Nyob rau hauv cov saw ncaj ntawm semiconductor manufacturing, wafer hloov system yog zoo li "lifeline ntawm cov chips ntau lawm kab", thiab nws stability thiab raug ncaj qha txiav txim siab yield tus nqi ntawm chips. Cov tiam tshiab ntawm wafer hloov tshuab revolutionarily sib txuas cov linear motors nrog granite bases, thiab cov cim zoo ntawm granite cov ntaub ntawv yog precisely cov tub ntxhais code rau account high-kev ua tau zoo kis tau tus mob.
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Granite puag: Tsim lub "pob zeb-khoom hauv paus" rau kev sib kis ruaj khov
Granite, tau dhau los ua ntau pua lab xyoo ntawm geological refinement, nta ntom ntom thiab cov ntxhia hauv cov ntxhia crystallization. Cov yam ntxwv zoo li no ua rau nws yog ib qho khoom siv zoo tshaj plaws rau wafer hloov tshuab. Nyob rau hauv ib puag ncig complex ntawm semiconductor cleanrooms, granite, nrog nws ultra-low coefficient ntawm thermal expansion (tsuas yog 5-7 × 10⁻⁶ / ℃), muaj peev xwm tiv tau lub tshav kub generated thaum lub sij hawm cov cuab yeej ua hauj lwm thiab cov cuam tshuam ntawm ib puag ncig kub hloov, kom lub stability ntawm lub hauv paus loj thiab tsis txhob kis tau tus mob deformation los ntawm thermal deformation. Nws txoj kev vibration damping zoo heev tuaj yeem nqus tau cov tshuab kev vibrations sai sai thaum lub sijhawm pib, kaw thiab nrawm ntawm cov motors linear, nrog rau kev cuam tshuam sab nraud coj los ntawm kev ua haujlwm ntawm lwm yam khoom siv hauv kev cob qhia, muab lub platform ruaj khov nrog "zero co" rau wafer kis tau tus mob. cov
Lub caij no, cov tshuaj lom neeg ruaj khov ntawm granite ua kom ntseeg tau tias nws tsis corrode lossis xeb hauv semiconductor rhiav qhov twg cov kua qaub thiab alkali reagents yog volatile thiab siab huv yuav tsum tau, yog li zam qhov cuam tshuam ntawm kis tau tus mob vim cov khoom laus los yog cov pa phem adsorption. Cov yam ntxwv ntawm tus du thiab ntom ntom tuaj yeem ua tau zoo dua txo cov plua plav adhesion, ua tau raws li cov qauv nruj tsis muaj plua plav ntawm cov chav huv thiab tshem tawm qhov kev pheej hmoo ntawm wafer paug los ntawm cov hauv paus hniav. cov
Qhov "golden koom tes" cuam tshuam ntawm linear motors thiab granite
Linear motors, nrog rau lawv cov yam ntxwv ntawm tsis muaj mechanical kis clearance, siab acceleration thiab siab teb ceev, endow wafer kis tau tus mob nrog rau qhov zoo ntawm "ceev, raug thiab ruaj khov". Lub hauv paus granite muab lub zog thiab txhim khu kev qha kev txhawb nqa platform rau nws. Ob leeg ua haujlwm ua ke kom ua tiav qhov kev vam meej. Thaum lub tshuab linear tsav lub wafer cab kuj khiav ntawm lub hauv paus granite khiav, lub zog rigidity thiab stability ntawm lub hauv paus xyuas kom meej lub zog kis tau tus mob ntawm lub cev muaj zog tsav tsheb, tsis txhob yuam kev poob los yog kis lag luam los ntawm lub hauv paus deformation. cov
Tsav los ntawm kev thov rau nanoscale precision, linear motors tuaj yeem ua tiav sub-micron-theem kev hloov pauv. Cov yam ntxwv ntawm kev ua haujlwm siab ntawm granite hauv paus (nrog kev ua haujlwm tsis zoo tswj nyob rau hauv ± 1μm) zoo kawg nkaus haum rau kev tswj hwm ntawm cov kab hluav taws xob, sib koom ua ke kom ntseeg tau tias qhov chaw ua haujlwm yuam kev thaum lub sij hawm wafer kis tsawg dua ± 5μm. Txawm hais tias nws yog high-speed shuttling ntawm ntau yam txheej txheem cov cuab yeej los yog qhov chaw nres tsheb ncaj qha rau wafer handover, kev sib txuas ntawm linear motors thiab granite bases tuaj yeem ua kom "zero deviation and zero jitter" in wafer transmission. cov
Kev Tshawb Fawb Kev Lag Luam: Kev txhim kho dual hauv kev ua tau zoo thiab tawm los tus nqi
Tom qab kev txhim kho nws cov wafer hloov chaw, ib tug ua lag luam thoob ntiaj teb semiconductor tau txais ib lub tshuab linear + granite hauv paus tov, uas ua rau kom cov wafer hloov efficiency los ntawm 40%, txo qhov tshwm sim ntawm faults xws li kev sib tsoo thiab offset thaum lub sij hawm hloov mus los ntawm 85%, thiab txhim kho tag nrho cov txiaj ntsig ntawm cov chips los ntawm 6%. Tom qab cov ntaub ntawv lus dag lub lav ntawm kev ruaj ntseg kis tau tus mob los ntawm granite puag thiab high-ceev thiab meej synergy nyhuv ntawm lub linear motor, uas ho txo qhov poob thiab yuam kev nyob rau hauv lub wafer kis tau tus mob txheej txheem. cov
Los ntawm cov khoom siv mus rau precision manufacturing, los ntawm kev ua tau zoo mus rau cov tswv yim pov thawj, kev sib xyaw ntawm linear motors thiab granite bases tau rov txhais cov qauv ntawm wafer hloov tshuab. Nyob rau hauv lub neej yav tom ntej thaum semiconductor technology nce mus rau 3nm thiab 2nm txheej txheem, granite cov ntaub ntawv yuav muaj tseeb mus ntxiv zog impetus rau hauv kev lag luam txoj kev loj hlob nrog lawv irreplaceable zoo.
Post lub sij hawm: May-14-2025