee qhov khoom siv semiconductor vim lawv qhov kev siv tshuab zoo heev thiab muaj zog heev. Lawv feem ntau siv rau hauv cov ntawv thov uas tsis tas yuav muaj kev ruaj khov thermal siab, xws li cov khoom siv hauv chav, cov khoom sib txuas, thiab cov khoom pub.

Cov txiaj ntsig:

- Kev siv tshuab zoo thiab kev sib txuas zoo
- Lub zog siab thiab ductility
- Tus nqi qis dua piv rau qee cov ntaub ntawv lwm txoj hauv kev

Qhov Tsis Zoo:

- Cov coefficient ntawm kev nthuav dav thermal siab
- Tsis haum rau cov ntawv thov kub siab vim muaj teeb meem thermal expansion
- Muaj kev cuam tshuam rau corrosion thiab contamination

Xaus lus:

Hauv kev xaus, thaum granite tau yog qhov kev xaiv nrov rau cov khoom siv semiconductor, lwm cov ntaub ntawv tau tshwm sim, txhua tus muaj qhov zoo thiab qhov tsis zoo tshwj xeeb. Cov ntaub ntawv iav-ceramic yog qhov tseeb heev thiab ruaj khov tab sis tuaj yeem tawg yooj yim. Ceramics muaj zog thiab muaj kev ruaj khov thermal zoo heev tab sis kuj tuaj yeem tawg yooj yim, ua rau lawv nyuaj rau tsim. Cov hlau pheej yig, tshuab tau, thiab ductile, tab sis lawv muaj cov coefficient siab dua ntawm kev nthuav dav thermal thiab yooj yim rau xeb thiab kev ua qias tuaj. Thaum xaiv cov ntaub ntawv rau cov khoom siv semiconductor, nws yog qhov tseem ceeb kom xav txog cov kev cai tshwj xeeb ntawm daim ntawv thov thiab xaiv cov ntaub ntawv uas sib npaug tus nqi, kev ua tau zoo, thiab kev ntseeg siab.