Hauv kev lag luam semiconductor, qhov twg "nanometer" yog tus qauv ntsuas, qhov kev ua tiav ntawm cov khoom siv tsis tuaj yeem sib tham tau. Raws li cov chip nodes me me mus rau 5nm thiab dhau ntawd, qhov kev thov rau kev co damping thiab thermal stability ncav cuag qib siab heev. Cov khoom siv granite precision tau hloov pauv los ntawm kev ua qhov kev xaiv siab mus rau qhov tseem ceeb "DNA" ntawm cov khoom siv semiconductor tsim khoom.
Ua ib lub tuam txhab ua khoom siv ruaj khov, ZHHIMG® tshuaj xyuas yim daim ntawv thov tseem ceeb tshaj plaws uas granite yog tus phab ej ntsiag to ntawm lub fab.
1. Cov Hauv Paus Tshuab Lithography
Lub tshuab lithography yog cov khoom siv nyuaj tshaj plaws hauv cov saw hlau semiconductor. Lub hauv paus yuav tsum txhawb nqa cov kab ke optical loj thaum tseem nyob twj ywm zoo meej. Granite qhov ceev ceev thiab sab hauv damping tso cai rau nws nqus cov micro-vibrations los ntawm ib puag ncig, kom ntseeg tau tias lub teeb ci tseem sib phim ntawm qib atomic.
2. Cov Theem Kev Tawm Tsam Cua
Kev thauj cov wafer ceev ceev yuav tsum tau kev txav mus los uas tsis muaj kev sib txhuam. Vim tias granite tuaj yeem raug lapped mus rau qhov tiaj tiaj sub-micron, nws ua haujlwm ua tus khub zoo meej rau kev siv tshuab cua. Lub "cushion cua" glides hla qhov chaw granite yam tsis muaj kev hnav, muab kev txav mus los du heev uas xav tau rau kev luam theej duab thiab kev teeb tsa.
3. Kev Tshuaj Xyuas Wafer & Metrology Platforms
Tom qab etching, wafers yuav tsum tau kuaj xyuas seb puas muaj qhov tsis zoo. Txhua qhov kev nthuav dav thermal hauv lub thav duab tshuab yuav ua rau "qhov tsis zoo cuav" lossis qhov tsis zoo.Cov khoom siv granite precisionmuab ib puag ncig uas tsis muaj cua sov, kom ntseeg tau tias cov ntaub ntawv tshuaj xyuas yog qhov tseeb ntawm qhov chaw ntawm lub wafer, tsis yog lub tshuab qhov kev cuam tshuam.
4. Cov Txheej Txheem Gantry Motion (Cov Qauv Choj)
Hauv kev txiav cov hlau ceev ceev lossis kev sib txuas ntawm cov hlau, "choj" lossis lub gantry yuav tsum txav mus sai yam tsis muaj kev co. Lub gantry granite muab qhov sib piv ntawm qhov tawv thiab qhov hnyav zoo dua piv rau cov hlau cam khwb cia, txo qis "lub sijhawm teeb tsa" - lub sijhawm uas lub tshuab yuav tsum tos kom kev co nres ua ntej nws tuaj yeem ua nws txoj haujlwm tom ntej.
5. Cov Khoom Siv Kho Laser
Thaum pom muaj qhov tsis zoo ntawm lub ntsej muag lossis wafer, cov lasers raug siv rau kev kho kom raug. Qhov no xav tau lub hauv paus uas tsis yog hlau nplaum thiab tsis ua hluav taws xob. Granite yog cov khoom rwb thaiv tsev ntuj, tiv thaiv kev cuam tshuam electromagnetic los ntawm kev cuam tshuam rau txoj kev laser zoo.
6. CMM (Cov Tshuab Ntsuas Sib Koom Tes) rau Chav Huv Si
Kev tswj xyuas zoo hauv lub chaw ua haujlwm semiconductor xav tau CMMs uas tuaj yeem tiv taus cov txheej txheem huv chav. Tsis zoo li hlau, uas tuaj yeem tso cov khoom me me lossis oxidize, granite yog acid-resistant thiab xeb-proof, tswj cov qauv khoom siv ruaj khov yam tsis muaj kuab paug rau ib puag ncig.
7. Kev Siv Tshuaj Txhuam Txhuam (CMP) Cov Hauv Paus
Cov txheej txheem CMP muaj cov tshuaj slurry thiab cov tshuaj lom neeg uas ua rau cov hlau xeb heev. Granite txoj kev tiv thaiv tshuaj lom neeg ntuj ua rau nws yog cov khoom siv zoo tshaj plaws rau lub hauv paus ntawm cov khoom siv polishing, ua kom muaj lub neej ntev txawm tias nyob hauv cov chaw muaj tshuaj lom neeg hnyav.
8. Cov Txheej Txheem Cog Ion
Cov chaw muaj hluav taws xob ntau hauv cov ion implanters xav tau cov khoom uas yuav tsis cuam tshuam rau cov ion beams lossis tsim hluav taws xob arcing. Granite cov khoom dielectric ua rau nws yog qhov kev xaiv zoo thiab ruaj khov rau kev teeb tsa cov khoom siv hluav taws xob thiab lub tshuab nqus tsev.
Vim li cas thiaj siv ZHHIMG® rau Semiconductor Infrastructure?
Ntawm ZHHIMG®, peb nkag siab tias lub hauv paus khoom siv semiconductor tsis yog ib daim pob zeb xwb - nws yog ib lub cuab yeej calibrated. Peb cov granite dub tshwj xeeb, ua ke nrog peb 30+ xyoo ntawm kev txawj ntse sib tsoo tes, tso cai rau peb kom ua tiav qib flatness thiab parallelism uas ua tau raws li cov kev cai nruj ntawm lub sijhawm sub-micron.
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Khoom siv: ZHHIMG® granite dub uas muaj qhov ntom ntom, nplua heev.
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Kev Ntsuas: Qib qhov tseeb raws li DIN 876 Qib 00 lossis kev cai JIS / ASME cov lus qhia.
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Kev Kho Kom Haum: Cov ntxig sib xyaw ua ke, T-qhov, thiab cov kab khiav cua uas tau teeb tsa ua ntej hauv peb lub chaw ua haujlwm 10,000m² uas muaj qhov kub tas li.
Lub sijhawm tshaj tawm: Lub Peb Hlis-18-2026