Dab tsi yog qhov tsis zoo ntawm granite hauv kev lag luam semiconductor?

Raws li cov kev cai nruj ntawm kev ua haujlwm siab thiab kev ntseeg siab hauv kev lag luam semiconductor, txawm hais tias granite yog ib qho ntawm cov ntaub ntawv tseem ceeb, nws cov khoom kuj coj qee yam kev txwv. Cov hauv qab no yog nws qhov tsis zoo thiab cov teeb meem tseem ceeb hauv kev siv tswv yim:
Ua ntej, cov khoom yog nkig heev thiab nyuaj rau txheej txheem
Kev pheej hmoo ntawm kev tawg: Granite yog qhov tseem ceeb ntawm lub pob zeb ntuj nrog ntuj micro-cracks thiab ntxhia particle ciam teb sab hauv, thiab nws yog cov khoom siv nkig. Nyob rau hauv ultra-precision machining (xws li nanoscale sib tsoo thiab complex curved nto ua), yog tias lub zog tsis sib npaug los yog cov kev ua haujlwm tsis tsim nyog, cov teeb meem xws li chipping thiab microcrack propagation yog nquag tshwm sim, ua rau cov scrapping ntawm lub workpiece.

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Kev ua haujlwm tsawg: Txhawm rau kom tsis txhob tawg tawg, cov txheej txheem tshwj xeeb xws li kev sib tsoo qis nrog pob zeb diamond sib tsoo log thiab magnetorheological polishing yuav tsum tau ua. Lub voj voog ua haujlwm yog 30% mus rau 50% ntev dua li cov khoom siv hlau, thiab cov khoom siv peev txheej yog siab (piv txwv li, tus nqi ntawm tsib-axis txuas machining chaw ntau dua 10 lab yuan).
Complex qauv txwv: Nws yog ib qho nyuaj rau tsim hollow lub teeb yuag qauv los ntawm casting, forging thiab lwm yam txheej txheem. Nws feem ntau yog siv rau hauv cov duab geometric yooj yim xws li daim hlau thiab cov hauv paus, thiab nws daim ntawv thov raug txwv rau hauv cov khoom siv uas yuav tsum tau muaj kev txhawb nqa tsis tu ncua lossis kev sib xyaw hauv cov kav dej.
Qhov thib ob, qhov siab ceev ua rau hnyav hnyav ntawm cov khoom siv
Nyuaj thiab txhim kho: Qhov ntom ntawm granite yog kwv yees li 2.6-3.0 g / cm³, thiab nws qhov hnyav yog 1.5-2 npaug ntawm cov cam khwb cia hlau hauv tib lub ntim. Piv txwv li, qhov hnyav ntawm lub hauv paus granite rau lub tshuab photolithography tuaj yeem ncav cuag 5 mus rau 10 tons, xav tau cov cuab yeej nqa siab thiab cov ntaub ntawv pov thawj poob siab, uas ua rau tus nqi ntawm lub Hoobkas kev tsim kho thiab kev xa khoom.
Dynamic teb lag: Siab inertia txwv qhov nrawm ntawm kev txav ntawm cov khoom siv (xws li wafer hloov neeg hlau). Nyob rau hauv cov xwm txheej uas yuav tsum tau pib sai thiab nres (xws li cov cuab yeej tshuaj ntsuam xyuas kev kub ceev), nws yuav cuam tshuam rau kev tsim khoom thiab txo kev ua haujlwm.
Thib peb, tus nqi kho thiab iteration yog siab heev
Kev kho tsis zoo yog qhov nyuaj rau kev kho: Yog tias qhov chaw hnav lossis kev sib tsoo puas tsuaj tshwm sim thaum siv, nws yuav tsum tau rov qab mus rau lub Hoobkas kho los ntawm kev sib tsoo cov cuab yeej, uas tsis tuaj yeem ua haujlwm sai ntawm qhov chaw. Hauv qhov sib piv, cov khoom siv hlau tuaj yeem kho tam sim ntawd los ntawm txoj hauv kev xws li qhov chaw vuam thiab laser cladding, ua rau lub sijhawm luv luv.
Lub voj voog tsim iteration yog ntev: Qhov sib txawv ntawm cov hlab ntsha hauv ntuj tuaj yeem ua rau muaj kev hloov pauv me ntsis ntawm cov khoom siv (xws li thermal expansion coefficient thiab damping ratio) ntawm cov khoom sib txawv. Yog tias cov cuab yeej tsim qauv hloov pauv, cov khoom siv yuav tsum tau rov ua dua, thiab kev tshawb nrhiav thiab kev tsim kho lub voj voog yog qhov ntev.
Iv. Txwv tsis pub muaj peev xwm thiab Environmental Challenges
Lub pob zeb ntuj tsis yog rov ua dua tshiab: Cov granite zoo (xws li "Jinan Green" thiab "Sesame Black" siv hauv cov khoom siv hluav taws xob) tso siab rau cov leeg tshwj xeeb, muaj kev txwv tshwj xeeb thiab nws cov mining raug txwv los ntawm kev tiv thaiv ib puag ncig. Nrog rau kev nthuav dav ntawm kev lag luam semiconductor, tej zaum yuav muaj kev pheej hmoo ntawm cov khoom siv raw khoom tsis ruaj khov.
Cov teeb meem kev ua qias tuaj: Thaum lub sij hawm txiav thiab sib tsoo, ntau cov hmoov av granite (muaj silicon dioxide) yog tsim. Yog tias tsis kho kom raug, nws yuav ua rau silicosis. Tsis tas li ntawd, cov dej khib nyiab yuav tsum tau kho los ntawm sedimentation ua ntej tso tawm, nce kev tiv thaiv ib puag ncig.
Tsib. Tsis txaus compatibility nrog cov txheej txheem tshwm sim
Kev txwv ib puag ncig lub tshuab nqus tsev: Qee cov txheej txheem semiconductor (xws li lub tshuab nqus tsev thiab cov hluav taws xob hluav taws xob lithography) yuav tsum tswj xyuas lub tshuab nqus tsev siab hauv cov khoom siv. Txawm li cas los xij, micro-pores ntawm qhov chaw ntawm granite yuav adsorb roj molecules, uas maj mam tso tawm thiab cuam tshuam rau kev ruaj ntseg ntawm lub tshuab nqus tsev kawm ntawv. Yog li ntawd, kev kho deg densification ntxiv (xws li resin impregnation) yog qhov tsim nyog.
Electromagnetic compatibility teeb meem: Granite yog cov khoom siv insulating. Nyob rau hauv cov xwm txheej uas yuav tsum tau muaj hluav taws xob zoo li qub los yog hluav taws xob tiv thaiv hluav taws xob (xws li wafer electrostatic adsorption platforms), hlau coatings lossis cov yeeb yaj kiab conductive yuav tsum tau muab sib xyaw ua ke, ua kom cov txheej txheem nyuaj thiab nqi.
Kev lag luam teb lub tswv yim
Txawm hais tias cov lus hais saum toj no tsis txaus, kev lag luam semiconductor tau ua ib feem rau qhov tsis txaus ntawm granite los ntawm kev tsim kho thev naus laus zis:

Composite qauv tsim: Nws txais kev sib xyaw ua ke ntawm "granite puag + hlau thav duab", coj mus rau hauv tus account ob qho tib si rigidity thiab lub teeb yuag (piv txwv li, ib lub tshuab photolithography chaw tsim tshuaj paus embeds aluminium alloy honeycomb qauv hauv granite puag, txo qhov hnyav los ntawm 40%).
Lwm cov khoom siv hluavtaws: Tsim cov ceramic matrix composites (xws li silicon carbide ceramics) thiab epoxy resin-raws li cov pob zeb dag kom simulate thermal stability thiab kev co tsis kam ntawm granite, thaum txhim kho kev ua haujlwm yooj yim.
Intelligent processing thev naus laus zis: Los ntawm kev qhia AI algorithms los txhim kho txoj hauv kev ua haujlwm, kev nyuaj siab simulation los kwv yees qhov kev pheej hmoo tawg, thiab sib txuas cov kev tshawb nrhiav hauv online los kho qhov tsis sib xws hauv lub sijhawm, kev ua cov khoom seem tau raug txo los ntawm 5% mus rau qis dua 1%.
Cov ntsiab lus
Qhov tsis txaus ntawm granite hauv kev lag luam semiconductor tseem ceeb yog los ntawm kev ua si ntawm nws cov khoom siv ntuj tsim thiab kev xav tau ntawm kev lag luam. Nrog rau kev nce qib ntawm kev siv thev naus laus zis thiab kev txhim kho cov khoom siv lwm yam, nws cov ntawv thov scenarios yuav maj mam poob mus rau "irreplaceable core reference components" (xws li hydrostatic guide rails for photolithography machines and ultra-precision measurement platforms), thaum maj mam muab txoj hauv kev rau cov khoom siv hluav taws xob hloov tau yooj yim dua hauv cov khoom siv tsis tseem ceeb. Nyob rau hauv lub neej yav tom ntej, yuav ua li cas sib npaug ntawm kev ua tau zoo, tus nqi thiab kev ruaj ntseg yuav yog ib qho kev kawm uas kev lag luam txuas ntxiv mus tshawb nrhiav.

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Post lub sij hawm: May-24-2025