Granite siv rau hauv cov khoom siv ua wafer yog dab tsi?

Granite yog ib yam khoom siv nrov hauv kev lag luam ua wafer vim nws cov khoom siv kho tshuab zoo heev thiab ruaj khov. Nws yog ib lub pob zeb ntuj uas tau khawb los ntawm cov chaw txua zeb thoob plaws ntiaj teb thiab tau siv rau ntau pua xyoo rau ntau yam kev tsim kho, suav nrog kev tsim cov khoom siv semiconductor. Hauv tsab xov xwm no, peb yuav tham txog cov khoom ntawm granite thiab nws cov ntawv thov ntau yam hauv cov khoom siv ua wafer.

Cov Khoom ntawm Granite

Granite yog pob zeb igneous uas muaj mica, feldspar, thiab quartz. Nws paub txog nws lub zog tshwj xeeb, tawv, thiab ruaj khov, ua rau nws yog cov khoom siv zoo tagnrho rau cov ntawv thov uas xav tau kev raug siab thiab raug. Granite muaj cov coefficient qis ntawm thermal expansion, uas txhais tau tias nws tsis nthuav dav lossis cog lus vim qhov kub thiab txias hloov pauv, ua rau nws ruaj khov heev. Tsis tas li ntawd, granite tiv taus corrosion thiab tshuaj lom neeg, uas ua rau nws yog cov khoom siv zoo tagnrho rau kev siv hauv qhov chaw nyuaj.

Cov ntawv thov ntawm Granite hauv Wafer Processing Equipment

Granite yog ib yam khoom siv dav dav hauv kev lag luam ua wafer vim nws muaj cov yam ntxwv tshwj xeeb. Cov hauv qab no yog qee qhov kev siv granite hauv cov khoom siv ua wafer:

1. Cov Cuab Yeej Ntsuas

Granite feem ntau siv rau hauv kev tsim cov cuab yeej ntsuas, xws li cov tshuab ntsuas sib koom ua ke (CMMs) thiab cov tshuab ntsuas kho qhov muag. Cov cuab yeej no xav tau cov chaw ruaj khov uas tuaj yeem tiv taus kev co thiab cua sov. Qhov ruaj khov siab thiab qhov nthuav dav thermal qis ntawm granite ua rau nws yog cov khoom siv zoo tagnrho rau cov ntawv thov zoo li no.

2. Cov Khoom Siv Wafer

Cov wafer chucks siv los tuav cov wafer thaum lub sijhawm tsim khoom. Cov chucks no xav tau ib qho chaw tiaj tus thiab ruaj khov kom tiv thaiv cov wafer los ntawm kev warping lossis khoov. Granite muab ib qho chaw tiaj tus uas ruaj khov heev thiab tiv taus kev warping, ua rau nws yog cov khoom siv zoo heev rau wafer chucks.

3. Cov Cuab Yeej Siv Tshuaj Lom Zem (CMP)

Cov cuab yeej CMP siv los txhuam cov wafers thaum lub sijhawm tsim khoom. Cov cuab yeej no xav tau lub platform ruaj khov uas tuaj yeem tiv taus kev co thiab cua sov. Qhov ruaj khov zoo heev thiab qhov nthuav dav thermal qis ntawm granite ua rau nws yog cov khoom siv zoo tagnrho rau cov cuab yeej CMP.

4. Cov Khoom Siv Tshuaj Xyuas Wafer

Cov khoom siv tshuaj xyuas wafer yog siv los tshuaj xyuas cov wafers rau qhov tsis zoo thiab qhov tsis zoo. Cov cuab yeej no xav tau qhov chaw ruaj khov thiab tiaj tus kom ntseeg tau tias qhov ntsuas raug. Granite muab qhov chaw ruaj khov thiab tiaj tus uas tiv taus kev warping, ua rau nws yog cov khoom siv zoo tagnrho rau cov khoom siv tshuaj xyuas wafer.

Xaus lus

Xaus lus, granite yog ib yam khoom siv dav hauv kev lag luam ua wafer vim nws cov khoom siv kho tshuab zoo heev thiab ruaj khov. Nws feem ntau siv rau hauv kev tsim cov cuab yeej metrology, wafer chucks, CMP cov cuab yeej, thiab cov khoom siv tshuaj xyuas wafer. Kev sib xyaw ua ke ntawm cov khoom ua rau nws yog cov khoom siv zoo tagnrho rau cov ntawv thov uas xav tau kev raug siab thiab raug. Nrog nws cov txiaj ntsig ntau, granite tseem yog qhov kev xaiv nrov rau cov khoom siv ua wafer, thiab nws siv yuav txuas ntxiv loj hlob yav tom ntej.