Hauv qhov txuas tseem ceeb ntawm chip manufacturing - wafer scanning, qhov tseeb ntawm cov cuab yeej txiav txim siab qhov zoo ntawm cov nti. Raws li ib qho tseem ceeb ntawm cov cuab yeej siv, qhov teeb meem thermal expansion ntawm granite tshuab puag tau nyiam ntau xim.
Cov coefficient ntawm thermal expansion ntawm granite feem ntau yog nruab nrab ntawm 4 thiab 8 × 10⁻⁶ / ℃, uas yog qis dua li cov hlau thiab marble. Qhov no txhais tau hais tias thaum kub hloov pauv, nws qhov loj me hloov me ntsis. Txawm li cas los xij, nws yuav tsum tau muab sau tseg tias qis thermal expansion tsis txhais hais tias tsis muaj thermal expansion. Nyob rau hauv qhov kub hloov pauv, txawm tias qhov nthuav dav me ntsis tuaj yeem cuam tshuam rau qhov tseeb nanoscale ntawm wafer scanning.
Thaum lub sij hawm wafer scanning txheej txheem, muaj ntau yam laj thawj rau qhov tshwm sim ntawm thermal expansion. Qhov kub hloov pauv hauv kev cob qhia, cov cua sov tsim los ntawm kev ua haujlwm ntawm cov khoom siv, thiab qhov kub siab sai sai coj los ntawm kev ua laser yuav tag nrho ua rau lub hauv paus granite "nthuav thiab cog lus vim qhov kub hloov". Thaum lub hauv paus undergoes thermal expansion, qhov ncaj ntawm cov kev taw qhia rail thiab flatness ntawm lub platform yuav deviate, uas ua rau nyob rau hauv tsis muaj tseeb txav trajectory ntawm lub wafer rooj. Cov khoom txhawb nqa kho qhov muag kuj tseem yuav hloov pauv, ua rau lub scanning beam "deviate". Kev ua haujlwm tsis tu ncua rau lub sijhawm ntev kuj tseem yuav ua rau qhov yuam kev, ua rau qhov tseeb tsis zoo thiab tsis zoo.
Tab sis tsis txhob txhawj. Tib neeg twb muaj kev daws teeb meem. Hais txog cov ntaub ntawv, granite veins nrog qis coefficient ntawm thermal expansion yuav raug xaiv thiab raug rau kev laus kev kho mob. Nyob rau hauv cov nqe lus ntawm kev tswj qhov kub thiab txias, lub rooj cob qhia kub yog precisely tswj ntawm 23 ± 0.5 ℃ los yog txawm qis dua, thiab ib tug active tshav kub dissipation ntaus ntawv kuj yuav tsim rau lub hauv paus. Nyob rau hauv cov nqe lus ntawm cov qauv tsim, cov qauv symmetrical thiab hloov pauv tau txais yuav, thiab kev saib xyuas lub sijhawm tiag tiag yog ua los ntawm cov ntsuas kub. Cov teeb meem tshwm sim los ntawm thermal deformation yog dynamically kho los ntawm algorithms.
Cov khoom siv high-end xws li ASML lithography tshuab, los ntawm cov txheej txheem no, ua kom cov thermal expansion nyhuv ntawm granite puag nyob rau hauv ib tug tsis tshua muaj me me ntau yam, ua rau lub wafer scan qhov tseeb mus txog qib nanometer. Yog li ntawd, tsuav nws yog tswj kom zoo, lub hauv paus granite tseem yog ib qho kev xaiv txhim khu kev qha rau wafer scanning khoom.
Post lub sij hawm: Jun-12-2025