Hauv kev tsim khoom lag luam, tshwj xeeb tshaj yog nyob rau hauv cov xwm txheej uas muaj kev ua haujlwm siab thiab kev sib txuas ntxiv, XYZT precision gantry txav platform feem ntau yuav tsum ua haujlwm hauv qab kev thauj khoom siab thiab kev ua haujlwm ntev. Lub sijhawm no, qhov ruaj khov ntawm cov khoom granite tau dhau los ua qhov tseem ceeb hauv kev ua kom ruaj khov ntawm lub platform.
Kev ruaj khov ntawm cov qauv ua kom muaj kev ruaj khov
Tom qab ntau txhiab xyoo ntawm kev hloov pauv geological, cov pob zeb hauv av sab hauv tau teeb tsa zoo sib xws, tsim cov qauv ntom ntom thiab sib xws. Nyob rau hauv cov xwm txheej siab, cov khoom siv niaj hnub yuav ua rau cov qauv sab hauv deformation vim muaj kev siab, ua rau qhov tseeb qis dua lossis txawm tias puas tsuaj rau lub platform. Cov khoom granite tuaj yeem yooj yim daws cov teeb meem siab vim lawv lub zog compressive zoo dua. Cov ntaub ntawv tshawb fawb qhia tau hais tias lub zog compressive ntawm cov granite zoo tuaj yeem ncav cuag 200-300MPa, uas tuaj yeem tiv taus lub siab ntawm cov hlau niaj hnub yam tsis muaj kev hloov pauv tseem ceeb. Piv txwv li, piv txwv li, XYZT precision gantry txav platform siv los ntawm lub tuam txhab txuas ntxiv txhawb cov khoom granite ruaj khov thaum ua cov cav dav hlau casing uas hnyav ntau tons. Thaum lub sijhawm ua tiav tas mus li txog 10 teev, qhov yuam kev flatness ntawm lub platform ib txwm tswj tau hauv ± 0.05 hli. Nws ua kom tiav qhov du ntawm kev ua tiav siab-precision milling, drilling thiab lwm yam txheej txheem, uas ua pov thawj tag nrho lub peev xwm zoo ntawm cov khoom granite los tswj cov qauv ruaj khov nyob rau hauv qhov siab load.
Hnav tsis kam rau kev ua haujlwm ntev
Kev ua haujlwm tas mus li ntev txhais tau tias kev sib txhuam ntau zaus ntawm cov khoom txav mus los, uas ua rau muaj kev sim zoo rau kev hnav tsis kam ntawm cov khoom. Granite hardness siab dua, Mohs hardness feem ntau yog 6-7, piv rau ntau cov khoom siv hlau uas tiv taus hnav. Hauv kev tsim khoom tiag tiag, xws li XYZT platform ntawm lub chaw tsim pwm tsheb, cov pwm loj loj yuav tsum tau ua kom raug txhua hnub, thiab lub platform khiav txog li 16 teev hauv ib hnub. Tom qab kev saib xyuas siv ntev, qhov hnav ntawm cov khoom granite yog me me heev, tom qab 10,000 teev ntawm kev ua haujlwm tas mus li, qhov hnav ntawm cov granite hauv kev sib cuag nrog cov khoom txav mus los ntawm lub platform tsuas yog 0.02 hli, qis dua li cov khoom siv hlau ib txwm muaj, ua rau txo qis qhov kev poob qis ntawm qhov tseeb los ntawm kev hnav thiab kev saib xyuas cov khoom siv, kom ntseeg tau tias lub platform ua haujlwm ruaj khov mus sij hawm ntev.
Kev ruaj khov thermal pab txhawb kev txwv tsis pub dhau
Lub cua sov ntawm cov khoom siv yog qhov tseem ceeb thaum lub sijhawm ua haujlwm siab, thiab qhov kub hloov pauv yuav yooj yim cuam tshuam rau kev ua haujlwm ntawm cov khoom. Lub coefficient thermal expansion ntawm granite yog qis heev, feem ntau yog 5-7 × 10⁻⁶ / ℃, thiab qhov loj me hloov pauv tsawg heev nyob rau hauv qhov kub hloov pauv loj. Hauv cov txheej txheem photolithography ntawm lub tuam txhab tsim khoom siv hluav taws xob, XYZT precision gantry txav platform yuav tsum nqa cov khoom siv photolithography siab-precision ntev, uas tsim ntau cua sov thaum cov khoom siv ua haujlwm, thiab qhov kub ntawm lub chaw ua haujlwm tuaj yeem nce 5-10 ℃ hauv lub sijhawm luv luv. Hauv qhov chaw ib puag ncig no, lub platform txhawb nqa los ntawm cov khoom granite yeej ib txwm ruaj khov, tsis muaj kev hloov pauv thermal pom tseeb vim muaj kev hloov pauv kub, ua kom ntseeg tau tias qhov tseeb nanoscale ntawm chip lithography, ua tiav ultra-ntev thiab ruaj khov ua haujlwm ntawm 20 teev hauv ib hnub, tawg lub sijhawm ua haujlwm txwv ntawm cov khoom siv zoo sib xws, qhia txog qhov zoo ntawm cov khoom granite hauv cov chaw ua haujlwm thermal nyuaj.
Lub sijhawm tshaj tawm: Plaub Hlis-14-2025