Granite yog dav siv nyob rau hauv semiconductor manufacturing txheej txheem raws li cov khoom rau precision Cheebtsam vim nws zoo heev mechanical stability, siab thermal stability, thiab tsawg thermal expansion coefficient.Txawm li cas los xij, kev sib sau ua ke ntawm granite Cheebtsam yog txheej txheem nyuaj uas yuav tsum tau muaj qib siab ntawm qhov tseeb thiab raug.Hauv tsab xov xwm no, peb yuav tham txog qee qhov tsis xws luag uas yuav tshwm sim thaum lub sij hawm sib dhos ntawm cov khoom siv granite hauv kev tsim khoom semiconductor thiab yuav ua li cas zam lawv.
1. Kev tsis ncaj ncees
Misalignment yog ib qho ntawm feem ntau tsis xws luag uas yuav tshwm sim thaum lub sij hawm sib dhos ntawm granite Cheebtsam.Nws tshwm sim thaum ob lossis ntau lub ntsiab lus tsis sib haum nrog kev hwm rau ib leeg.Misalignment tuaj yeem ua rau cov khoom coj ua tsis zoo thiab tuaj yeem ua rau kev ua haujlwm tsis zoo ntawm cov khoom kawg.
Yuav kom tsis txhob muaj misalignment, nws yog ib qho tseem ceeb kom ntseeg tau tias tag nrho cov khoom sib xyaw ua ke kom raug thaum lub sij hawm sib dhos.Qhov no tuaj yeem ua tiav los ntawm kev siv cov cuab yeej sib dhos precision thiab cov txheej txheem.Tsis tas li ntawd, nws yog ib qho tseem ceeb los xyuas kom meej tias cov khoom raug ntxuav kom zoo kom tshem tawm cov khib nyiab lossis cov kab mob uas tuaj yeem cuam tshuam rau kev sib raug zoo.
2. Qhov chaw tsis zoo
Surface imperfections yog lwm yam tsis xws luag uas tuaj yeem tshwm sim thaum lub sij hawm sib dhos ntawm granite Cheebtsam.Cov kev tsis zoo no tuaj yeem suav nrog khawb, qhov pits, thiab lwm yam tsis zoo ntawm qhov chaw uas tuaj yeem cuam tshuam kev ua haujlwm ntawm cov khoom kawg.Deg imperfections kuj tuaj yeem tshwm sim los ntawm kev tuav tsis raug lossis kev puas tsuaj thaum lub sijhawm tsim khoom.
Txhawm rau kom tsis txhob muaj qhov tsis zoo ntawm qhov chaw, nws yog ib qho tseem ceeb uas yuav tsum tau ua tib zoo saib xyuas cov khoom kom zoo thiab siv cov txheej txheem ntxuav kom zoo kom tshem tawm cov khib nyiab lossis cov kab mob uas tuaj yeem khawb lossis puas tsuaj rau saum npoo.Tsis tas li ntawd, nws yog ib qho tseem ceeb uas yuav tsum tau siv cov cuab yeej tsim nyog thiab cov txheej txheem los siv lub tshuab thiab polishing nto ntawm granite Cheebtsam kom ntseeg tau tias lawv tsis muaj qhov tsis zoo ntawm qhov chaw.
3. Thermal Expansion Mismatch
Thermal expansion mismatch yog lwm qhov tsis xws luag uas tuaj yeem tshwm sim thaum lub sij hawm sib dhos ntawm granite Cheebtsam.Qhov no tshwm sim thaum cov khoom sib txawv muaj qhov sib txawv thermal expansion coefficients, ua rau muaj kev ntxhov siab thiab deformation thaum cov khoom raug hloov pauv kub.Thermal expansion mismatch tuaj yeem ua rau cov khoom ua tsis tiav ntxov thiab tuaj yeem ua rau kev ua haujlwm tsis zoo ntawm cov khoom kawg.
Txhawm rau kom tsis txhob thermal expansion mismatch, nws yog ib qho tseem ceeb uas yuav tau xaiv cov khoom uas muaj cov thermal expansion coefficient zoo sib xws.Tsis tas li ntawd, nws yog ib qho tseem ceeb los tswj qhov kub thiab txias thaum lub sij hawm sib dhos ua ke kom txo qis kev ntxhov siab thiab deformation hauv cov khoom.
4. Kev tawg
Kev tawg yog ib qho teeb meem loj uas tuaj yeem tshwm sim thaum lub sij hawm sib dhos ntawm cov khoom siv granite.Kev tawg tuaj yeem tshwm sim vim kev tuav tsis raug, kev puas tsuaj thaum lub sijhawm tsim khoom, lossis kev ntxhov siab thiab deformation los ntawm thermal expansion mismatch.Kev tawg tuaj yeem cuam tshuam qhov kev ua tau zoo ntawm cov khoom kawg thiab tuaj yeem ua rau muaj kev puas tsuaj loj ntawm cov khoom siv.
Txhawm rau kom tsis txhob tawg, nws yog ib qho tseem ceeb uas yuav tsum tau ua tib zoo saib xyuas cov khoom kom zoo thiab tsis txhob muaj kev cuam tshuam lossis kev poob siab uas yuav ua rau muaj kev puas tsuaj.Tsis tas li ntawd, nws yog ib qho tseem ceeb uas yuav tsum tau siv cov cuab yeej tsim nyog thiab cov txheej txheem los siv lub tshuab thiab polish qhov chaw ntawm cov khoom kom tsis txhob muaj kev ntxhov siab thiab deformation.
Hauv kev xaus, kev sib sau ua tiav ntawm granite Cheebtsam rau kev tsim khoom semiconductor yuav tsum tau ua tib zoo saib xyuas kom meej thiab qib siab ntawm qhov tseeb thiab raug.Los ntawm kev zam qhov tsis xws luag xws li misalignment, deg imperfections, thermal expansion mismatch, thiab cracking, tuam txhab uas muag tuaj yeem xyuas kom meej tias lawv cov khoom ua tau raws li cov qauv zoo tshaj plaws thiab kev ntseeg siab.
Post lub sij hawm: Dec-06-2023