Cov qauv xeem ntawm cov khoom siv granite precision
Tus qauv raug ntawm qhov ntev
Raws li cov qauv kev lag luam cuam tshuam, qhov tseem ceeb ntawm qhov ntev ntawm cov khoom siv granite precision yuav tsum tau tswj hwm hauv qhov ntau me me. Piv txwv li, siv lub platform ntsuas granite feem ntau, nws qhov ntev thiab dav kam rau siab yog ntawm ± 0.05mm thiab ± 0.2mm, thiab tus nqi tshwj xeeb nyob ntawm qhov loj ntawm cov khoom thiab qhov tseeb ntawm qhov xwm txheej ntawm daim ntawv thov. Piv txwv li, hauv lub platform rau kev sib tsoo lens optical siab, qhov ntev kam rau siab tuaj yeem tswj tau ntawm ± 0.05mm, thaum qhov ntev kam rau siab ntawm lub platform tshuaj xyuas kev ua haujlwm dav dav tuaj yeem so kom txog ± 0.2mm. Rau qhov ntev sab hauv xws li qhov qhib thiab qhov dav, qhov tseeb kam rau siab kuj nruj, xws li lub qhov mounting ntawm lub hauv paus granite siv los teeb tsa lub sensor precision, qhov ntev kam rau siab yuav tsum tau tswj hwm ntawm ± 0.02mm kom ntseeg tau tias qhov tseeb thiab ruaj khov ntawm kev teeb tsa sensor.
Tus qauv ntawm kev tiaj tiaj
Qhov tiaj tiaj yog ib qho tseem ceeb ntawm cov khoom siv granite precision. Raws li tus qauv hauv tebchaws / German tus qauv, qhov kev kam rau siab ntawm ntau qib precision ntawm granite platform tau teev meej meej. Qhov kev kam rau siab ntawm lub platform rau chav kawm 000 yog xam ua 1 × (1 + d / 1000) μm (d yog qhov ntev ntawm kab pheeb ces kaum, chav tsev mm), 2 × (1 + d / 1000) μm rau chav kawm 00, 4 × (1 + d / 1000) μm rau chav kawm 0, thiab 8 × (1 + d / 1000) μm rau chav kawm 1. Piv txwv li, chav kawm 00 granite platform nrog kab pheeb ces kaum ntawm 1000 hli muaj qhov kev kam rau siab ntawm 2 × (1 + 1000/1000) μm = 4 μm. Hauv kev siv ua haujlwm, xws li lub platform lithography hauv cov txheej txheem tsim cov chips hluav taws xob, feem ntau nws yuav tsum ua kom tau raws li qib 000 lossis 00 qib tiaj tiaj kom ntseeg tau tias qhov tseeb ntawm txoj kev sib kis lub teeb hauv cov txheej txheem chip lithography thiab zam kev cuam tshuam ntawm cov qauv chip los ntawm qhov yuam kev tiaj tiaj ntawm lub platform.
Tus qauv ntawm qhov chaw roughness
Qhov roughness ntawm cov khoom siv granite precision feem cuam tshuam ncaj qha rau qhov tseeb thiab kev ua tau zoo nrog lwm cov khoom. Nyob rau hauv qhov xwm txheej ib txwm muaj, qhov roughness ntawm qhov chaw Ra ntawm lub platform granite siv rau cov khoom siv optical yuav tsum ncav cuag 0.1μm-0.4μm kom ntseeg tau tias cov khoom siv optical tuaj yeem tswj tau qhov kev ua tau zoo optical tom qab kev teeb tsa thiab txo qhov kev tawg ntawm lub teeb los ntawm cov chaw tsis sib xws. Rau lub platform granite ib txwm siv rau kev sim machining, qhov roughness ntawm qhov chaw Ra tuaj yeem so kom txog 0.8μm-1.6μm. Qhov roughness ntawm qhov chaw feem ntau yog kuaj pom los ntawm kev siv cov khoom siv tshaj lij xws li profiler, uas txiav txim siab seb qhov roughness ntawm qhov chaw puas ua tau raws li tus qauv los ntawm kev ntsuas qhov nruab nrab ntawm qhov sib txawv ntawm qhov chaw microscopic profile.
Cov qauv kuaj pom qhov tsis zoo sab hauv
Yuav kom ntseeg tau tias cov khoom siv granite precision sab hauv zoo, nws yog ib qho tsim nyog yuav tsum tau kuaj xyuas lawv cov qhov tsis zoo sab hauv. Thaum siv kev tshuaj xyuas ultrasonic, raws li cov qauv cuam tshuam, thaum pom tias muaj qhov, tawg thiab lwm yam tsis zoo loj dua qee qhov loj (xws li txoj kab uas hla ntau dua 2 hli), cov khoom siv raug txiav txim siab tias tsis tsim nyog. Hauv kev tshuaj xyuas X-ray, yog tias daim duab X-ray qhia txog cov qhov tsis zoo sab hauv uas cuam tshuam rau lub zog ntawm cov khoom siv, xws li cov qhov tsis zoo linear nrog qhov ntev ntau dua 10 hli lossis cov qhov tsis zoo nrog thaj tsam ntau dua 50mm², cov khoom siv kuj tsis ua raws li tus qauv zoo. Los ntawm kev siv cov qauv no nruj, nws tuaj yeem zam cov teeb meem loj xws li kev tawg ntawm cov khoom siv los ntawm cov qhov tsis zoo sab hauv thaum siv, thiab xyuas kom meej tias muaj kev nyab xeeb ntawm kev ua haujlwm ntawm cov khoom siv thiab kev ruaj khov ntawm cov khoom zoo.
Kev tsim qauv kev daws teeb meem kev tshuaj xyuas kev lag luam
Kev sib xyaw ua ke ntawm cov khoom siv ntsuas kev ntsuas siab
Yuav kom kov yeej qhov teeb meem ntawm kev nrhiav pom cov khoom granite precision, nws yog ib qho tsim nyog los qhia cov khoom siv ntsuas siab heev. Lub laser interferometer muaj qhov tseeb siab heev hauv qhov ntev thiab lub kaum sab xis, thiab tuaj yeem ntsuas qhov tseem ceeb ntawm cov khoom granite, thiab nws qhov kev ntsuas qhov tseeb tuaj yeem txog li nanometers, uas tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm kev ntsuas qhov siab. Tib lub sijhawm, qib hluav taws xob tuaj yeem siv los ntsuas qhov tiaj tiaj ntawm cov khoom granite platform sai thiab raug, los ntawm kev ntsuas ntau lub ntsiab lus thiab ua ke nrog cov txheej txheem kev tshaj lij, tuaj yeem kos cov qauv tiaj tiaj, qhov tseeb ntawm kev nrhiav pom txog li 0.001mm / m. Tsis tas li ntawd, lub tshuab ntsuas 3D optical tuaj yeem luam theej duab qhov nyuaj ntawm cov khoom granite sai sai los tsim cov qauv peb-seem tiav, uas tuaj yeem ntes qhov sib txawv ntawm cov duab los ntawm kev sib piv nrog cov qauv tsim, muab kev txhawb nqa cov ntaub ntawv tiav rau kev ntsuas qhov zoo ntawm cov khoom.
Kev siv cov thev naus laus zis kuaj tsis puas tsuaj
Vim tias qhov teeb meem sab hauv ntawm granite yuav ua rau lub Cheebtsam tsis ua haujlwm zoo, kev sim tsis ua puas tsuaj yog qhov tseem ceeb. Lub tshuab ntes qhov tsis zoo ultrasonic tuaj yeem tso tawm cov suab nrov siab, thaum lub suab nthwv dej ntsib cov kab nrib pleb, qhov thiab lwm yam tsis zoo hauv granite, nws yuav cuam tshuam thiab tawg, los ntawm kev tshuaj xyuas lub teeb liab nthwv dej, nws tuaj yeem txiav txim siab qhov chaw, qhov loj me thiab cov duab ntawm qhov tsis zoo. Rau kev nrhiav pom cov teeb meem me me, X-ray flaw detection technology muaj txiaj ntsig zoo dua, nws tuaj yeem nkag mus rau hauv cov khoom granite los tsim ib daim duab ntawm cov qauv sab hauv, qhia meej txog cov teeb meem me me uas nyuaj rau pom los ntawm lub qhov muag liab qab, kom ntseeg tau tias qhov zoo sab hauv ntawm cov khoom yog txhim khu kev qha.
Lub kaw lus software nrhiav kom paub ntse
Ib lub tshuab software nrhiav kom paub ntse muaj zog yog lub hauv paus tseem ceeb ntawm tag nrho cov kev daws teeb meem. Lub tshuab no tuaj yeem sau ua ke, tshuaj xyuas thiab ua cov ntaub ntawv uas txhua yam khoom siv kuaj tau sau los ntawm lub sijhawm tiag tiag. Siv cov algorithms txawj ntse, lub software tuaj yeem txheeb xyuas cov yam ntxwv ntawm cov ntaub ntawv thiab txiav txim siab seb cov khoom granite puas ua tau raws li cov qauv zoo, ua kom zoo dua qub thiab raug. Piv txwv li, los ntawm kev cob qhia ntau cov ntaub ntawv tshuaj xyuas nrog cov qauv kawm tob, lub software tuaj yeem txheeb xyuas hom thiab qhov hnyav ntawm cov qhov tsis zoo ntawm qhov chaw, zam kev txiav txim siab tsis raug los ntawm kev txhais lus tes. Tib lub sijhawm, lub software system kuj tseem tuaj yeem tsim cov ntawv qhia txog kev xeem kom ntxaws, sau cov ntaub ntawv xeem thiab cov txiaj ntsig ntawm txhua yam khoom, uas yooj yim rau cov tuam txhab ua qhov zoo thiab kev tswj hwm.
Cov txiaj ntsig ntawm ZHHIMG hauv kev daws teeb meem kev tshuaj xyuas
Ua ib tug thawj coj hauv kev lag luam, ZHHIMG tau muaj kev paub nplua nuj hauv kev tshuaj xyuas cov khoom siv granite precision. Lub tuam txhab muaj pab pawg R & D kws tshaj lij, ib txwm mob siab rau kev tsim kho tshiab thiab kev ua kom zoo dua ntawm cov thev naus laus zis kuaj, raws li cov kev xav tau tshwj xeeb ntawm cov neeg siv khoom kho cov kev daws teeb meem kuaj. ZHHIMG tau qhia txog cov khoom siv kuaj thoob ntiaj teb thiab tsim kom muaj kev tswj hwm zoo kom ntseeg tau tias txhua qhov kev xeem tuaj yeem mus txog qib siab tshaj plaws ntawm kev lag luam. Hais txog cov kev pabcuam, lub tuam txhab muab cov kev pabcuam ib-nres los ntawm kev tsim qauv kuaj, kev teeb tsa khoom siv thiab kev ua haujlwm rau kev cob qhia cov neeg ua haujlwm kom ntseeg tau tias cov neeg siv khoom tuaj yeem siv cov kev daws teeb meem kuaj thiab txhim kho cov peev xwm tswj hwm zoo ntawm cov khoom.
Lub sijhawm tshaj tawm: Lub Peb Hlis-24-2025