Hauv cov teb tshiab xws li kev tsim khoom siv semiconductor thiab kev sib dhos cov cuab yeej kho qhov muag, kev nrhiav kev ua haujlwm raug ntawm sub-micron lossis txawm tias nanometer los ntawm ntau lub rooj ua haujlwm precision yog qhov tsis kawg. Cov granite siab ntom (nrog qhov ceev ntawm ≥3100kg / m³) tab tom dhau los ua cov khoom siv tseem ceeb rau kev ua kom zoo dua ntawm kev ua haujlwm ntawm cov rooj ua haujlwm vim nws cov khoom siv lub cev tshwj xeeb. Cov hauv qab no yog kev tshuaj xyuas ntawm nws cov txiaj ntsig tsis tuaj yeem hloov pauv los ntawm plaub qhov tseem ceeb.
1. Kev ruaj khov zoo heev: Ib qho "kev thaiv ntuj" los tiv thaiv kev cuam tshuam kev co
Thaum lub rooj ua haujlwm ntau-axis nyob rau hauv kev txav ceev ceev (nrog rau qhov ceev linear tshaj 500mm / s) lossis hauv kev sib txuas ntau-axis, kev co nyuaj yuav tshwm sim. Cov khoom me me sab hauv ntawm cov granite siab-density tau sib txuas ze, nrog rau qhov zaus ntuj tsawg li 10-20Hz, thiab tuaj yeem nqus tau ntau dua 90% ntawm lub zog co sab nraud. Hauv cov txheej txheem ntim khoom semiconductor chip, nws tuaj yeem tswj qhov yuam kev hloov chaw ua haujlwm hauv ± 0.5μm, zam kev sib txuas ntawm cov hlau lossis kev puas tsuaj ntawm cov chip los ntawm kev co. Piv nrog cov ntaub ntawv hlau cam khwb cia ib txwm muaj, qhov kev co attenuation ntawm granite yog peb zaug sai dua, txhim kho qhov sib xws ntawm kev ua tiav.
2. Kev ruaj khov ntawm qhov kub thiab txias: Lub "Kev ruaj khov ntawm lub pob qij txha" tiv thaiv kev hloov pauv ntawm qhov kub thiab txias
Hauv qhov chaw ua haujlwm raug, qhov kub hloov ntawm 0.1 ℃ tuaj yeem ua rau cov khoom siv deformation ntawm 0.1 μm / m. Tus coefficient ntawm thermal expansion ntawm high-density granite tsuas yog (4-8) × 10⁻⁶ / ℃, uas yog kwv yees li 1/6 ntawm qhov ntawm aluminium alloy. Hauv cov xwm txheej siab xws li kev sib tsoo lens optical, txawm tias qhov kub ntawm lub chaw ua haujlwm hloov pauv los ntawm ± 2 ℃, lub hauv paus granite tseem tuaj yeem tswj tau qhov tseeb ntawm qib micron ntawm cov khoom tseem ceeb ntawm lub rooj ua haujlwm, kom ntseeg tau tias qhov yuam kev curvature lens tsawg dua 0.01D, ntau tshaj qhov kev lag luam tus qauv.
3. Kev ruaj khov heev: Lub "Pob Zeb Ruaj Khoov" rau kev nqa cov khoom hnyav
Cov rooj ua haujlwm ntau-axis feem ntau muaj cov khoom hnyav xws li lub taub hau laser thiab cov khoom soj ntsuam (nrog rau ib-axis thauj khoom ntau dua 200kg). Lub zog compressive ntawm cov granite siab-density yog ≥200MPa, thiab nws tuaj yeem tiv taus qhov hnyav sib xws ntawm ntau dua 1000kg / m² yam tsis muaj kev hloov pauv tas mus li. Tom qab ib lub tuam txhab aerospace tau txais cov khoom siv no, thaum nws lub rooj ua haujlwm tsib-axis nqa cov khoom ua tiav ntawm 500kg, qhov yuam kev ntsug Z-axis tsuas yog nce ntxiv los ntawm 0.3μm, ua kom ntseeg tau tias qhov tseeb ntawm cov nplaim nkhaus nyuaj.
4. Kev ruaj khov ntev: Txo tus nqi tag nrho ntawm lub neej voj voog
Qhov Mohs hardness ntawm granite ncav cuag 6 txog 7, thiab nws txoj kev tiv thaiv kev hnav yog ntau dua tsib npaug ntawm cov hlau ib txwm muaj. Hauv cov kab tsim khoom 3C uas ua haujlwm rau qhov nruab nrab ntawm 16 teev hauv ib hnub, lub hauv paus granite tuaj yeem ua tiav kev ua haujlwm tsis tas yuav saib xyuas rau 8 txog 10 xyoo, thaum lub hauv paus hlau cam khwb cia qhia txog kev hnav ntawm qhov chaw sib cuag ntawm txoj kev taw qhia (qhov tob> 5μm) tom qab 3 xyoos. Tsis tas li ntawd, nws cov tshuaj lom neeg inertness ua rau nws tswj tau qhov roughness ntawm Ra≤0.2μm hauv cov chaw acidic thiab alkaline, txuas ntxiv muab cov ntaub ntawv teeb tsa ruaj khov rau cov khoom meej xws li cov kav grating thiab cov motors linear.
Xaus Lus: Granite Uas Muaj Qhov Ceev Heev - Tus "Tus Yeej Zais Cia" ntawm Kev Tsim Khoom Uas Muaj Kev Ntsuas Zoo
Txij li qhov chaw nanoscale mus rau kev ua haujlwm hnyav, cov granite siab ntom ntom yog rov kho dua cov qauv kev ua haujlwm ntawm ntau-axis precision worktables nrog nws cov kev ua tau zoo tsis muaj qhov sib piv. Rau cov lag luam uas nrhiav kev ua kom raug thiab kev ntseeg siab, kev xaiv cov hauv paus granite zoo (xws li ZHHIMG® cov khoom tau ntawv pov thawj los ntawm ISO peb lub tshuab) tsis yog tsuas yog kev lees paub rau kev tsim khoom tam sim no tab sis kuj yog kev nqis peev zoo hauv kev txhim kho cov txheej txheem yav tom ntej.
Lub sijhawm tshaj tawm: Lub Rau Hli-09-2025