Qhov zoo ntawm kev xaiv granite puag rau semiconductor wafer kuaj lub rooj.

cov
Hauv kev lag luam semiconductor, kev tshuaj xyuas wafer yog qhov txuas tseem ceeb los xyuas kom meej qhov zoo thiab kev ua haujlwm ntawm cov nti, thiab qhov tseeb thiab kev ruaj ntseg ntawm lub rooj tshuaj ntsuam xyuas ua lub luag haujlwm txiav txim siab hauv kev tshawb pom. Granite puag nrog nws cov yam ntxwv tshwj xeeb, dhau los ua qhov kev xaiv zoo tshaj plaws rau cov lus tshuaj xyuas semiconductor wafer, cov hauv qab no los ntawm ntau qhov kev tshuaj ntsuam rau koj. cov

Ua ntej, qhov precision guarantee dimension
1. Ultra-siab flatness thiab straightness: lub hauv paus granite yog ua los ntawm advanced processing technology, thiab cov flatness tuaj yeem ncav cuag ± 0.001mm / m lossis qhov tseeb dua, thiab qhov ncaj kuj zoo heev. Nyob rau hauv cov txheej txheem tshuaj xyuas wafer, lub dav hlau high-precision muab kev txhawb nqa ruaj khov rau lub wafer thiab ua kom muaj kev sib cuag ntawm qhov kev sojntsuam ntawm cov khoom siv tshuaj xyuas thiab cov pob qij txha ntawm lub wafer nto. cov
2. Tsis tshua muaj coefficient ntawm thermal expansion: semiconductor manufacturing yog rhiab heev rau kub hloov, thiab cov coefficient ntawm thermal expansion ntawm granite yog tsawg heev, feem ntau yog hais txog 5 × 10⁻⁶ / ℃. Thaum lub platform nrhiav tau khiav, txawm tias qhov kub thiab txias hloov pauv, qhov loj ntawm granite puag hloov me ntsis. Piv txwv li, nyob rau hauv lub high-temperature rhiav nyob rau hauv lub caij ntuj sov, qhov kub thiab txias ntawm lub hom hlau puag nrhiav kom tau platform yuav ua rau tus txheeb ze txoj hauj lwm ntawm lub wafer thiab cov cuab yeej nrhiav kom tau hloov, cuam tshuam rau kev tshawb nrhiav qhov tseeb; Lub granite puag nrhiav kom tau lub platform tuaj yeem tswj kev ruaj ntseg, xyuas kom meej qhov tseeb ntawm wafer thiab cov cuab yeej tshawb nrhiav thaum lub sijhawm tshawb nrhiav, thiab muab qhov chaw ruaj khov rau kev kuaj xyuas qhov tseeb. cov
Thib ob, stability dimension
1. Cov qauv ruaj khov thiab kev vibration tsis kam: Granite tom qab ntau lab xyoo ntawm cov txheej txheem geological, cov qauv sab hauv yog tuab thiab zoo ib yam. Nyob rau hauv ib puag ncig nyuaj ntawm lub Hoobkas semiconductor, kev co tsim los ntawm kev ua haujlwm ntawm cov khoom siv peripheral thiab cov neeg ua haujlwm taug kev ncig yog zoo attenuated los ntawm granite puag. cov
2. Kev siv lub sij hawm ntev: piv nrog lwm cov ntaub ntawv, granite muaj hardness siab, muaj zog hnav tsis kam, thiab Mohs hardness tuaj yeem ncav cuag 6-7. Lub hauv paus granite nto tsis yooj yim hnav thaum lub sij hawm nquag wafer loading, unloading thiab tshuaj xyuas kev ua haujlwm. Raws li kev siv cov ntaub ntawv txheeb cais tiag tiag, kev siv cov granite hauv paus ntsuas lub rooj, kev ua haujlwm tas mus li tom qab 5000 teev, flatness thiab straightness raug tseem tuaj yeem khaws cia ntawm ntau tshaj 98% ntawm qhov tseeb thawj, txo cov khoom siv vim hnav ntawm lub hauv paus tshwm sim los ntawm kev ua haujlwm tsis tu ncua thiab kev saib xyuas lub sij hawm, txo cov nqi khiav lag luam, los xyuas kom meej lub sijhawm ntev ntawm kev ua haujlwm. cov

Thib peb, huv si thiab tiv thaiv kev cuam tshuam qhov ntev
1. Tsawg plua plav tiam: qhov chaw tsim khoom semiconductor yuav tsum tau huv heev, thiab cov khoom siv granite nws tus kheej ruaj khov thiab tsis yooj yim los tsim cov hmoov av. Thaum lub sijhawm ua haujlwm ntawm lub platform xeem, cov plua plav uas tsim los ntawm lub hauv paus yog zam kom tsis txhob ua paug rau lub wafer, thiab qhov kev pheej hmoo ntawm luv luv Circuit Court thiab qhib Circuit Court tshwm sim los ntawm cov hmoov av yog txo. Nyob rau hauv qhov chaw soj ntsuam wafer ntawm lub rooj cob qhia tsis muaj plua plav, cov plua plav concentration nyob ib ncig ntawm lub rooj tshuaj xyuas granite yog ib txwm tswj mus rau qib qis, ua tau raws li cov kev cai huv huv ntawm kev lag luam semiconductor. cov
2. Tsis muaj kev cuam tshuam sib nqus: cov cuab yeej kuaj pom muaj qhov cuam tshuam rau qhov chaw electromagnetic, thiab granite yog cov khoom siv tsis sib nqus, uas yuav tsis cuam tshuam rau cov teeb liab hluav taws xob ntawm cov khoom siv tshawb nrhiav. Hauv kev siv cov khoom siv hluav taws xob tshawb pom thiab lwm yam kev sim thev naus laus zis uas yuav tsum tau muaj qhov chaw electromagnetic tsis tshua muaj siab, lub hauv paus granite ua kom ruaj khov ntawm cov teeb liab hluav taws xob ntawm cov cuab yeej tshawb nrhiav thiab ua kom qhov tseeb ntawm cov txiaj ntsig kev xeem. Piv txwv li, thaum lub wafer raug kuaj rau high-precision hluav taws xob kev ua tau zoo, lub hauv paus uas tsis yog-magnetic granite tsis cuam tshuam nrog kev kuaj pom tam sim no thiab voltage, kom cov ntaub ntawv tshawb pom tiag tiag cuam tshuam cov yam ntxwv hluav taws xob wafer.