Granite yog cov khoom siv nrov nyob hauv kev tiv thaiv kev lag luam vim nws cov khoom siv neeg kho tshuab tshwj xeeb thiab kav ntev. Nws yog pob zeb ntuj uas tau txiav txim siab los ntawm kev cav ntoo thoob plaws ntiaj teb thiab tau siv rau ntau pua xyoo, nrog rau cov khoom tsim kho ntawm cov khoom sib txuas lus. Hauv tsab xov xwm no, peb yuav tham txog cov khoom ntawm Granite thiab nws ntau cov kev siv hauv kev nyab xeeb ua khoom siv.
Cov khoom ntawm Granite
Granite yog pob zeb tsis zoo uas yog tsim los ntawm mica, feldspar, thiab quartz. Nws yog lub npe hu rau nws lub zog tshwj xeeb, tawv, ua rau nws cov khoom zoo rau cov ntawv thov uas yuav tsum muaj qhov tseeb thiab qhov tseeb. Granite muaj cov coefficient ntawm thermal expansion, uas txhais tau tias nws tsis nthuav lossis cog lus vim qhov ntsuas kub hloov, ua rau nws ruaj khov. Ib qho ntxiv, cov granite yog resistant rau corrosion thiab tshuaj lom neeg, uas ua rau nws cov khoom siv zoo rau kev siv hauv cov chaw hnyav.
Cov ntawv thov ntawm Granite nyob rau hauv Wafer Ua Khoom Siv
Granite yog cov khoom siv dav hauv kev tiv thaiv kev lag luam vim nws cov khoom sib xyaw tshwj xeeb ntawm cov khoom. Cov hauv qab no yog qee cov kev siv ntawm granite nyob rau hauv wafer ua khoom siv:
1. Cov cuab yeej ntsuas me me
Granite feem ntau yog siv nyob rau hauv kev tsim khoom ntawm cov cuab yeej metrology, xws li ntsuas cov tshuab ntsuas (cms) thiab ntsuas kho kho qhov ntsuas. Cov cuab yeej no xav tau cov chaw ruaj khov uas tuaj yeem tiv thaiv kev co thiab cua sov. Lub siab txhav thiab tsis muaj thermal expansion ntawm granite ua rau nws cov khoom zoo rau cov ntawv thov.
2. Wafer Chucks
Wafer chucks yog siv los tuav Wafers thaum lub sijhawm tsim khoom. Cov chucks yuav tsum tau ib qho chaw tiaj thiab ruaj khov los tiv thaiv cov wafer los ntawm warping los yog dabtsi yog khoov. Granite muab lub tiaj tiaj uas tau ruaj khov thiab tiv taus kev ntaus rog, ua rau nws ib qho khoom siv zoo rau wafer chucks.
3. Txuj Siv Neeg Kho Tshuab Polishing (CMP) Cov Cuab Yeej
CMP cov cuab yeej tau siv los rau Polish Wafers thaum lub sijhawm tsim khoom. Cov cuab yeej no yuav tsum muaj lub platform ruaj khov uas tuaj yeem tawm tsam kev co thiab kub. Qhov zoo heev stiffness thiab tsawg thermal expansion ntawm granite ua rau nws yog cov khoom siv zoo rau CLP cov cuab yeej.
4. Wafer Soj ntsuam cov khoom siv
Cov khoom siv tshuaj ntsuam xyuas tau siv los tshawb xyuas Wafers rau qhov tsis xws luag thiab qhov khuam. Cov cuab yeej no yuav tsum muaj qhov ruaj khov thiab tiaj tiaj rau kom ntseeg tau tias kev ntsuas yog qhov tseeb. Granite muab qhov chaw ruaj khov thiab tiaj tiaj uas tiv thaiv warping, ua rau nws cov khoom siv zoo rau kev tshuaj ntsuam cov khoom siv tshuaj lom zem.
Tag
Hauv kev xaus, Granite yog cov khoom siv dav nyob hauv kev tiv thaiv kev lag luam vim nws cov khoom siv neeg kho tshuab tshwj xeeb thiab kav ntev. Nws yog feem ntau siv nyob rau hauv kev tsim khoom ntawm cov cuab yeej ua, wafer chucks, CMP cov cuab yeej, thiab kev tshuaj ntsuam cov cuab yeej tshuaj lom zem. Qhov tshwj xeeb ua ke ntawm cov khoom ua rau nws cov ntaub ntawv zoo tshaj plaws rau cov ntawv thov uas yuav tsum muaj qhov tseeb thiab qhov tseeb. Nrog nws cov txiaj ntsig ntau, GRANITE tseem yog qhov kev xaiv nrov rau cov khoom siv wafer, thiab nws cov kev siv yog yuav loj hlob ntxiv rau yav tom ntej.
Lub Sijhawm Post: Dec-27-2023