Dab tsi yog lwm cov ntaub ntawv rau granite qhov hauv cov khoom siv semiconductor?Dab tsi yog qhov zoo thiab qhov tsis zoo ntawm cov khoom siv no piv rau granite?

Granite yog cov khoom siv feem ntau hauv kev lag luam semiconductor rau nws cov khoom siv zoo heev, thermal stability, thiab qis coefficient ntawm thermal expansion.Txawm li cas los xij, nrog kev xav tau ntau dua rau kev ua tau zoo dua thiab kev tsim khoom, lwm cov ntaub ntawv tau tshwm sim los ua cov kev xaiv siv tau rau kev tsim cov khoom siv semiconductor.Hauv tsab xov xwm no, peb yuav tshawb txog qee cov khoom siv rau cov khoom siv granite hauv cov khoom siv semiconductor thiab sib piv lawv qhov zoo thiab qhov tsis zoo.

Lwm cov khoom siv rau Granite Parts

1. Cov khoom siv iav-ceramic

Cov ntaub ntawv iav-ceramic, xws li Zerodur thiab Cervit, tau txais kev siv dav hauv kev lag luam semiconductor vim lawv cov thermal expansion coefficient tsawg, uas yog ze rau ntawm silicon.Yog li ntawd, cov ntaub ntawv no tuaj yeem muab cov thermal stability zoo dua thiab txhim khu kev qha hauv cov txheej txheem semiconductor fabrication.Zerodur, tshwj xeeb, muaj qib siab ntawm homogeneity thiab ruaj khov, ua rau nws tsim nyog rau kev tsim cov khoom siv lithography.

Qhov zoo:

- Tsawg coefficient ntawm thermal expansion
- High precision thiab stability
- Haum rau cov ntawv thov kub

Qhov tsis zoo:

- Tus nqi siab dua piv rau granite
-Txawm li cas los xij, tuaj yeem tsim teeb meem hauv machining thiab tuav

2. Ceramics

Cov ntaub ntawv ceramic, xws li txhuas oxide (Al2O3), silicon carbide (SiC), thiab silicon nitride (Si3N4), muaj cov khoom siv zoo heev, kub-resistant, thiab thermal expansion coefficient.Cov khoom no ua rau cov khoom siv ceramics zoo tagnrho rau cov khoom siv semiconductor uas xav tau cov thermal stability thiab precision, xws li wafer theem thiab chucks.

Qhov zoo:

- Siab thermal stability thiab lub zog
- Tsawg thermal expansion coefficient
- High hnav tsis kam thiab tshuaj inertness

Qhov tsis zoo:

- Nws tuaj yeem nkig thiab ua rau tawg, tshwj xeeb tshaj yog thaum machining thiab tuav
- Machining thiab polishing ntawm ceramics tuaj yeem nyuaj thiab siv sijhawm

3. Hlau

Cov khoom siv hlau, xws li cov hlau tsis muaj steel thiab titanium, tau siv rau qee yam khoom siv semiconductor vim lawv cov machinability zoo thiab lub zog siab.Lawv feem ntau siv rau hauv cov ntawv thov uas tsis tas yuav tsum muaj thermal stability, xws li chamber qhov chaw, couplings, thiab feedthroughs.

Qhov zoo:

- Zoo machinability thiab weldability
- Siab zog thiab ductility
- Tus nqi qis dua piv rau qee yam khoom siv

Qhov tsis zoo:

- High thermal expansion coefficient
- Tsis haum rau kev siv kub kub vim muaj teeb meem thermal expansion
- Yooj yim rau corrosion thiab paug

Xaus:

Hauv cov ntsiab lus, thaum granite tau yog ib qho kev xaiv nrov rau cov khoom siv semiconductor, lwm cov ntaub ntawv tau tshwm sim, txhua tus muaj qhov zoo thiab qhov tsis zoo.Cov ntaub ntawv iav-ceramic yog qhov tseeb thiab ruaj khov tab sis tuaj yeem ua rau tawg.Ceramics muaj zog thiab muaj kev ruaj ntseg zoo heev tab sis kuj tuaj yeem ua nkig, ua rau lawv nyuaj rau kev tsim khoom.Hlau yog pheej yig, machinable, thiab ductile, tab sis lawv muaj ntau dua coefficient ntawm thermal expansion thiab muaj kev cuam tshuam rau corrosion thiab paug.Thaum xaiv cov khoom siv rau cov khoom siv semiconductor, nws yog ib qho tseem ceeb uas yuav tau xav txog cov kev cai tshwj xeeb ntawm daim ntawv thov thiab xaiv cov khoom sib npaug ntawm tus nqi, kev ua tau zoo, thiab kev ntseeg siab.