Hauv kev ua haujlwm ntawm semiconductor wafer grooving, qhov tseeb yog txoj sia. Lub hauv paus granite uas tsis muaj qhov tshwj xeeb tuaj yeem ua rau muaj kev nce qib zoo hauv kev ua haujlwm ntawm cov khoom siv grooving! Nws zais "lub zog loj" dab tsi? Vim li cas thiaj hais tias kev xaiv lub hauv paus granite zoo txhais tau tias koj tau ua tiav ib nrab? Hnub no, peb yuav coj koj mus qhia nws tob!
I. Lub Zog Muaj Zog: Peb Qhov "Zoo Tshaj Plaws" ntawm Granite
Qhov kev tiv thaiv seismic yog ruaj khov zoo li Mount Tai
Granite muaj qhov ceev txog li 2,800-3,100 kg / m³, thiab nws cov qauv yog ntom li "pob zeb fortress". Hauv qhov chaw muaj kev co siab ntawm wafer grooving (cov khoom siv grooves ntau dua 100 zaug hauv ib feeb), nws tuaj yeem nqus tau ntau dua 90% ntawm lub zog co, ib yam li kev teeb tsa cov khoom siv nrog "kev siv tshuab dub uas nqus tau kev co"! Cov ntaub ntawv ntsuas los ntawm lub Hoobkas chip qhia tau tias tom qab siv lub hauv paus granite, qhov jitter amplitude ntawm lub taub hau txiav grooving tau txo qis los ntawm 15μm mus rau 3μm, thiab cov npoo ntawm cov micro-grooves carved yog du zoo li daim iav.
2. "Cov qauv tiv taus kub" Tsis ntshai qhov sib txawv ntawm qhov kub thiab txias
Cov ntaub ntawv ib txwm "nthuav dav thiab deform" thaum cua sov thiab "nqes thiab deform" thaum txias, tab sis qhov coefficient thermal expansion ntawm granite yog qis li 4-8 × 10⁻⁶ / ℃, uas tsuas yog 1/5 ntawm cov hlau! Txawm tias qhov kub hauv lub chaw ua haujlwm hloov pauv sai sai los ntawm 10 ℃ hauv 24 teev, nws qhov deformation tsawg dua 0.01 hli thiab yuav luag tsis quav ntsej. Qhov no txhais tau tias tsis hais txog kev hloov pauv ntawm hnub thiab hmo ntuj lossis kev ua haujlwm ntev thiab kev tsim cua sov ntawm cov khoom siv, lub hauv paus granite tuaj yeem ua kom qhov chaw "tsis txav" txhua lub sijhawm.
3. Kev tiv thaiv tsis pub puas tsuaj
Qhov nyuaj ntawm Mohs ntawm granite ncav cuag 6 txog 7, piv rau cov pob zeb quartz, thiab nws qhov kev tiv thaiv kev hnav yog peb npaug ntawm cov hlau ib txwm! Nyob rau hauv lub sijhawm ntev ntawm kev sib txhuam ntawm lub wafer grooving, qhov chaw ntawm lub hauv paus tsis tshua hnav tawm. Tom qab ib qho chaw tsim khoom siv cov hauv paus granite rau tsib xyoos, qhov tiaj tiaj tseem khaws cia hauv ± 0.5μm / m thaum kuaj xyuas, thiab qhov tseeb ntawm grooving tseem nyob ruaj khov, txuag tau ntau yam ntawm cov khoom siv calibration thiab hloov cov nqi.
II. Kev Hloov Kho Kom Zoo: Granite Ua Tau Raws Li Cov Kev Xav Tau Sib Txawv Li Cas?
Zaj 1: Kev sib tsoo zoo heev (kev sib tsoo me me hauv qab 10μm)
Qhov Yuav Tsum Tau Ua: Qhov tiaj tiaj kawg
Cov txiaj ntsig ntawm Granite: Los ntawm kev ua tiav qhov kev ua tiav siab ntawm tsib-axis, qhov tiaj tiaj tuaj yeem tswj tau hauv ± 0.5μm / m, uas txhais tau tias ntawm qhov ntev ntawm 1 'meter', qhov yuam kev siab yog 200 npaug nyias dua li cov plaub hau tib neeg! Xyuas kom meej tias qhov deb ntawm lub taub hau txiav grooving thiab lub wafer yeej ib txwm raug, thiab qhov yuam kev dav ntawm cov micro-grooves carved tsis pub tshaj ± 0.1μm.
Zaj 2: Kev tsim khoom loj sai sai
Qhov Yuav Tsum Tau Ua: Kev ua haujlwm nqus dej zoo heev
Cov txiaj ntsig ntawm granite: Nws cov khoom siv ntuj tsim sab hauv tuaj yeem ua rau cov khoom siv co sai sai. Tom qab lub Hoobkas vaj huam sib luag qhia txog cov hauv paus granite, qhov ceev ntawm kev sib tsoo tau nce 40%, thiab cov txiaj ntsig tau nce ntxiv los ntawm 85% mus rau 96%, ua tiav ob npaug ntawm kev ua haujlwm zoo thiab zoo!
Qhov Xwm Txheej 3: Kev sib tsoo ntawm ib puag ncig nyuaj (Kub heev/xeb)
Cov Kev Cai: Kev kub siab thiab kev tiv thaiv corrosion
Qhov Zoo ntawm granite: Kev ruaj khov tshuaj lom neeg muaj zog heev, tiv taus acid thiab alkali corrosion; Nws muaj cov coefficient qis ntawm thermal expansion thiab yuav tsis deform txawm tias nyob rau hauv qhov kub siab hauv zos (150 ℃) thaum lub sijhawm laser grooving. Lub hauv paus granite siv hauv ib qho chaw kuaj mob nrog cov tshuaj corrosive grooving tau siv tas li rau peb xyoos, thiab qhov chaw ntawm lub hauv paus tseem zoo li qub.
III. Yuav ua li cas xaiv lub hauv paus granite "zoo tiag tiag"?
Saib qhov ceev: Granite nrog qhov ceev ntawm ≥2800kg / m³ muaj cov qauv compact dua.
Tshawb xyuas cov ntawv pov thawj: Nco ntsoov lees paub cov ntawv pov thawj raug cai xws li ISO 9001 thiab CNAS kom ntseeg tau tias zoo.
Cov ntaub ntawv pov thawj: Tus neeg tsim khoom yuav tsum muab cov ntawv qhia txog kev sim ntawm cov coefficient ntawm thermal expansion (< 8 × 10⁻⁶/℃) thiab flatness (±0.5μm/m).
Kev sim hauv qhov chaw: Coj mus rhaub rau hauv qab. Lub suab meej qhia tias tsis muaj qhov tawg sab hauv. Yog tias qhov chaw kov du zoo li daim iav, nws qhia tias ua haujlwm tau zoo.
Xaus Lus: Xaiv cov granite zoo thiab yeej ib nrab ntawm kev sib ntaus sib tua hauv kev sib tsoo!
Txij li kev tiv taus kev co, kev tiv taus cua sov mus rau kev tiv taus hnav, lub hauv paus granite, nrog nws "kev zoo nkauj ntuj" thiab "lub zog nyuaj", tau dhau los ua tus khub kub rau cov khoom siv wafer grooving. Hauv lub caij nyoog tsim khoom semiconductor niaj hnub no uas nrhiav kev ua kom raug nanoscale, lub hauv paus granite zoo tsis yog tsuas yog kev nqis peev hauv cov khoom siv xwb tab sis kuj yog kev lav phib xaub ntev rau kev ua haujlwm zoo thiab cov khoom zoo!
Lub sijhawm tshaj tawm: Lub Rau Hli-17-2025