Granite yog cov khoom siv nrov hauv kev lag luam wafer vim nws cov khoom siv tshwj xeeb thiab ua haujlwm ntev.Nws yog lub pob zeb ntuj uas yog mined los ntawm quarries thoob plaws ntiaj teb thiab tau siv ntau pua xyoo rau ntau yam kev tsim kho, suav nrog kev tsim cov khoom siv semiconductor.Hauv tsab xov xwm no, peb yuav tham txog cov khoom ntawm granite thiab nws cov kev siv ntau yam hauv cov khoom siv wafer.
Cov khoom ntawm Granite
Granite yog lub pob zeb uas tsis muaj zog uas yog tsim los ntawm mica, feldspar, thiab quartz.Nws yog lub npe hu rau nws lub zog tshwj xeeb, hardness, thiab durability, ua rau nws yog ib qho khoom siv zoo tshaj plaws rau cov ntawv thov uas xav tau siab precision thiab raug.Granite muaj cov coefficient tsawg ntawm thermal expansion, uas txhais tau hais tias nws tsis nthuav lossis cog lus vim qhov kub thiab txias, ua rau nws ruaj khov heev.Tsis tas li ntawd, granite yog resistant rau corrosion thiab tshuaj, uas ua rau nws ib tug zoo tagnrho cov ntaub ntawv rau siv nyob rau hauv hnyav ib puag ncig.
Daim ntawv thov ntawm Granite nyob rau hauv Wafer Processing Equipment
Granite yog cov khoom siv dav siv hauv kev lag luam wafer vim nws cov khoom sib xyaw tshwj xeeb.Cov hauv qab no yog qee qhov kev siv ntawm granite hauv wafer ua khoom siv:
1. Cov cuab yeej ntsuas ntsuas
Granite feem ntau yog siv rau hauv kev tsim cov cuab yeej ntsuas ntsuas, xws li kev sib koom tes ntsuas tshuab (CMMs) thiab cov tshuab ntsuas qhov muag.Cov cuab yeej no yuav tsum muaj qhov chaw ruaj khov uas tuaj yeem tiv taus kev co thiab cua sov.Lub siab tawv thiab tsis tshua muaj thermal expansion ntawm granite ua rau nws yog ib qho khoom siv zoo rau cov ntawv thov.
2. Wafer Chucks
Wafer chucks yog siv los tuav wafers thaum lub sijhawm tsim khoom.Cov chucks no yuav tsum muaj qhov chaw tiaj tus thiab ruaj khov los tiv thaiv lub wafer los ntawm kev sib tsoo lossis khoov.Granite muab qhov chaw tiaj tus uas ruaj khov thiab tiv taus kev sib tsoo, ua rau nws yog ib qho khoom siv zoo heev rau wafer chucks.
3. Chemical Mechanical Polishing (CMP) Cov cuab yeej
CMP cov cuab yeej siv los txhuam wafers thaum lub sijhawm tsim khoom.Cov cuab yeej no xav tau lub platform ruaj khov uas tuaj yeem tiv taus kev co thiab cua sov.Qhov zoo tshaj plaws nruj thiab qis thermal expansion ntawm granite ua rau nws yog ib qho khoom siv zoo tshaj plaws rau CMP cov cuab yeej.
4. Cov khoom siv tshuaj ntsuam xyuas Wafer
Cov cuab yeej tshuaj xyuas wafer yog siv los tshuaj xyuas wafers rau qhov tsis xws luag thiab qhov tsis zoo.Cov cuab yeej no xav tau qhov chaw ruaj khov thiab tiaj tus los xyuas kom meej qhov ntsuas.Granite muab qhov chaw ruaj khov thiab tiaj tus uas tiv taus warping, ua rau nws yog ib qho khoom siv zoo tshaj plaws rau wafer tshuaj xyuas cov khoom.
Xaus
Hauv kev xaus, granite yog cov khoom siv dav siv hauv kev lag luam wafer vim nws cov khoom tshwj xeeb thiab kev ua haujlwm ntev.Nws yog feem ntau siv hauv kev tsim cov cuab yeej ntsuas ntsuas, wafer chucks, CMP cov cuab yeej, thiab cov cuab yeej tshuaj xyuas wafer.Kev sib xyaw tshwj xeeb ntawm cov khoom ua rau nws yog cov khoom siv zoo tagnrho rau cov ntawv thov uas xav tau siab precision thiab raug.Nrog nws cov txiaj ntsig ntau, granite tseem yog ib qho kev xaiv nrov rau cov khoom siv wafer, thiab nws txoj kev siv yuav zoo li yuav loj hlob mus ntxiv rau yav tom ntej.
Post lub sij hawm: Dec-27-2023