cov
Hauv kev tsim khoom ntawm semiconductor, qhov tseeb ntawm cov khoom siv tshuaj xyuas wafer ncaj qha txiav txim siab qhov zoo thiab cov txiaj ntsig ntawm cov chips. Raws li lub hauv paus txhawb nqa cov ntsiab lus tshawb pom, qhov kev ruaj ntseg ntawm cov khoom siv hauv paus ua lub luag haujlwm tseem ceeb hauv kev ua haujlwm ntev ntawm cov khoom siv. Granite thiab cam khwb cia hlau yog ob feem ntau siv cov ntaub ntawv siv rau cov khoom siv tshuaj xyuas wafer. Ib txoj kev tshawb fawb sib piv 10 xyoo tau qhia txog qhov sib txawv tseem ceeb ntawm lawv nyob rau hauv cov nqe lus ntawm qhov ruaj khov, muab cov ntaub ntawv tseem ceeb rau kev xaiv cov khoom siv. cov
Kev sim keeb kwm yav dhau thiab tsim qauv
Cov txheej txheem tsim khoom ntawm semiconductor wafers muaj qhov xav tau siab heev rau kev tshawb pom qhov tseeb. Txawm tias micrometer-theem qhov sib txawv ntawm qhov sib txawv tuaj yeem ua rau poob qis hauv kev ua haujlwm nti lossis txawm tias khawb. Txhawm rau tshawb xyuas qhov ruaj khov ntawm granite thiab cam khwb cia hlau thaum siv mus ntev, pab pawg tshawb fawb tau tsim cov kev sim uas simulated qhov chaw ua haujlwm tiag tiag. Granite thiab cam khwb cia hlau cov qauv ntawm tib lub ntsiab lus raug xaiv thiab muab tso rau hauv ib puag ncig chamber qhov kub ntawm 15 ℃ to 35 ℃ thiab cov av noo hloov ntawm 30% mus rau 70% RH. Lub tshuab kev co thaum lub sijhawm ua haujlwm ntawm cov cuab yeej siv tau simulated los ntawm lub rooj vibration. Qhov loj me ntawm cov qauv ntsuas tau ntsuas txhua lub hlis twg uas siv lub laser interferometer siab, thiab cov ntaub ntawv tau sau tseg tsis tu ncua rau 10 xyoo. cov
Cov txiaj ntsig kev sim: Qhov txiaj ntsig zoo ntawm granite
Kaum xyoo ntawm kev sim cov ntaub ntawv qhia tau hais tias cov granite substrate ua rau muaj kev ruaj ntseg zoo. Nws coefficient ntawm thermal expansion yog tsawg heev, nruab nrab tsuas yog 4.6 × 10⁻⁶ / ℃. Nyob rau hauv qhov kub hloov pauv, qhov sib txawv ntawm qhov sib txawv yog ib txwm tswj tsis pub dhau ± 0.001mm. Nyob rau hauv lub ntsej muag ntawm cov av noo hloov, cov qauv ntom ntom ntawm granite ua rau nws yuav luag tsis cuam tshuam, thiab tsis muaj qhov ntsuas qhov ntsuas qhov hloov pauv tshwm sim. Nyob rau hauv ib puag ncig kev co, qhov zoo heev damping yam ntxwv ntawm granite zoo nqus kev co zog, thiab qhov sib txawv ntawm qhov loj me me heev. cov
Nyob rau hauv sib piv, rau cov cam khwb cia hlau substrate, nws nruab nrab coefficient ntawm thermal expansion nce mus txog 11 × 10⁻⁶ / ℃ - 13 × 10⁻⁶ / ℃, thiab qhov siab tshaj plaws seem sib txawv tshwm sim los ntawm kub hloov nyob rau hauv 10 xyoo yog ± 0.05mm. Nyob rau hauv ib puag ncig humid, cam khwb cia hlau yog nquag xeb thiab corrosion. Qee cov qauv qhia qhov deformation hauv zos, thiab qhov sib txawv ntawm qhov sib txawv ntxiv ntxiv. Nyob rau hauv qhov kev txiav txim ntawm cov neeg kho tshuab kev co, cam khwb cia hlau tsis zoo vibration damping kev ua tau zoo thiab nws loj fluctuates nquag, ua rau nws nyuaj rau ua tau raws li high-precision yuav tsum tau ntawm wafer soj ntsuam. cov
Qhov laj thawj tseem ceeb rau qhov sib txawv ntawm kev ruaj ntseg
Granite tau tsim ntau pua lab xyoo dhau los ntawm cov txheej txheem geological. Nws cov qauv sab hauv yog tuab thiab tsis sib xws, thiab cov pob zeb hauv av tau ruaj khov, tshem tawm cov kev ntxhov siab sab hauv los ntawm qhov xwm txheej. Qhov no ua rau nws tsis tshua muaj siab rau kev hloov pauv ntawm lwm yam xws li kub, av noo thiab kev co. Cam khwb cia hlau yog tsim los ntawm cov txheej txheem casting thiab muaj qhov tsis xws luag xws li cov pores thiab xuab zeb qhov hauv. Lub caij no, qhov seem kev ntxhov siab tsim tawm thaum lub sij hawm casting txheej txheem yog qhov ua rau muaj qhov hloov pauv nyob rau hauv qhov stimulation ntawm ib puag ncig sab nraud. Cov khoom siv hlau ntawm cam khwb cia hlau ua rau nws yooj yim rau xeb vim av noo, ua kom cov txheej txheem puas thiab txo qhov seem stability. cov
Qhov cuam tshuam rau cov khoom siv tshuaj xyuas wafer
Wafer soj ntsuam cov cuab yeej raws li granite substrate, nrog nws qhov ruaj khov qhov kev ua tau zoo, tuaj yeem ua kom ntseeg tau tias qhov kev tshuaj ntsuam xyuas muaj qhov ua tau zoo rau lub sijhawm ntev, txo qis kev txiav txim siab thiab tsis pom qhov tshwm sim los ntawm cov cuab yeej raug drift, thiab txhim kho cov khoom lag luam. Lub caij no, qhov kev saib xyuas tsawg tsawg yuav txo tau tag nrho lub neej voj voog tus nqi ntawm cov khoom siv. Cov cuab yeej siv cam khwb cia hlau substrates, vim qhov tsis zoo ntawm qhov ruaj khov, yuav tsum tau calibration thiab tu. Qhov no tsis tsuas yog nce nqi kev khiav hauj lwm tab sis kuj yuav cuam tshuam qhov zoo ntawm cov khoom siv hluav taws xob vim qhov tsis txaus, ua rau muaj peev xwm poob nyiaj txiag. cov
Raws li tus qauv ntawm kev lag luam semiconductor txoj kev nrhiav kev ua haujlwm siab dua thiab zoo dua, xaiv granite ua cov khoom siv hauv kev tshuaj xyuas cov khoom siv wafer yog undoubtedly ib tug ntse txav los xyuas kom meej cov cuab yeej ua tau zoo thiab txhim khu kev sib tw ntawm cov lag luam. cov
Post lub sij hawm: May-14-2025