Yuav Ua Li Cas High-Precision Granite Machine Bases Txhim Kho Wafer Inspection Equipment Accuracy.

IHauv kev lag luam tsim khoom siv semiconductor, qhov tseeb ntawm cov khoom siv tshuaj xyuas wafer yog qhov tseem ceeb rau kev ua kom zoo ntawm cov integrated circuits. Cov hauv paus tshuab granite siab, zoo li cov uas ZHHIMG® muab, ua lub luag haujlwm tseem ceeb hauv kev txhim kho kev ua tau zoo ntawm cov khoom siv no. Nov yog lawv ua qhov sib txawv li cas.
Kev Ruaj Ntseg Zoo Tshaj Plaws Granite muaj cov coefficient thermal expansion qis heev, nyob ib puag ncig (4–8) × 10⁻⁶ / ℃, qis dua ntau yam hlau. Hauv qhov chaw tswj hwm nruj ntawm cov chaw tsim khoom semiconductor, qhov twg txawm tias qhov kub thiab txias me me tuaj yeem ua rau muaj qhov yuam kev ntsuas, cov hauv paus tshuab granite tseem ruaj khov. Qhov kev ruaj khov no ua kom ntseeg tau tias qhov chaw ntawm cov khoom hauv cov khoom siv tshuaj xyuas wafer tseem raug, tiv thaiv txhua qhov kev hloov pauv los ntawm thermal uas yuav cuam tshuam rau qhov tseeb ntawm cov txiaj ntsig tshuaj xyuas.

Kev Tiv Thaiv Kev Cob Qhia Zoo Tshaj Plaws Cov plag tsev tsim khoom feem ntau puv nrog kev co los ntawm ntau qhov chaw. Granite cov khoom siv damping, nrog rau qhov piv ntawm damping ntawm 0.05–0.1, nqus tau zoo thiab tshem tawm cov kev co no. Rau wafer insp
kev ua haujlwm, uas xav tau cov duab zoo siab thiab kev nyeem cov sensor meej, qhov kev txo qis ntawm kev co uas muab los ntawm cov hauv paus granite yog qhov tseem ceeb heev. Nws txo qhov kev cuam tshuam uas yuav ua rau cov duab tsis meej lossis cuam tshuam cov ntaub ntawv sensor, ua rau cov khoom siv ntes tau cov ntaub ntawv meej thiab raug txog qhov chaw ntawm lub wafer thiab cov qauv sab hauv.
Kev Rigidity Siab thiab Kev Tiv Thaiv Kev Hnav Nrog qhov ceev ntawm kwv yees li 3100 kg / m³, ZHHIMG® lub hauv paus tshuab granite muaj kev ruaj khov zoo kawg nkaus. Lawv tuaj yeem txhawb nqa cov khoom hnyav ntawm cov khoom siv tshuaj xyuas wafer yam tsis muaj kev hloov pauv, tswj kev sib phim ntawm cov khoom siv kho qhov muag thiab cov khoom siv kho tshuab. Tsis tas li ntawd, granite qhov kev nyuaj siab (Mohs scale 6–7) thiab kev tiv thaiv kev hnav zoo heev ua kom ntseeg tau tias qhov chaw ntawm lub hauv paus tshuab tseem tiaj tus thiab du dhau sijhawm. Qhov kev sib xws no yog qhov tseem ceeb rau kev raug mus sij hawm ntev, vim tias kev hnav lossis kev hloov pauv ntawm lub hauv paus tuaj yeem maj mam ua rau cov khoom siv qhov tseeb poob qis.
Kev Tsis Muaj Tshuaj LomZooKev tsim khoom siv semiconductor suav nrog kev raug ntau yam tshuaj lom neeg. Granite txoj kev tsis muaj tshuaj lom neeg ua rau nws tiv taus xeb los ntawm cov tshuaj no. Cov khoom no tiv thaiv kev ncaj ncees ntawm lub hauv paus tshuab, tiv thaiv kev puas tsuaj los ntawm tshuaj lom neeg uas yuav cuam tshuam rau kev ruaj khov thiab qhov tseeb ntawm cov khoom siv tshuaj xyuas.
Xaus lus, cov hauv paus tshuab granite siab tsis yog ib qho khoom siv xwb tab sis yog ib qho tseem ceeb rau kev ua tiav cov kev cai tseeb ntawm cov khoom siv tshuaj xyuas wafer. Thaum xaiv cov hauv paus tshuab granite, xaiv cov chaw muab kev ntseeg siab zoo li ZHHIMG®. Nrog ntau daim ntawv pov thawj thiab kev cog lus rau qhov zoo, ZHHIMG® ua kom ntseeg tau tias txhua lub hauv paus tshuab granite muab kev ntseeg siab thiab kev ua tau zoo uas xav tau rau kev tsim khoom semiconductor siab heev.