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Nyob rau hauv lub tshav pob ntawm semiconductor manufacturing, precision yog lub lifeline ntawm cov khoom zoo thiab kev ua tau zoo. Semiconductor metering cov cuab yeej, raws li qhov txuas tseem ceeb los xyuas kom meej cov khoom raug, imposes yuav luag nruj raws li kev ruaj ntseg ntawm nws cov khoom tseem ceeb. Ntawm lawv, granite platform, nrog nws zoo thermal stability, plays lub luag hauj lwm tseem ceeb hauv semiconductor metering khoom. Kab lus no yuav ua qhov kev ntsuam xyuas qhov tob ntawm qhov kev ua haujlwm thermal stability ntawm granite platforms hauv semiconductor metering khoom los ntawm cov ntaub ntawv ntsuas tiag tiag. cov
Cov kev cai nruj rau cov thermal stability ntawm cov khoom ntsuas hauv semiconductor manufacturing
Cov txheej txheem tsim khoom semiconductor yog qhov nyuaj heev thiab meej, thiab qhov dav ntawm cov kab hluav taws xob ntawm cov nti tau nkag mus rau qib nanometer. Nyob rau hauv xws li ib tug high-precision manufacturing txheej txheem, txawm lub me ntsis kub hloov yuav ua rau thermal expansion thiab contraction ntawm cov khoom Cheebtsam, yog li ua rau kev ntsuas yuam kev. Piv txwv li, nyob rau hauv cov txheej txheem photolithography, yog tias qhov ntsuas qhov tseeb ntawm cov cuab yeej ntsuas ntsuas qhov sib txawv ntawm 1 nanometer, nws yuav ua rau muaj teeb meem loj xws li luv luv Circuit Court lossis qhib circuits hauv circuits ntawm lub nti, ua rau cov nti nti. Raws li kev lag luam cov ntaub ntawv txheeb cais, rau txhua txhua 1 ℃ hloov pauv hauv qhov kub thiab txias, cov khoom siv hlau metering platform yuav raug hloov pauv ntawm ntau nanometers. Txawm li cas los xij, kev tsim khoom semiconductor yuav tsum ntsuas qhov tseeb kom tswj tau hauv ± 0.1 nanometers, uas ua rau thermal stability yog qhov tseem ceeb hauv kev txiav txim siab seb cov khoom siv ntsuas puas tuaj yeem ua tau raws li qhov xav tau ntawm kev tsim khoom semiconductor. cov
Theoretical zoo ntawm thermal stability ntawm granite platforms
Granite, raws li ib yam ntawm cov pob zeb ntuj, muaj ib tug compact sab hauv ntxhia crystallization, ib tug ntom thiab zoo qauv, thiab muaj lub ntuj kom zoo dua ntawm thermal stability. Nyob rau hauv cov nqe lus ntawm cov coefficient ntawm thermal expansion, lub coefficient ntawm thermal expansion ntawm granite yog tsawg heev, feem ntau yog li ntawm 4.5 mus rau 6.5 × 10⁻⁶ / K. Nyob rau hauv sib piv, cov coefficient ntawm thermal expansion ntawm cov khoom siv hlau xws li txhuas alloys siab li 23.8 × 10⁻⁶ / K, uas yog ob peb zaug ntawm granite. Qhov no txhais tau hais tias nyob rau hauv tib qhov kub thiab txias variation tej yam kev mob, qhov seem hloov ntawm granite platform yog ntau me dua li ntawm cov hlau platform, uas muaj peev xwm muab ib tug ruaj khov ntsuas siv rau semiconductor metering khoom. cov
Tsis tas li ntawd, cov qauv siv lead ua ntawm granite endows nws nrog zoo heev uniformity ntawm tshav kub conduction. Thaum cov cuab yeej ua haujlwm tsim hluav taws xob los yog qhov kub thiab txias hloov pauv, granite platform tuaj yeem ua kom sai thiab sib npaug ntawm cov cua sov, kom tsis txhob muaj cua sov hauv zos lossis overcooling tshwm sim, yog li tswj xyuas qhov kub thiab txias ntawm lub platform thiab ntxiv kev ruaj ntseg ntawm kev ntsuas qhov tseeb. cov
Cov txheej txheem thiab txheej txheem ntawm thermal stability ntsuas
Txhawm rau txhawm rau ntsuas qhov thermal stability ntawm granite platform hauv semiconductor metering khoom, peb tau tsim ib qho kev ntsuas nruj. Xaiv lub high-precision semiconductor wafer ntsuas ntsuas, uas yog nruab nrog super-precision ua granite platform. Hauv qhov chaw sim, qhov sib txawv ntawm qhov sib txawv ntawm qhov sib txawv ntawm cov khoom siv semiconductor raug simulated, uas yog, maj mam cua sov ntawm 20 ℃ mus rau 35 ℃ thiab tom qab ntawd txias rov qab mus rau 20 ℃. Tag nrho cov txheej txheem tau siv sijhawm li 8 teev. cov
Nyob rau ntawm granite platform ntawm lub ntsuas ntsuas, high-precision standard silicon wafers raug muab tso, thiab hloov sensors nrog nanoscale raug raug siv los saib xyuas cov txheeb ze txoj hauj lwm hloov ntawm silicon wafers thiab lub platform nyob rau hauv lub sij hawm. Lub caij no, ntau qhov ntsuas kub qhov ntsuas kub tau teem rau ntawm ntau txoj haujlwm ntawm lub platform los saib xyuas qhov kub thiab txias ntawm lub platform nto. Thaum lub sijhawm sim, cov ntaub ntawv hloov chaw thiab cov ntaub ntawv ntsuas kub tau sau tseg txhua 15 feeb los xyuas kom meej qhov ua tiav thiab raug ntawm cov ntaub ntawv. cov
Ntsuas cov ntaub ntawv thiab kev soj ntsuam tau
Kev sib raug zoo ntawm qhov kub thiab txias hloov pauv ntawm lub platform
Kev sim cov ntaub ntawv qhia tau hais tias thaum kub nce ntawm 20 ℃ mus rau 35 ℃, qhov kev hloov ntawm linear loj ntawm granite platform yog me me heev. Tom qab kev xam, thoob plaws hauv tag nrho cov txheej txheem cua sov, qhov siab tshaj plaws linear expansion ntawm lub platform tsuas yog 0.3 nanometers, uas yog qis dua qhov kev ua yuam kev kam rau siab rau kev ntsuas qhov tseeb hauv cov txheej txheem tsim khoom semiconductor. Thaum lub caij txias, lub platform loj tuaj yeem yuav luag tag nrho rov qab mus rau lub xeev thawj zaug, thiab qhov tshwm sim lag luam ntawm qhov hloov pauv loj tuaj yeem tsis quav ntsej. Cov yam ntxwv ntawm kev tswj hwm qhov tsis tshua muaj qhov hloov pauv txawm tias nyob rau hauv qhov kub thiab txias hloov pauv tag nrho validates qhov zoo tshaj thermal stability ntawm granite platform. cov
Kev tsom xam ntawm qhov kub thiab txias uniformity ntawm lub platform nto
Cov ntaub ntawv sau los ntawm qhov ntsuas kub ntsuas qhia tau hais tias thaum lub sijhawm ua haujlwm ntawm cov khoom siv thiab cov txheej txheem ntawm kev hloov kub, qhov kub thiab txias ntawm qhov chaw ntawm granite platform yog qhov sib txawv heev. Txawm tias thaum lub sij hawm lub sij hawm thaum kub hloov ntau zaus, qhov kub sib txawv ntawm txhua qhov ntsuas ntawm lub platform nto yog ib txwm tswj tsis pub dhau ± 0.1 ℃. Uniform kub tis zoo zam lub platform deformation los ntawm qhov tsis sib xws ntawm thermal kev nyuaj siab, ua kom lub tiaj thiab ruaj khov ntawm kev ntsuas qhov chaw, thiab muab qhov kev ntsuas kev ntseeg siab rau cov khoom siv hluav taws xob semiconductor. cov
Piv nrog cov khoom siv tsoos platforms
Cov ntaub ntawv ntsuas ntawm granite platform tau muab piv nrog cov khoom siv semiconductor metering ntawm tib hom siv aluminium alloy platform, thiab qhov sib txawv yog qhov tseem ceeb. Nyob rau hauv tib lub kub hloov tej yam kev mob, lub linear expansion ntawm lub aluminium alloy platform yog siab li 2.5 nanometers, uas yog ntau tshaj yim lub sij hawm ntawm lub granite platform. Lub caij no, qhov kub thiab txias ntawm qhov chaw ntawm aluminium alloy platform yog qhov tsis sib xws, nrog qhov kub siab tshaj qhov sib txawv mus txog 0.8 ℃, ua rau pom tseeb deformation ntawm lub platform thiab cuam tshuam rau qhov ntsuas qhov tseeb. cov
Nyob rau hauv lub ntiaj teb meej ntawm cov khoom siv hluav taws xob semiconductor, granite platforms, nrog rau lawv cov thermal stability, tau dhau los ua qhov tseem ceeb hauv kev ntsuas qhov tseeb. Cov ntaub ntawv ntsuas tau ua pov thawj qhov ua tau zoo ntawm granite platform hauv kev teb rau cov kev hloov pauv kub, muab kev txhawb nqa kev ntseeg siab rau kev lag luam semiconductor. Raws li cov txheej txheem tsim khoom semiconductor nce mus rau qhov siab dua, qhov thermal stability kom zoo dua ntawm granite platforms yuav dhau los ua qhov tseem ceeb, tsis tu ncua tsav cov thev naus laus zis tshiab thiab kev loj hlob hauv kev lag luam.
Post lub sij hawm: May-13-2025