Hauv kev tsim khoom siv semiconductor, qhov tseeb yog txoj sia ntawm qhov zoo thiab kev ua tau zoo ntawm cov khoom. Cov khoom siv ntsuas semiconductor, ua qhov txuas tseem ceeb los xyuas kom meej qhov tseeb ntawm kev tsim khoom, yuav luag nruj heev rau kev ruaj khov ntawm nws cov khoom tseem ceeb. Ntawm lawv, lub platform granite, nrog nws qhov kev ruaj khov thermal zoo heev, ua lub luag haujlwm tseem ceeb hauv cov khoom siv ntsuas semiconductor. Tsab xov xwm no yuav ua qhov kev tshuaj xyuas tob txog kev ruaj khov thermal ntawm cov platform granite hauv cov khoom siv ntsuas semiconductor los ntawm cov ntaub ntawv xeem tiag tiag.
Cov kev cai nruj rau kev ruaj khov ntawm cov khoom siv ntsuas hauv kev tsim khoom semiconductor
Cov txheej txheem tsim khoom semiconductor nyuaj heev thiab meej heev, thiab qhov dav ntawm cov kab hluav taws xob ntawm lub nti tau nkag mus rau theem nanometer. Hauv cov txheej txheem tsim khoom siab heev, txawm tias qhov hloov pauv kub me me tuaj yeem ua rau thermal nthuav dav thiab contraction ntawm cov khoom siv, yog li ua rau muaj qhov yuam kev ntsuas. Piv txwv li, hauv cov txheej txheem photolithography, yog tias qhov ntsuas qhov tseeb ntawm cov khoom siv ntsuas deviates los ntawm 1 nanometer, nws yuav ua rau muaj teeb meem loj xws li luv luv circuits lossis qhib circuits hauv cov circuits ntawm lub nti, ua rau lub nti scrapping. Raws li cov ntaub ntawv kev lag luam, rau txhua 1 ℃ kev hloov pauv hauv qhov kub, lub platform khoom siv hlau ib txwm muaj peev xwm hloov pauv qhov ntev ntawm ntau nanometers. Txawm li cas los xij, kev tsim khoom semiconductor xav tau qhov tseeb ntawm kev ntsuas kom tswj tau hauv ± 0.1 nanometers, uas ua rau thermal stability yog qhov tseem ceeb hauv kev txiav txim siab seb cov khoom siv ntsuas puas tuaj yeem ua tau raws li qhov xav tau ntawm kev tsim khoom semiconductor.
Cov txiaj ntsig theoretical ntawm thermal stability ntawm granite platforms
Granite, ua ib hom pob zeb ntuj, muaj cov pob zeb me me sab hauv, cov qauv ntom thiab sib xws, thiab muaj qhov zoo ntawm kev ruaj khov thermal. Hais txog cov coefficient ntawm thermal expansion, cov coefficient ntawm thermal expansion ntawm granite yog qis heev, feem ntau yog li ntawm 4.5 txog 6.5 × 10⁻⁶ / K. Hauv kev sib piv, cov coefficient ntawm thermal expansion ntawm cov khoom siv hlau xws li aluminium alloys yog siab txog 23.8 × 10⁻⁶ / K, uas yog ntau zaus ntawm granite. Qhov no txhais tau tias nyob rau hauv tib qho kub hloov pauv, qhov kev hloov pauv ntawm lub platform granite yog me dua li ntawm lub platform hlau, uas tuaj yeem muab cov ntaub ntawv ntsuas ruaj khov dua rau cov khoom siv semiconductor metering.
Tsis tas li ntawd xwb, cov qauv siv lead ua los ntawm granite ua rau nws muaj kev sib npaug zoo ntawm kev coj cua sov. Thaum cov khoom siv ua haujlwm tsim cua sov lossis qhov kub thiab txias hloov pauv, lub platform granite tuaj yeem coj cua sov sai thiab sib npaug, zam kev kub hnyiab hauv zos lossis txias dhau, yog li ua kom zoo tswj qhov kub thiab txias ntawm lub platform thiab ua kom ntseeg tau tias qhov ntsuas tau ruaj khov.
Cov txheej txheem thiab txoj kev ntsuas kev ruaj khov ntawm thermal
Yuav kom ntsuas tau qhov thermal stability ntawm lub granite platform hauv cov khoom siv semiconductor metering, peb tau tsim ib txoj kev ntsuas nruj heev. Xaiv ib lub cuab yeej ntsuas semiconductor wafer uas muaj qhov tseeb siab, uas muaj lub platform granite ua tiav zoo heev. Hauv qhov chaw sim, qhov sib txawv ntawm qhov kub thiab txias hauv lub chaw ua haujlwm semiconductor tau simulated, uas yog, maj mam cua sov ntawm 20 ℃ txog 35 ℃ thiab tom qab ntawd txias rov qab mus rau 20 ℃. Tag nrho cov txheej txheem kav ntev li 8 teev.
Ntawm lub platform granite ntawm lub cuab yeej ntsuas, cov silicon wafers txheem siab-precision raug tso rau, thiab cov sensors displacement nrog nanoscale raug siv los saib xyuas qhov kev hloov pauv ntawm qhov chaw sib piv ntawm silicon wafers thiab lub platform hauv lub sijhawm tiag tiag. Lub caij no, ntau lub sensors kub siab-precision tau teeb tsa ntawm ntau qhov chaw ntawm lub platform los saib xyuas qhov kub faib ntawm qhov chaw platform. Thaum lub sijhawm sim, cov ntaub ntawv hloov chaw thiab cov ntaub ntawv kub tau kaw txhua 15 feeb kom ntseeg tau tias cov ntaub ntawv tiav thiab raug.
Cov ntaub ntawv ntsuas thiab kev tshuaj xyuas cov txiaj ntsig
Kev sib raug zoo ntawm kev hloov pauv kub thiab kev hloov pauv loj ntawm lub platform
Cov ntaub ntawv sim qhia tau tias thaum qhov kub nce ntawm 20 ℃ txog 35 ℃, qhov kev hloov pauv ntawm qhov loj me ntawm lub platform granite yog me heev. Tom qab xam, thoob plaws hauv tag nrho cov txheej txheem cua sov, qhov siab tshaj plaws ntawm kev nthuav dav ntawm lub platform tsuas yog 0.3 nanometers, uas qis dua qhov yuam kev kam rau kev ntsuas qhov tseeb hauv cov txheej txheem tsim khoom semiconductor. Thaum lub sijhawm txias, qhov loj ntawm lub platform tuaj yeem rov qab mus rau lub xeev pib, thiab qhov tshwm sim lag ntawm kev hloov pauv loj tuaj yeem tsis quav ntsej. Qhov cwj pwm no ntawm kev tswj hwm qhov kev hloov pauv me me heev txawm tias muaj kev hloov pauv kub tseem ceeb ua pov thawj tag nrho qhov kev ruaj khov thermal ntawm lub platform granite.
Kev tshuaj xyuas qhov kub thiab txias sib xws ntawm qhov chaw ua haujlwm
Cov ntaub ntawv sau los ntawm lub ntsuas kub qhia tau hais tias thaum lub sijhawm ua haujlwm ntawm cov khoom siv thiab cov txheej txheem ntawm kev hloov pauv kub, qhov kev faib tawm kub ntawm qhov chaw ntawm lub platform granite yog sib xws heev. Txawm tias thaum lub sijhawm uas qhov kub hloov pauv ntau tshaj plaws, qhov sib txawv ntawm qhov kub ntawm txhua qhov ntsuas ntawm qhov chaw platform yeej ib txwm tswj tau hauv ± 0.1 ℃. Kev faib tawm kub sib xws zoo tiv thaiv kev hloov pauv ntawm lub platform los ntawm kev ntxhov siab thermal tsis sib xws, ua kom ntseeg tau tias qhov tiaj tus thiab ruaj khov ntawm qhov chaw ntsuas, thiab muab ib puag ncig ntsuas kev ntseeg tau rau cov khoom siv semiconductor metrology.
Piv nrog cov khoom siv ib txwm muaj
Cov ntaub ntawv ntsuas ntawm lub platform granite tau muab piv rau cov khoom siv ntsuas semiconductor ntawm tib hom siv lub platform txhuas alloy, thiab qhov sib txawv tseem ceeb heev. Nyob rau hauv tib qho kev hloov pauv kub, qhov nthuav dav ntawm lub platform txhuas alloy yog siab txog li 2.5 nanometers, uas yog ntau dua yim npaug ntawm lub platform granite. Lub caij no, qhov faib kub ntawm qhov chaw ntawm lub platform txhuas alloy tsis sib xws, nrog rau qhov sib txawv kub siab tshaj plaws ncav cuag 0.8 ℃, ua rau pom tseeb deformation ntawm lub platform thiab cuam tshuam loj heev rau qhov tseeb ntawm kev ntsuas.
Hauv lub ntiaj teb tseeb ntawm cov khoom siv semiconductor metrology, granite platforms, nrog lawv qhov kev ruaj khov thermal zoo heev, tau dhau los ua lub hauv paus tseem ceeb hauv kev ua kom muaj kev ntsuas raug. Cov ntaub ntawv ntsuas tau ua pov thawj tias lub granite platform ua tau zoo heev hauv kev teb rau qhov kub thiab txias hloov pauv, muab kev txhawb nqa kev txhim khu kev qha rau kev lag luam semiconductor manufacturing. Thaum cov txheej txheem tsim semiconductor nce mus rau qhov tseeb dua, qhov zoo ntawm thermal stability ntawm granite platforms yuav dhau los ua qhov tseem ceeb, txuas ntxiv tsav tsheb tshiab thiab kev txhim kho hauv kev lag luam.
Lub sijhawm tshaj tawm: Tsib Hlis-13-2025