Nyob rau hauv cov khoom siv semiconductor, granite txaj yog siv dav tshaj plaws?

Granite txaj yog ib qho tseem ceeb ntawm cov khoom siv semiconductor.Raws li cov khoom siv ruaj khov thiab nruj, granite yog dav siv los ua lub hauv paus rau cov khoom siv semiconductor.Nws yog tus cwj pwm los ntawm nws qhov qis thermal expansion coefficient, siab seem stability, thiab zoo heev mechanical zog.Vim cov khoom no, granite txaj feem ntau yog siv nyob rau hauv peb hom sib txawv ntawm cov khoom siv semiconductor - cov khoom siv metrology, cov khoom siv lithography, thiab cov khoom siv tshuaj xyuas.

Cov cuab yeej siv hluav taws xob siv los ntsuas thiab ntsuas qhov loj me ntawm cov khoom siv semiconductor.Nws ua lub luag haujlwm tseem ceeb hauv kev tswj xyuas qhov zoo thiab sib xws ntawm cov txheej txheem tsim khoom semiconductor.Cov cuab yeej siv hauv xov tooj muaj xws li cov cuab yeej siv kho qhov muag, lub tshuab hluav taws xob hluav taws xob, thiab atomic force microscopes (AFMs).Txij li qhov kev ua tau zoo ntawm cov ntsuas ntsuas no nyob ntawm lawv qhov ruaj khov, qhov tseeb, thiab kev vibration tsis kam, granite yog qhov kev xaiv zoo tshaj plaws rau lawv cov khoom siv txaj.Lub uniformity thiab stability ntawm lub txaj granite muab lub platform ruaj khov rau cov twj paj nruag, uas txhim kho lawv qhov tseeb thiab kev ntseeg tau.

Cov khoom siv lithography yog siv los ua cov qauv microchip ntawm lub wafer.Cov txheej txheem lithography yuav tsum muaj qib siab ntawm qhov tseeb thiab qhov tseeb los tsim cov circuits nyuaj thiab txhim kho nti kev ua haujlwm.Cov khoom siv lithography suav nrog cov txheej txheem stepper thiab scanner uas siv lub teeb hloov cov duab mus rau wafer.Raws li cov txheej txheem lithography yog qhov nkag siab zoo rau kev vibration thiab thermal hloov, lub txaj zoo yog qhov tseem ceeb los xyuas kom meej qhov ruaj khov thiab rov ua dua ntawm cov txheej txheem lithography.Granite txaj muab qhov yuav tsum tau muaj kev ruaj ntseg thiab nruj kev co damping kev ua tau zoo rau lithography systems.Lub txaj granite tso cai rau stepper lossis scanner system kom muaj kev sib raug zoo spatial kom ntseeg tau tias muaj qhov tseeb thiab cov khoom kawg kawg.

Cov cuab yeej tshuaj xyuas yog siv los kuaj xyuas qhov tsis xws luag hauv cov khoom siv semiconductor.Cov cuab yeej tshuaj xyuas suav nrog cov tshuab xws li laser scanning microscopes, electron microscopes, thiab optical microscopes.Nrog rau qhov xav tau rau cov cuab yeej no kom raug, ruaj khov thiab kev co-resistant, granite txaj yog cov khoom siv zoo tshaj plaws.Granite cov khoom siv kho tshuab thiab kev ruaj ntseg ntawm qhov sib txawv pab hauv kev sib cais kev vibration, uas txhim kho qhov tseeb ntawm cov khoom siv tshuaj ntsuam xyuas.

Hauv kev xaus, granite txaj yog qhov tseem ceeb rau kev lag luam semiconductor thiab tau siv dav hauv ntau hom khoom siv.Nws cov khoom tshwj xeeb xws li kev ruaj ntseg seem, tsis tshua muaj thermal expansion coefficient, thiab kev ruaj ntseg zoo heev ua rau granite qhov kev xaiv zoo tshaj plaws rau lub txaj khoom ntawm cov khoom siv semiconductor.Raws li lub txaj zoo granite muab qhov tsim nyog ruaj khov, precision, thiab kev vibration tsis kam rau cov khoom siv semiconductor, nws thaum kawg txhim kho qhov zoo ntawm cov khoom kawg.Yog li ntawd, kev siv lub txaj granite hauv cov khoom siv semiconductor paub tseeb tias yuav txuas ntxiv mus rau xyoo tom ntej.