♦ Alumina (Al2O3)
Lub precision ceramic qhov chaw tsim los ntawm ZhongHui Intelligent Manufacturing Group (ZHHIMG) tuaj yeem ua los ntawm cov khoom siv purity ceramic, 92 ~ 97% alumina, 99.5% alumina, > 99.9% alumina, thiab CIP txias isostatic nias.Kub sintering thiab precision machining, qhov tseeb qhov tseeb ntawm ± 0.001mm, smoothness mus txog Ra0.1, siv kub txog li 1600 degrees.Cov xim sib txawv ntawm cov ceramics tuaj yeem ua tau raws li cov neeg siv khoom xav tau, xws li: dub, dawb, beige, tsaus liab, thiab lwm yam. Cov precision ceramics tsim los ntawm peb lub tuam txhab muaj kev tiv thaiv kub, corrosion, hnav thiab rwb thaiv tsev, thiab tuaj yeem ua tau. siv rau lub sijhawm ntev hauv qhov kub thiab txias, lub tshuab nqus tsev thiab corrosive gas ib puag ncig.
Siv dav hauv ntau yam khoom siv hluav taws xob semiconductor: Ncej (ceramic bracket), Substrate (base), Arm / Choj (manipulator), , Mechanical Cheebtsam thiab Ceramic Cua Bearing.
| Khoom npe | High Purity 99 Alumina Ceramic Square Tube / Yeeb / Qws | |||||
| Index | Chav tsev | 85% Al2O3 | 95% Al2O3 | 99% Al2O3 | 99.5% Al2O3 | |
| Qhov ntom | g/cm3 | 3.3 | 3.65 ib | 3.8 | 3.9 | |
| Kev nqus dej | % | <0.1 | <0.1 | 0 | 0 | |
| Sintered kub | ℃ | 1620 | 1650 | 1800 | 1800 | |
| Hardness | Mohs | 7 | 9 | 9 | 9 | |
| Bending zog (20 ℃)) | Mpa | 200 | 300 | 340 | 360 | |
| Compressive zog | Kgf / cm2 | 10000 | 25 000 | 30000 | 30000 | |
| Lub sij hawm ua hauj lwm kub | ℃ | 1350 | 1400 | 1600 | 1650 | |
| Max.Ua haujlwm kub | ℃ | 1450 | 1600 | 1800 | 1800 | |
| Volume Resistivity | 20 ℃ | Ω.cm3 ua | > 1013 | > 1013 | > 1013 | > 1013 |
| 100 ℃ | 1012-1013 | 1012-1013 | 1012-1013 | 1012-1013 | ||
| 300 ℃ | > 109 | > 1010 | > 1012 | > 1012 | ||
Daim ntawv thov ntawm siab purity alumina ceramics:
1. Siv rau cov khoom siv semiconductor: ceramic nqus chuck, txiav disc, ntxuav disc, ceramic CHUCK.
2. Wafer hloov qhov chaw: wafer tuav chucks, wafer txiav discs, wafer tu discs, wafer optical tshuaj xyuas lub khob.
3. LED / LCD vaj huam sib luag tiaj tus zaub kev lag luam: ceramic nozzle, ceramic sib tsoo disc, LIFT PIN, PIN rail.
4. Optical kev sib txuas lus, hnub ci kev lag luam: ceramic raj, ceramic rods, circuit board screen printing ceramic scrapers.
5. Thaum tshav kub kub-resistant thiab hluav taws xob insulating qhov chaw: ceramic bearings.
Tam sim no, aluminium oxide ceramics tuaj yeem muab faib ua cov purity siab thiab ntau hom ceramics.Lub siab purity aluminium oxide ceramics series hais txog cov khoom siv ceramic uas muaj ntau tshaj 99.9% Al₂O₃.Vim tias nws qhov kub thiab txias txog li 1650 - 1990 ° C thiab nws qhov kev sib kis wavelength ntawm 1 ~ 6μm, nws yog feem ntau ua tiav rau hauv fused iav es tsis txhob platinum crucible: uas tuaj yeem siv los ua sodium raj vim nws lub teeb xa tawm thiab corrosion tsis kam. alkali hlau.Hauv kev lag luam hluav taws xob, nws tuaj yeem siv los ua cov khoom siv hluav taws xob ntau zaus rau IC substrates.Raws li cov ntsiab lus sib txawv ntawm txhuas oxide, cov txhuas oxide ceramics tuaj yeem muab faib ua 99 ceramics, 95 ceramics, 90 ceramics thiab 85 ceramics.Qee zaum, cov ceramics nrog 80% lossis 75% ntawm txhuas oxide kuj tau muab cais ua cov txhuas oxide ceramic series.Ntawm lawv, 99 aluminium oxide ceramic khoom yog siv los tsim cov khoom kub kub, hluav taws kub hauv qhov cub thiab cov khoom siv tshwj xeeb hnav, xws li ceramic bearings, ceramic seals thiab valve phaj.95 txhuas ceramics yog siv los ua corrosion-resistant hnav-tiv taus ib feem.85 ceramics feem ntau sib xyaw hauv qee yam khoom, yog li txhim kho hluav taws xob kev ua tau zoo thiab lub zog txhua yam.Nws tuaj yeem siv molybdenum, niobium, tantalum thiab lwm yam hlau ntsaws ruaj ruaj, thiab qee qhov siv los ua cov khoom siv hluav taws xob.
| Yam khoom zoo (tus nqi sawv cev) | Khoom npe | AES-12 | AES-11 | AES-11 C | AES-11 F | AES-22 S | AES-23 | UA-31-03 | |
| Chemical Composition Tsawg-Sodium Yooj Yim Sintering Khoom | H₂O | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| LOl | % | 0.1 | 0.2 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
| Fe₂0₃ | % | 0.01 ib | 0.01 ib | 0.01 ib | 0.01 ib | 0.01 ib | 0.01 ib | 0.01 ib | |
| SiO₂ | % | 0.03 ib | 0.03 ib | 0.03 ib | 0.03 ib | 0.02 ib | 0.04 ib | 0.04 ib | |
| Na₂O | % | 0.04 ib | 0.04 ib | 0.04 ib | 0.04 ib | 0.02 ib | 0.04 ib | 0.03 ib | |
| MgO* | % | - | 0.11 | 0.05 Nws | 0.05 Nws | - | - | - | |
| Al₂0₃ | % | 99.9 ua | 99.9 ua | 99.9 ua | 99.9 ua | 99.9 ua | 99.9 ua | 99.9 ua | |
| Medium Particle Diameter (MT-3300, laser tsom xam txoj kev) | ib m | 0.44 ib | 0.43 ib | 0.39 ib | 0.47 ib | 1.1 | 2.2 | 3 | |
| α Crystal Loj | ib m | 0.3 | 0.3 | 0.3 | 0.3 | 0.3 ~ 1.0 | 0.3 ~ 4 | 0.3 ~ 4 | |
| Txoj Kev Ceev ** | g/cm³ | 2.22 | 2.22 | 2.2 | 2.17 | 2.35 Nws | 2.57 ib | 2.56 ib | |
| Sintering ceev ** | g/cm³ | 3.88 ib | 3.93 ib | 3.94 ib | 3.93 ib | 3.88 ib | 3.77 ib | 3.22 | |
| Shrinking tus nqi ntawm Sintering kab ** | % | 17 | 17 | 18 | 18 | 15 | 12 | 7 | |
* MgO tsis suav nrog hauv kev suav ntawm purity ntawm Al₂O₃.
* Tsis muaj scaling hmoov 29.4MPa (300kg / cm²), sintering kub yog 1600 ° C.
AES-11 / 11C / 11F: Ntxiv 0.05 ~ 0.1% MgO, sinterability zoo heev, yog li nws muaj feem xyuam rau txhuas oxide ceramics nrog purity ntau tshaj 99%.
AES-22S: Tus cwj pwm los ntawm kev sib sau siab thiab qis qis ntawm sintering kab, nws muaj feem xyuam rau daim ntawv pov thawj thiab lwm yam khoom loj nrog qhov yuav tsum tau muaj qhov tseeb.
AES-23 / AES-31-03: Nws muaj qhov sib sau ntau dua, thixotropy thiab qis dua viscosity dua AES-22S.lub qub yog siv rau ceramics thaum lub tom kawg yog siv los ua dej reducer rau cov khoom siv hluav taws xob, tau txais koob meej.
♦Silicon Carbide (SiC) Cov yam ntxwv
| Cov yam ntxwv dav dav | Purity ntawm lub ntsiab Cheebtsam (wt%) | 97 | |
| Xim | Dub | ||
| Qhov ceev (g / cm³) | 3.1 | ||
| Kev nqus dej (%) | 0 | ||
| Mechanical yam ntxwv | Flexural zog (MPa) | 400 | |
| Cov tub ntxhais hluas modulus (GPa) | 400 | ||
| Vickers hardness (GPa) | 20 | ||
| Thermal yam ntxwv | Ua haujlwm kub siab tshaj plaws (°C) | 1600 | |
| Thermal expansion coefficient | RT ~ 500 ° C | 3.9 | |
| (1/°C x 10-6) | RT ~ 800 ° C | 4.3 | |
| Thermal conductivity (W / m x K) | 130 110 ib | ||
| Thermal shock resistance ΔT (° C) | 300 | ||
| Cov yam ntxwv hluav taws xob | Volume resistivity | 25 ° C | 3 x106 |
| 300 ° C | - | ||
| 500 ° C | - | ||
| 800 ° C | - | ||
| Dielectric tsis tu ncua | 10 GHz | - | |
| Dielectric poob (x 10-4) | - | ||
| Q Factor (x 104) | - | ||
| Dielectric tawg voltage (KV / mm) | - | ||
♦ Silicon Nitride Ceramic
| Khoom siv | Chav tsev | Si₃N₄ |
| Txoj Kev Sintering | - | Gas Siab Sintered |
| Qhov ntom | g/cm³ | 3.22 |
| Xim | - | Tsaus Grey |
| Cov dej nqus dej | % | 0 |
| Hluas Modulus | Gpa | 290 |
| Vickers Hardness | Gpa | 18–20 |
| Compressive zog | Mpa | 2200 |
| Khoov zog | Mpa | 650 |
| Thermal conductivity | W/mK | 25 |
| Thermal Shock Resistance | Δ (°C) | 450-650 |
| Ua haujlwm kub siab tshaj plaws | °C | 1200 |
| Volume Resistivity | Ω·cm | > 10^14 |
| Dielectric tsis tu ncua | - | 8.2 |
| Dielectric zog | kV / hli | 16 |