Hauv cov saw hlau ntawm kev tsim khoom semiconductor, lub kaw lus hloov wafer zoo li "txoj kab cawm siav ntawm kab tsim khoom nti", thiab nws qhov kev ruaj khov thiab qhov tseeb ncaj qha txiav txim siab qhov txiaj ntsig ntawm cov chips. Lub cim tshiab ntawm cov kab hloov wafer hloov pauv ua ke ua ke cov cav linear nrog cov hauv paus granite, thiab cov txiaj ntsig tshwj xeeb ntawm cov ntaub ntawv granite yog cov lej tseem ceeb los qhib kev sib kis ua haujlwm siab.
Lub hauv paus granite: Tsim kom muaj "lub hauv paus ruaj khov" rau kev sib kis ruaj khov
Granite, uas tau dhau los ntawm kev ua kom zoo nkauj hauv av ntau pua lab xyoo, muaj cov khoom siv sib xyaw ua ke thiab sib xws. Qhov xwm txheej ntuj no ua rau nws yog cov khoom siv zoo tshaj plaws rau cov txheej txheem hloov wafer. Hauv qhov chaw nyuaj ntawm cov chav huv semiconductor, granite, nrog nws cov coefficient ntawm thermal expansion qis heev (tsuas yog 5-7 × 10⁻⁶ / ℃), tuaj yeem tiv taus cua sov tsim thaum lub sijhawm ua haujlwm ntawm cov khoom siv thiab kev cuam tshuam ntawm kev hloov pauv kub ib puag ncig, ua kom ntseeg tau tias qhov loj me ntawm lub hauv paus ruaj khov thiab zam kev hloov pauv ntawm txoj kev sib kis los ntawm kev hloov pauv thermal. Nws qhov kev ua tau zoo tshaj plaws ntawm kev co damping tuaj yeem nqus tau sai sai cov kev co tshuab tsim thaum lub sijhawm pib, kaw thiab ua kom nrawm ntawm cov motors linear, nrog rau kev cuam tshuam sab nraud los ntawm kev ua haujlwm ntawm lwm cov khoom siv hauv lub chaw ua haujlwm, muab lub platform ruaj khov nrog "zero co" rau kev sib kis wafer.
Lub caij no, qhov ruaj khov tshuaj ntawm granite ua kom nws tsis xeb lossis xeb hauv cov chaw ua haujlwm semiconductor qhov twg cov kua qaub thiab alkali reagents tsis ruaj khov thiab xav tau kev huv si siab, yog li zam kev cuam tshuam rau qhov tseeb ntawm kev xa khoom vim yog cov khoom laus lossis cov pa phem adsorption. Cov yam ntxwv ntawm qhov chaw du thiab ntom tuaj yeem txo cov plua plav adhesion zoo dua, ua tau raws li cov qauv tsis muaj plua plav ntawm cov chav huv thiab tshem tawm qhov kev pheej hmoo ntawm kev ua qias tuaj ntawm cov hauv paus hniav.
Qhov "kev koom tes kub" ntawm cov motors linear thiab granite
Cov cav linear, nrog lawv cov yam ntxwv ntawm tsis muaj kev sib kis, kev nrawm siab thiab kev teb ceev ceev, muab cov wafer kis tau zoo ntawm "ceev, raug thiab ruaj khov". Lub hauv paus granite muab lub platform txhawb nqa ruaj khov thiab txhim khu kev qha rau nws. Ob qho tib si ua haujlwm ua ke kom ua tiav qhov dhia hauv kev ua tau zoo. Thaum lub cav linear tsav lub wafer carrier kom khiav ntawm txoj kab granite, qhov muaj zog thiab ruaj khov ntawm lub hauv paus ua kom muaj kev sib kis zoo ntawm lub zog tsav tsheb, zam kev poob zog lossis kev sib kis qeeb los ntawm kev hloov pauv hauv paus.
Tsav los ntawm qhov kev thov rau nanoscale precision, linear motors tuaj yeem ua tiav sub-micron-level displacement control. Cov yam ntxwv ua tiav siab ntawm cov granite bases (nrog flatness errors tswj tau hauv ± 1μm) zoo meej rau kev tswj hwm ntawm linear motors, ua ke kom ntseeg tau tias qhov yuam kev tso chaw thaum lub sijhawm xa wafer tsawg dua ± 5μm. Txawm hais tias nws yog kev thauj mus los ceev ceev ntawm ntau yam khoom siv lossis chaw nres tsheb meej rau wafer handover, kev sib xyaw ua ke ntawm linear motors thiab granite bases tuaj yeem ua kom "zero deviation thiab xoom jitter" hauv wafer kis.
Kev txheeb xyuas kev coj ua hauv kev lag luam: Kev txhim kho ob qho tib si hauv kev ua haujlwm zoo thiab tus nqi ntawm cov txiaj ntsig
Tom qab txhim kho nws lub tshuab hloov wafer, ib lub tuam txhab semiconductor thoob ntiaj teb tau siv lub cev muaj zog linear + granite base solution, uas ua rau kev hloov wafer efficiency nce 40%, txo qhov tshwm sim ntawm qhov yuam kev xws li kev sib tsoo thiab kev sib tsoo thaum lub sijhawm hloov pauv los ntawm 85%, thiab txhim kho qhov txiaj ntsig tag nrho ntawm cov chips los ntawm 6%. Tom qab cov ntaub ntawv yog qhov lav ntawm kev ruaj khov kis tau los ntawm lub hauv paus granite thiab qhov ceev ceev thiab meej synergy nyhuv ntawm lub cev muaj zog linear, uas txo qhov poob thiab qhov yuam kev hauv cov txheej txheem kis wafer.
Txij li cov khoom siv mus rau kev tsim khoom meej, los ntawm kev ua tau zoo mus rau kev txheeb xyuas qhov tseeb, kev sib xyaw ua ke ntawm cov motors linear thiab granite bases tau txhais dua cov qauv ntawm wafer transfer systems. Yav tom ntej thaum semiconductor technology nce mus rau 3nm thiab 2nm cov txheej txheem, cov ntaub ntawv granite yuav txuas ntxiv mus txhaj tshuaj muaj zog rau hauv kev lag luam txoj kev loj hlob nrog lawv cov txiaj ntsig tsis tuaj yeem hloov pauv.
Lub sijhawm tshaj tawm: Tsib Hlis-14-2025