Hauv kev tsim khoom siv semiconductor, qhov kev ua haujlwm ntawm sub-micron yog qhov tseem ceeb rau kev ua kom muaj kev ua haujlwm ntawm cov chip, thiab lub hauv paus granite (ZHHIMG®), nrog nws cov khoom siv, kev ua tiav zoo thiab kev tsim qauv tshiab, tau dhau los ua qhov kev lees paub tseem ceeb rau kev ua tiav qhov kev ua haujlwm no.
Los ntawm qhov pom ntawm cov khoom siv, cov granite dub uas ZHHIMG® xaiv muaj qhov ceev ntawm kwv yees li 3100kg / m³, nrog rau cov qauv sab hauv ntom. Qhov ceev siab no ua rau nws muaj kev ruaj khov thiab kev khov kho zoo heev. Thaum lub sijhawm ua haujlwm ntawm cov khoom siv semiconductor, kev tig ntawm cov motors thiab kev txav mus los ntawm cov khoom siv kho tshuab hauv cov khoom siv yuav tsim kev co. Lub hauv paus granite tuaj yeem nqus tau ntau dua 90% ntawm lub zog co, txo qhov cuam tshuam ntawm kev co rau qhov tseeb ntawm cov khoom siv. Lub caij no, nws cov coefficient qis heev ntawm kev nthuav dav thermal ua rau nws khaws nws cov deformation hauv qhov me me thaum qhov kub thiab txias hloov pauv, muab lub hauv paus ruaj khov rau cov khoom siv semiconductor thiab tiv thaiv kev hloov chaw ntawm cov khoom siv vim qhov kub thiab txias hloov pauv, uas tuaj yeem cuam tshuam rau qhov tseeb.
Hais txog kev ua thiab kev tsim khoom, lub Hoobkas ZHHIMG® siv cov khoom siv ua tiav thoob ntiaj teb thiab muaj plaub lub tshuab sib tsoo loj heev (txhua lub tshuab raug nqi ntau dua 500,000usd), uas tuaj yeem ua qhov kev sib tsoo siab ntawm granite. Los ntawm tsib-axis txuas CNC machining thiab lwm yam txheej txheem, qhov tiaj tus ntawm lub hauv paus tshuab tuaj yeem ncav cuag qib nanometer, muab qhov chaw siv ultra-flat rau kev teeb tsa cov khoom siv semiconductor thiab xyuas kom meej qhov chaw ntawm txhua qhov ntawm cov khoom siv. Ntxiv mus, lub chaw ua haujlwm kub thiab av noo tas li (npog thaj tsam ntawm 10,000 square meters) muab ib puag ncig ruaj khov rau kev ua tiav. Lub 500mm dav thiab 2000mm tob tiv thaiv kev co trenches nyob ib puag ncig nws, nrog rau cov cranes ntsiag to, zoo cais cov kev cuam tshuam kev co sab nraud thiab xyuas kom meej qhov tseeb ntawm lub hauv paus tshuab.
Ntxiv rau, ZHHIMG® kuj muaj peev xwm hloov kho tau zoo. Rau cov kev xav tau tshwj xeeb ntawm cov khoom siv semiconductor, cov qhov teeb tsa meej thiab cov tais cable tuaj yeem ua ntej kom ua tiav qhov sib xws zoo meej ntawm cov khoom siv thiab lub hauv paus. Tib lub sijhawm, ua ke nrog cov khoom siv metrology thiab cov khoom siv kuaj thoob ntiaj teb xws li German Mahr feeb ntsuas (nrog qhov tseeb ntawm 0.5um) thiab Swiss WYLER qib hluav taws xob, lub hauv paus tshuab raug tshuaj xyuas thiab calibrated kom ntseeg tau tias txhua lub hauv paus tshuab tuaj yeem ua tau raws li cov kev xav tau nruj ntawm cov khoom siv semiconductor rau qhov tseeb ntawm sub-micron.
Nws yog qhov sib xyaw ua ke ntawm cov txiaj ntsig no uas ua rau ZHHIMG® granite puag yog qhov kev xaiv txhim khu kev qha rau kev ua tiav qhov kev ua tiav sub-micron hauv cov khoom siv semiconductor, pab cov khoom siv semiconductor txav mus rau cov teb muaj kev ua tiav siab dua.
Lub sijhawm tshaj tawm: Lub Rau Hli-18-2025