Hauv kev tsim khoom siv precision thiab kev tshawb fawb siab heev, kev xaiv lub hauv paus ntawm precision static pressure air floating platform yog qhov tseem ceeb los txiav txim siab nws qhov kev ua tau zoo. Granite precision base thiab ceramic base muaj lawv tus kheej cov yam ntxwv, qhia txog ntau yam zoo thiab cov yam ntxwv hauv kev ruaj khov, kev saib xyuas qhov tseeb, kev ruaj khov thiab lwm yam.
Kev Ruaj Ntseg: Cov qauv ntuj piv rau cov khoom siv hluavtaws
Tom qab kev hloov pauv geological ntev, granite yog sib xyaw ua ke los ntawm quartz, feldspar thiab lwm yam minerals, tsim cov qauv ntom thiab sib xws. Thaum muaj kev cuam tshuam los ntawm kev co sab nraud, xws li kev co muaj zog los ntawm kev ua haujlwm ntawm cov khoom siv loj hauv lub Hoobkas ua haujlwm, lub hauv paus granite tuaj yeem thaiv thiab ua kom zoo, uas tuaj yeem txo qhov kev co ntawm lub platform siab zoo li qub los ntawm ntau dua 80%, muab lub hauv paus ua haujlwm ruaj khov rau lub platform kom ntseeg tau tias muaj kev txav mus los zoo hauv kev ua tiav siab lossis kev kuaj pom. Piv txwv li, hauv cov txheej txheem lithography ntawm kev tsim cov chip semiconductor, lub hauv paus granite ruaj khov tuaj yeem ua kom muaj kev ua haujlwm raug ntawm cov khoom siv lithography nti thiab ua tiav cov yam ntxwv siab ntawm cov qauv nti.
Lub hauv paus ceramic yog ua los ntawm kev tsim khoom cuav thiab thev naus laus zis siab heev, thiab nws cov qauv sab hauv kuj zoo ib yam thiab muaj cov yam ntxwv zoo ntawm kev co. Thaum cuam tshuam nrog kev co dav dav, nws tuaj yeem tsim kom muaj qhov chaw ua haujlwm ruaj khov rau lub platform siab ruaj khov. Txawm li cas los xij, thaum muaj lub zog siab thiab kev co tas mus li, nws lub peev xwm txo qis kev co yog me ntsis qis dua li ntawm lub hauv paus granite, thiab nws nyuaj rau txo qhov cuam tshuam kev co mus rau tib qib qis, uas yuav muaj qee qhov cuam tshuam rau kev txav mus los ntawm qhov tseeb ntawm lub platform.
Kev khaws cia qhov tseeb: kev nthuav dav tsawg ntawm cov txiaj ntsig ntuj thiab kev tswj hwm dag ntawm qhov tseeb
Granite paub txog nws cov coefficient qis heev ntawm thermal expansion, feem ntau ntawm 5-7 × 10⁻⁶ / ℃. Hauv qhov kub thiab txias hloov pauv, qhov loj ntawm lub granite precision base hloov me ntsis. Hauv thaj chaw ntawm astronomy, lub precision static pressure air float platform rau kev kho kom zoo ntawm lub lens telescope yog paired nrog lub granite base, txawm tias qhov sib txawv ntawm qhov kub thiab txias ntawm hnub thiab hmo ntuj yog qhov tseem ceeb, nws tuaj yeem ua kom ntseeg tau tias qhov tseeb ntawm lub lens yog khaws cia ntawm qib submicron, pab cov kws tshawb fawb txog hnub qub kom ntes tau cov dynamics me me ntawm cov cev ntuj ceeb tsheej nyob deb.
Cov ntaub ntawv ceramic zoo heev hauv kev ruaj khov thermal, thiab cov coefficient ntawm thermal expansion ntawm qee cov ceramics ua tau zoo tuaj yeem qis li ze li xoom thiab tuaj yeem tswj tau meej los ntawm kev tsim thiab txheej txheem. Hauv qee cov khoom siv ntsuas kub-sensitive high-precision, lub hauv paus ceramic tuaj yeem tswj tau qhov loj me ruaj khov thaum qhov kub hloov pauv, ua kom ntseeg tau tias qhov tseeb ntawm kev txav mus los ntawm lub platform precision static pressure air floating. Txawm li cas los xij, nws qhov kev ruaj khov mus sij hawm ntev hauv kev siv tswv yim raug cuam tshuam los ntawm cov yam xws li cov khoom laus thiab xav tau kev txheeb xyuas ntxiv.
Kev ruaj khov: Cov pob zeb ntuj tsim muaj zog thiab cov khoom siv hluavtaws uas tiv taus corrosion
Qhov nyuaj ntawm granite yog siab, Mohs hardness tuaj yeem ncav cuag 6-7, zoo hnav tsis kam. Hauv chav kuaj khoom siv, lub platform uas siv ntau zaus, nws lub hauv paus granite tuaj yeem tiv taus kev sib txhuam mus sij hawm ntev, piv rau lub hauv paus ib txwm, tuaj yeem ntev lub voj voog txij nkawm ntawm lub platform ntau dua 50%, txo cov nqi txij nkawm khoom siv, thiab xyuas kom meej tias kev tshawb fawb txuas ntxiv mus. Txawm li cas los xij, cov khoom siv granite yog qhov tsis ruaj khov, muaj kev pheej hmoo ntawm kev tawg thaum raug cuam tshuam tsis raug.
Lub hauv paus ceramic tsis yog tsuas yog tawv xwb, tab sis kuj muaj kev tiv thaiv corrosion zoo heev. Hauv cov chaw ua haujlwm uas muaj kev pheej hmoo ntawm kev xeb tshuaj lom neeg, xws li cov platforms hydrostatic cua flotation precision hauv cov khoom siv tshuaj xyuas cov khoom siv, cov hauv paus ceramic tiv taus cov pa roj lossis kua corrosive, tswj kev ncaj ncees ntawm qhov chaw thiab cov khoom siv kho tshuab ntev. Hauv qhov chaw ib puag ncig hnyav xws li cov av noo siab, kev ua haujlwm ruaj khov ntawm cov hauv paus ceramic zoo dua li cov hauv paus granite.
Tus nqi tsim khoom thiab qhov nyuaj ntawm kev ua: qhov kev sib tw khawb av ntawm cov pob zeb ntuj thiab qhov kev siv tshuab ntawm kev tsim khoom cuav
Kev khawb av thiab kev thauj mus los ntawm cov khoom siv granite yog qhov nyuaj heev, thiab kev ua cov khoom siv thiab thev naus laus zis siab heev. Vim nws qhov nyuaj siab, brittleness, txiav, sib tsoo, polishing thiab lwm yam txheej txheem yog qhov yooj yim tawg, tawg, thiab cov khoom seem ntau, ua rau cov nqi tsim khoom siab.
Kev tsim cov khoom siv ceramic siv cov thev naus laus zis siab heev thiab kev siv tshuab ua kom raug, txij li kev npaj cov khoom siv raw, molding mus rau sintering, txhua kauj ruam yuav tsum tau tswj hwm kom meej. Kev tshawb fawb thiab kev txhim kho thaum ntxov thiab kev nqis peev ntawm cov khoom siv yog qhov loj heev, qhov kev siv tshuab siab heev. Txawm li cas los xij, nrog kev nthuav dav ntawm qhov ntau lawm, tus nqi yuav raug txo qis, thiab nws muaj peev xwm tsim nyog rau cov ntawv thov siab.
Zuag qhia tag nrho, cov granite precision bases ua tau zoo hauv kev ruaj khov tag nrho thiab kev ruaj khov ib txwm muaj, thaum cov ceramic bases muaj qhov zoo tshwj xeeb hauv kev hloov pauv kub heev thiab kev ruaj khov corrosion. Kev xaiv lub base yuav tsum raws li qhov xwm txheej ntawm daim ntawv thov tshwj xeeb, cov xwm txheej ib puag ncig thiab cov nqi ntawm lub precision static pressure air float platform.
Lub sijhawm tshaj tawm: Plaub Hlis-10-2025