Nyob rau hauv pem hauv ntej ntawm kev tsim khoom raug thiab kev tshawb fawb tshawb fawb, txhua qhov yuam kev yuav dhau los ua "kev thaiv kev" uas tiv thaiv kev tawg. Raws li cov khoom siv tseem ceeb los ua kom tiav qhov kev tswj hwm kev txav mus los siab, kev ua tau zoo ntawm qhov tseeb static siab cua ntab txav platform yog ncaj qha cuam tshuam rau qhov zoo thiab kev vam meej ntawm cov txiaj ntsig. Ntawm ntau yam cuam tshuam, lub hauv paus granite, nrog nws cov yam ntxwv tsis sib xws, tau dhau los ua lub hauv paus tseem ceeb ntawm kev ua kom muaj kev ua tau zoo ntawm lub platform.
Granite, tom qab ntau lab xyoo ntawm kev hloov pauv geological tempered, cov qauv sab hauv yog ntom thiab sib xws, feem ntau yog los ntawm quartz, feldspar thiab lwm yam minerals ze intertwined. Cov qauv tsim ntuj tsim no muab cov granite puag ntau yam zoo heev.
Ruaj khov heev, cais tawm ntawm kev cuam tshuam sab nraud
Kev co hauv ib puag ncig sab nraud yog tus yeeb ncuab ntawm qhov tseeb rau qhov tseeb static pressure air floating platform. Kev co uas tsim los ntawm kev ua haujlwm ntawm cov tshuab loj thiab cov khoom siv hauv pem teb Hoobkas thiab cov tsheb nyob ib puag ncig yuav raug xa mus rau lub platform txav mus los ntawm hauv av. Txawm li cas los xij, lub hauv paus granite zoo li lub "av qeeg tiv taus av qeeg." Nws cov qauv siv lead ua ke tuaj yeem thaiv thiab txo qhov kev co, thiab los ntawm kev sim ua haujlwm, qhov kev co amplitude xa mus rau lub platform tuaj yeem txo qis ntau dua 80%. Hauv lub rooj cob qhia semiconductor chip manufacturing, cov txheej txheem photolithography xav tau qhov tseeb ntawm qhov chaw kom ncav cuag qib nanometer, thiab qhov tseeb static pressure air floating movement platform txhawb nqa los ntawm lub hauv paus granite tuaj yeem ua kom ntseeg tau tias kev ua haujlwm ruaj khov ntawm cov khoom siv chip lithography hauv ib puag ncig kev co, ua kom tiav qhov kev kos duab ntawm cov qauv circuit, thiab txhim kho cov txiaj ntsig ntawm kev tsim khoom chip.
Zoo thermal stability, tsis ntshai kev hloov pauv kub
Qhov kub thiab txias hloov pauv yuav ua rau ntau yam khoom siv nthuav dav thiab ntsws, uas yuav cuam tshuam rau qhov tseeb ntawm cov khoom siv. Txawm li cas los xij, lub hauv paus granite qhia txog kev ruaj khov thermal zoo kawg nkaus, thiab nws cov coefficient ntawm thermal nthuav dav yog qis heev, feem ntau ntawm 5-7 × 10⁻⁶ / ℃. Hauv kev tshawb fawb txog hnub qub, lub platform txav mus los zoo siv rau kev kho kom zoo ntawm cov tsom iav loj, nrog lub hauv paus granite, txawm tias muaj kev hloov pauv loj heev ntawm qhov kub thiab txias sib txawv ntawm hnub thiab hmo ntuj, nws tuaj yeem ua kom ntseeg tau tias qhov tseeb ntawm lub lens raug tswj hwm ntawm qib sub-micron, pab cov kws tshawb fawb txog hnub qub kom pom tseeb cov kev hloov pauv me me ntawm cov cev nyob deb thiab tshawb nrhiav qhov tsis paub meej ntawm lub ntiaj teb tob.
Kev ua kom muaj zog thiab hnav tsis kam kom ntseeg tau tias siv tau ntev
Nyob rau hauv lub sijhawm ntev ntawm qhov tseeb static pressure air floating platform, txawm hais tias muaj cua floating txhawb nqa ntawm lub platform thiab lub hauv paus, tseem muaj qee qib ntawm kev sib txhuam. Granite hardness siab, Mohs hardness tuaj yeem ncav cuag 6-7, nrog kev tiv thaiv zoo heev. Hauv cov ntaub ntawv science laboratory, lub precision static pressure air floating txav platform feem ntau siv, nws lub hauv paus granite tuaj yeem tiv taus kev sib txhuam mus sij hawm ntev, piv rau lub hauv paus ib txwm muaj, tuaj yeem ntev lub voj voog txij nkawm ntawm lub platform ntau dua 50%, txo cov nqi txij nkawm khoom siv, thiab xyuas kom meej tias kev ua haujlwm tshawb fawb txuas ntxiv mus.
Kev xaiv lub hauv paus granite rau qhov tseeb static pressure air floating movement platform yog qhov kawg ntawm kev nrhiav qhov tseeb, kev ruaj khov thiab kev ua haujlwm ntev. Hauv cov teb ntawm kev tsim khoom semiconductor, kev tsim khoom siv optical, aerospace, kev tshawb fawb thiab kev sim, uas yuav tsum tau yuav luag nruj nreem, qhov tseeb static pressure air floating movement platform txhawb nqa los ntawm lub hauv paus granite ua lub luag haujlwm tseem ceeb, txhawb kev txhim kho ntawm ntau yam lag luam mus rau qhov tseeb dua.
Lub sijhawm tshaj tawm: Plaub Hlis-09-2025