Hauv lub ntiaj teb loj heev ntawm kev tsim khoom raug thiab kev tshawb fawb txog kev tshawb fawb tshiab, txhua qhov kev tswj hwm meej ntawm qhov me me yuav ua rau muaj kev hloov pauv thev naus laus zis. Precision static pressure air floating movement platform, ua cov khoom siv tseem ceeb los ua kom tiav ultra-precision txav, nws qhov kev ua tau zoo ncaj qha txiav txim siab qhov ua tiav lossis tsis ua tiav ntawm cov txiaj ntsig. Lub hauv paus granite yog riam phom zais cia uas muab nws qhov tseeb tshwj xeeb thiab kev ruaj khov zoo heev.
Lub hauv paus ruaj khov ua los ntawm xwm
Granite, tom qab ntau lab xyoo ntawm kev hloov pauv geological, cov qauv sab hauv yog ntom thiab sib xws, los ntawm quartz, feldspar thiab lwm yam minerals ze sib txuas. Cov qauv tshwj xeeb no muab rau nws qhov ruaj khov tsis muaj qhov sib xws. Thaum ntsib kev cuam tshuam sab nraud, txawm tias nws yog qhov muaj zog co los ntawm kev ua haujlwm ntawm cov khoom siv loj hauv lub chaw ua haujlwm, lossis qhov hloov pauv loj hauv qhov kub thiab txias, granite puag tuaj yeem daws nws nrog kev thaj yeeb nyab xeeb. Nws cov yam ntxwv zoo heev ntawm kev co attenuation, zoo li lub tshuab nqus dej kev tshaj lij, tuaj yeem txo qhov kev co ntawm qhov tseeb static siab cua ntab txav platform los ntawm ntau dua 80%, muab ib puag ncig ntsiag to thiab ruaj khov rau lub platform kom ntseeg tau tias thaum lub sijhawm ua tiav siab lossis nrhiav pom, kev txav mus los yog du thiab tsis muaj kev ntxub ntxaug.
Thermal stability kom zoo dua, tswj qhov tseeb core
Kev hloov pauv kub yog qhov teeb meem loj uas cuam tshuam rau qhov tseeb ntawm cov khoom siv precision, tab sis lub hauv paus granite nrog cov coefficient qis heev ntawm thermal expansion, yooj yim daws qhov teeb meem no. Nws cov coefficient ntawm thermal expansion feem ntau yog 5-7 × 10⁻⁶ / ℃, thiab qhov hloov pauv loj yog tsawg heev thaum qhov kub hloov pauv. Hauv cov txheej txheem photolithography ntawm semiconductor chip manufacturing, qhov tseeb ntawm qhov chaw yuav tsum nyob ntawm qib danamil, thiab kev hloov pauv me me ntawm qhov kub thiab txias yuav ua rau muaj kev hloov pauv ntawm cov qauv chip. Lub platform txav mus los precision static pressure uas muaj lub hauv paus granite tuaj yeem tswj tau qhov tseeb ntawm qhov chaw ruaj khov hauv qab qhov kub thiab txias, pab tsim chip kom ua tiav kev koom ua ke thiab cov txiaj ntsig siab dua, thiab txhaj tshuaj muaj zog rau kev txhim kho kev lag luam semiconductor.
Kev kub siab, kev hnav tsis kam, kev lav phib xaub
Nyob rau hauv lub sijhawm ntev ntawm qhov tseeb static pressure air floating platform, txawm hais tias muaj cua floating txhawb nqa ntawm lub platform thiab lub hauv paus, kev sib txhuam ntau zaus tseem tsis zam. Granite hardness siab, Mohs hardness tuaj yeem ncav cuag 6-7, nrog kev tiv thaiv zoo heev. Hauv cov ntaub ntawv science laboratory, lub precision static pressure air floating txav platform feem ntau siv, nws lub hauv paus granite tuaj yeem tiv taus kev sib txhuam mus sij hawm ntev, piv rau lub hauv paus ib txwm muaj, tuaj yeem ntev lub voj voog txij nkawm ntawm lub platform ntau dua 50%, txo cov nqi txij nkawm khoom siv, kom ntseeg tau tias kev txhim kho zoo thiab txuas ntxiv ntawm kev tshawb fawb.
Qhov kev xaiv ntawm lub platform hydrostatic cua ntab uas muaj lub hauv paus granite yog xaiv qhov tseeb tshaj plaws, kev ruaj khov zoo heev thiab kev ua haujlwm ntev. Hauv kev tsim khoom semiconductor, kev tsim khoom siv kho qhov muag, kev tsav dav hlau, kev tshawb fawb thiab kev sim thiab lwm yam kev xav tau ntawm thaj chaw, nws ua lub luag haujlwm tseem ceeb uas tsis tuaj yeem hloov pauv tau, ua rau kev lag luam hla dhau qhov kev txwv ntawm qhov tseeb, mus rau theem kev txhim kho zoo dua, los muab kev txhawb nqa kev siv tshuab zoo thiab txhim khu kev qha rau koj txoj haujlwm ua tiav.
Lub sijhawm tshaj tawm: Plaub Hlis-09-2025