Granite yog ib qho ntawm cov khoom siv nrov tshaj plaws uas siv rau hauv cov khoom siv semiconductor. Nws yog ib hom pob zeb tawv, igneous uas muaj ntau xim grey, liab dawb, thiab dawb. Granite paub txog nws qhov ruaj khov, coefficient thermal expansion qis, thiab thermal conductivity zoo heev, ua rau nws yog ib qho khoom siv zoo tshaj plaws rau kev siv hauv cov khoom siv semiconductor subsystems.
Ib qho ntawm cov subsystems tseem ceeb uas siv granite hauv cov khoom siv semiconductor yog lub wafer handling thiab processing subsystem. Lub subsystem no ua lub luag haujlwm tseem ceeb hauv cov txheej txheem tsim khoom ntawm cov khoom siv semiconductor. Lub wafer yog lub substrate pib rau lub cuab yeej, thiab lub manufacturing thiab processing subsystem yog lub luag haujlwm rau kev hloov cov wafers ntawm ntau lub chambers thiab cov khoom siv ua haujlwm. Granite yog siv los tsim cov wafer tuav cov nto meej thiab tiaj tus thiab muab lub platform ruaj khov rau kev ua wafer.
Lwm lub tshuab tseem ceeb uas siv granite yog lub tshuab nqus tsev. Hauv cov khoom siv semiconductor, cov chav nqus tsev siv los tiv thaiv kev ua qias tuaj thaum lub sijhawm tsim khoom. Rau lub tshuab no kom ua haujlwm tau zoo, lub chav yuav tsum tau kaw tag nrho, uas yog qhov chaw granite nkag los. Granite yog cov khoom siv zoo tshaj plaws rau cov chav nqus tsev vim nws muaj cov pa tawm tsawg heev thiab tuaj yeem tswj tau qhov chaw nqus tsev ruaj khov. Tsis tas li ntawd, granite qhov kev ua haujlwm siab ua rau muaj kev foob zoo meej, muab qhov chaw nqus tsev txhim khu kev qha rau kev ua wafer.
Lub kaw lus sib dhos yog lwm lub kaw lus tseem ceeb uas siv cov khoom tshwj xeeb ntawm granite. Lub kaw lus no yog lub luag haujlwm rau kev sib dhos cov khoom sib txawv ntawm cov khoom siv semiconductor nrog kev raug thiab raug. Granite siv rau hauv kev tsim thiab kev tsim kho ntawm cov theem sib dhos kom ntseeg tau tias muaj kev ruaj khov thiab ruaj khov. Qhov ruaj khov ntawm granite pab ua kom tiav qhov tseeb ntawm kev sib dhos, ua rau muaj kev tsim cov khoom siv semiconductor uas raug thiab ntseeg tau.
Thaum kawg, lub metrology subsystem yog lwm lub system ntawm cov khoom siv semiconductor uas siv granite. Metrology ua lub luag haujlwm tseem ceeb hauv kev ua wafer, thiab qhov tseeb ntawm lub subsystem no yog qhov tseem ceeb hauv kev ua kom zoo ntawm lub cuab yeej. Granite muab lub platform ruaj khov thiab tawv uas pab txo qhov kev co thiab txo qhov cuam tshuam ntawm kev hloov pauv kub. Qhov no, ua rau, pab ua tiav kev ntsuas qhov tseeb hauv lub metrology subsystem, ua rau muaj cov khoom siv semiconductor zoo.
Xaus lus, granite yog ib yam khoom tseem ceeb hauv kev tsim cov khoom siv semiconductor. Nws cov yam ntxwv tshwj xeeb xws li kev ruaj khov siab, kev nthuav dav thermal tsawg, thiab kev ua kom thermal zoo heev ua rau nws yog ib yam khoom zoo heev rau ntau lub subsystems hauv cov khoom siv semiconductor, suav nrog kev tuav thiab ua wafer, vacuum subsystem, alignment subsystem, thiab metrology subsystem. Ntxiv mus, kev siv granite hauv cov khoom siv semiconductor tau pab tsim cov khoom siv uas raug, txhim khu kev qha thiab ua haujlwm tau zoo uas tau hloov pauv ntau yam kev lag luam.
Lub sijhawm tshaj tawm: Lub Peb Hlis-19-2024