Cov teeb meem ntawm cov khoom granite rau cov khoom tsim khoom semiconductor

Cov khoom siv granite tau siv dav hauv cov txheej txheem tsim khoom semiconductor vim lawv cov yam ntxwv zoo heev xws li qhov tiav zoo dua, qhov ruaj khov siab, thiab kev co zoo heev. Cov khoom siv granite yog qhov tseem ceeb rau cov khoom siv semiconductor, suav nrog cov tshuab lithography, cov tshuab polishing, thiab cov tshuab metrology vim lawv muab qhov chaw raug thiab ruaj khov thaum lub sijhawm tsim khoom. Txawm hais tias muaj txhua qhov zoo ntawm kev siv cov khoom siv granite, lawv kuj muaj qhov tsis zoo. Hauv tsab xov xwm no, peb yuav tham txog qhov tsis zoo ntawm cov khoom siv granite rau cov khoom siv semiconductor.

Ua ntej, cov khoom granite muaj cov coefficient thermal expansion siab. Nws txhais tau tias lawv nthuav dav heev nyob rau hauv kev ntxhov siab thermal, uas tuaj yeem ua rau muaj teeb meem thaum lub sijhawm tsim khoom. Cov txheej txheem tsim khoom semiconductor xav tau qhov tseeb siab thiab qhov tseeb ntawm qhov ntev uas tuaj yeem raug cuam tshuam vim yog kev ntxhov siab thermal. Piv txwv li, silicon wafer deformation vim yog thermal expansion tuaj yeem ua rau muaj teeb meem sib phim thaum lub sijhawm lithography, uas tuaj yeem ua rau qhov zoo ntawm lub cuab yeej semiconductor tsis zoo.

Qhov thib ob, cov khoom granite muaj qhov tsis zoo uas yuav ua rau muaj qhov xau hauv lub tshuab nqus tsev hauv cov txheej txheem tsim khoom semiconductor. Qhov muaj cua lossis lwm yam roj hauv lub kaw lus yuav ua rau muaj kuab paug rau ntawm qhov chaw ntawm lub wafer, ua rau muaj qhov tsis zoo uas yuav cuam tshuam rau kev ua haujlwm ntawm lub cuab yeej semiconductor. Cov roj inert xws li argon thiab helium tuaj yeem nkag mus rau hauv cov khoom granite uas muaj qhov porous thiab tsim cov pa roj uas tuaj yeem cuam tshuam rau kev ua haujlwm ntawm lub tshuab nqus tsev.

Qhov thib peb, cov khoom granite muaj cov kab me me uas yuav cuam tshuam rau qhov tseeb ntawm cov txheej txheem tsim khoom. Granite yog cov khoom siv tawg yooj yim uas tuaj yeem tsim cov kab me me dhau sijhawm, tshwj xeeb tshaj yog thaum raug rau cov voj voog kev ntxhov siab tas li. Qhov muaj cov kab me me tuaj yeem ua rau tsis ruaj khov ntawm qhov ntev, ua rau muaj teeb meem loj thaum lub sijhawm tsim khoom, xws li kev sib dhos lithography lossis kev txhuam wafer.

Qhov thib plaub, cov khoom granite muaj kev ywj pheej tsawg. Cov txheej txheem tsim khoom semiconductor xav tau cov khoom siv ywj pheej uas tuaj yeem hloov pauv ntau yam txheej txheem. Txawm li cas los xij, cov khoom granite yog cov khoom ruaj khov thiab tsis tuaj yeem hloov kho rau ntau yam txheej txheem hloov pauv. Yog li ntawd, txhua qhov kev hloov pauv hauv cov txheej txheem tsim khoom yuav tsum tau tshem tawm lossis hloov cov khoom granite, ua rau lub sijhawm tsis ua haujlwm thiab cuam tshuam rau kev tsim khoom.

Qhov thib tsib, cov khoom granite xav tau kev tuav thiab kev thauj mus los tshwj xeeb vim lawv qhov hnyav thiab tsis yooj yim tawg. Granite yog cov khoom siv ntom thiab hnyav uas xav tau cov khoom siv tshwj xeeb xws li cranes thiab lifters. Tsis tas li ntawd, cov khoom granite xav tau kev ntim khoom thiab kev thauj mus los kom zoo kom tiv thaiv kev puas tsuaj thaum lub sijhawm xa khoom, ua rau muaj nqi ntxiv thiab sijhawm.

Xaus lus, cov khoom granite muaj qee qhov tsis zoo uas yuav cuam tshuam rau qhov zoo thiab kev tsim khoom ntawm cov khoom siv semiconductor. Cov qhov tsis zoo no tuaj yeem txo qis los ntawm kev tuav thiab saib xyuas cov khoom granite, suav nrog kev tshuaj xyuas tsis tu ncua rau cov microfractures thiab porosity defects, kev ntxuav kom huv si kom tiv thaiv kev ua qias tuaj, thiab kev tuav zoo thaum thauj mus los. Txawm hais tias muaj qhov tsis zoo, cov khoom granite tseem yog ib feem tseem ceeb ntawm cov txheej txheem tsim khoom semiconductor vim lawv qhov tiav zoo dua, kev ruaj khov siab, thiab kev co zoo heev.