Granite precision platforms, nrog rau lawv cov rigidity siab, tsis tshua muaj expansion coefficient, zoo damping kev ua tau zoo thiab tej yam ntuj tso anti-magnetic zog, muaj irreplaceable daim ntawv thov nqi nyob rau hauv high-end manufacturing thiab kev tshawb fawb teb uas precision thiab stability yog heev xav tau. Cov hauv qab no yog nws qhov tseem ceeb daim ntawv thov scenarios thiab technical zoo:
I. Teb ntawm Ultra-precision ua khoom siv
Cov khoom siv hluav taws xob semiconductor
Daim ntawv thov scenarios: Lithography tshuab workpiece rooj, wafer dicing tshuab puag, ntim khoom positioning platform.
Technical tus nqi:
Lub coefficient ntawm thermal expansion ntawm granite tsuas yog (0.5-1.0) × 10⁻⁶ / ℃, uas tuaj yeem tiv taus qhov kub thiab txias hloov thaum lub sij hawm nanoscale raug ntawm lub tshuab lithography (kev xaav yuam kev <0.1nm hauv ib puag ncig ntawm ± 0.1 ℃).
Sab hauv micro-pore qauv tsim ib tug natural damping (damping piv 0.05 rau 0.1), suppressing lub vibration (amplitude <2μm) thaum lub sij hawm high-ceev txiav los ntawm lub tshuab dicing thiab xyuas kom meej tias ntug roughness Ra ntawm lub wafer txiav yog tsawg tshaj li 1μm.
2. Precision Sib Tsoo Tshuab thiab Coordinate Measuring Machine (CMM)
Daim ntawv thov Case:
Lub hauv paus ntawm lub tshuab ntsuas peb-coordinate txais ib qho qauv granite, nrog lub tiaj tiaj ntawm ± 0.5μm / m. Ua ke nrog cov huab cua-floating qhia kev tsheb nqaj hlau, nws ua tiav nano-theem txav raug (rov ua dua qhov tseeb ± 0.1μm).
Lub worktable ntawm optical sib tsoo tshuab txais cov qauv sib xyaw ntawm granite thiab nyiaj hlau. Thaum sib tsoo K9 iav, qhov nto waviness tsawg dua λ/20 (λ = 632.8nm), ua tau raws li kev ua haujlwm zoo ntawm laser lo ntsiab muag.
Ii. Field of Optics thiab Photonics
Astronomical telescopes thiab laser systems
Tej kev siv:
Kev txhawb nqa platform ntawm qhov kev xav ntawm lub xov tooj cua loj telescope adopts granite honeycomb qauv, uas yog lub teeb nyob rau hauv nws tus kheej qhov hnyav (qhov ntom 2.7g / cm³) thiab muaj zog cua kev co kuj (deformation <50μm nyob rau hauv 10-theem cua).
Lub optical platform ntawm laser interferometer siv micro-porous granite. Lub reflector yog kho los ntawm lub tshuab nqus tsev adsorption, nrog ib tug flatness yuam kev ntawm tsawg tshaj li 5nm, kom lub stability ntawm ultra-precision optical thwmsim xws li gravitational yoj nrhiav kom tau.
2. Precision optical tivthaiv ua
Technical zoo:
Qhov sib nqus permeability thiab hluav taws xob conductivity ntawm granite platform yog ze rau xoom, zam kev cuam tshuam ntawm electromagnetic cuam tshuam rau cov txheej txheem precision xws li ion beam polishing (IBF) thiab magnetorheological polishing (MRF). Qhov zoo ntawm qhov raug PV tus nqi ntawm cov txheej txheem asphical tuaj yeem ncav cuag λ/100.
Iii. Aerospace thiab Precision Inspection
Aviation Cheebtsam soj ntsuam platform
Daim ntawv thov scenarios: Peb-dimensional soj ntsuam ntawm cov dav hlau hniav, ntsuas cov duab thiab txoj hauj lwm kam rau ua ntawm aviation aluminium alloy structural Cheebtsam.
Kev ua haujlwm tseem ceeb:
Qhov saum npoo ntawm granite platform yog kho los ntawm electrolytic corrosion los tsim cov qauv zoo (nrog rau qhov roughness ntawm Ra 0.4-0.8μm), haum rau high-precision trigger probes, thiab qhov yuam kev ntawm kev soj ntsuam cov hniav profile yog tsawg dua 5μm.
Nws tuaj yeem tiv taus ntau tshaj 200kg ntawm aviation Cheebtsam, thiab lub flatness hloov tom qab siv mus sij hawm ntev yog tsawg dua 2μm / m, ua tau raws li qhov yuav tsum tau ua precision ntawm Qib 10 hauv kev lag luam aerospace.
2. Calibration ntawm inertial navigation Cheebtsam
Cov kev cai: Cov kev ntsuas zoo li qub ntawm cov khoom siv inertial xws li gyroscopes thiab accelerometers yuav tsum tau siv lub platform ultra-ruaj khov.
Kev daws: Lub granite platform yog ua ke nrog ib qho kev sib cais kev sib cais (natural zaus <1Hz), ua tiav high-precision calibration ntawm xoom-offset stability ntawm inertial Cheebtsam <0.01 ° / h nyob rau hauv ib puag ncig nrog vibration acceleration <1 × 10⁻⁴g.
Iv. Nanotechnology thiab Biomedicine
Scanning probe microscope (SPM) platform
Core muaj nuj nqi: Raws li lub hauv paus rau atomic force microscopy (AFM) thiab scanning tunneling microscopy (STM), nws yuav tsum tau muab cais tawm ntawm ib puag ncig kev co thiab thermal drift.
Performance indicators, As
Lub platform granite, ua ke nrog pneumatic kev co cais ob txhais ceg, tuaj yeem txo qhov kev sib kis ntawm kev co sab nraud (1-100Hz) kom tsawg dua 5%, ua tiav atomic-theem duab ntawm AFM nyob rau hauv atmospheric ib puag ncig (kev daws teeb meem <0.1nm).
Qhov kub rhiab heev yog tsawg dua 0.05μm / ℃, uas ua tau raws li qhov yuav tsum tau ua rau kev soj ntsuam nanoscale ntawm cov qauv lom neeg nyob rau hauv qhov kub thiab txias (37 ℃ ± 0.1 ℃) ib puag ncig.
2. Biochip ntim khoom
Daim ntawv thov rooj plaub: Lub siab-precision alignment platform rau DNA sequencing chips txais granite pa-floating qhia rails, nrog ib tug positioning raug ntawm ± 0.5μm, xyuas kom meej sub-micron bonding ntawm lub microfluidic channel thiab nrhiav kom tau electrode.
V. Emerging Application Scenarios
Quantum computing khoom siv hauv paus
Kev sib tw: Qubit manipulation yuav tsum tsis tshua muaj kub (mK qib) thiab ib puag ncig ultra-ruaj khov.
Kev daws: Cov cuab yeej thermal expansion tsis tshua muaj siab ntawm granite (kev nthuav dav < 1ppm los ntawm -200 ℃ mus rau chav tsev kub) tuaj yeem phim cov yam ntxwv ntawm kev sib cog lus ntawm ultra-low kub superconducting hlau nplaum, kom ntseeg tau qhov kev sib raug zoo thaum lub sij hawm ntim ntawm quantum chips.
2. Electron Beam Lithography (EBL) system
Kev ua haujlwm tseem ceeb: Cov cuab yeej rwb thaiv tsev ntawm granite platform (resistivity> 10¹³Ω · m) tiv thaiv cov kab hluav taws xob tawg. Ua ke nrog lub tshuab electrostatic spindle, nws ua tiav high-precision lithography qauv sau nrog nanoscale kab dav (< 10nm).
Cov ntsiab lus
Daim ntawv thov ntawm granite precision platforms tau txuas ntxiv los ntawm cov cuab yeej precision mus rau kev txiav-ntug teb xws li nanotechnology, quantum physics, thiab biomedicine. Nws qhov kev sib tw tseem ceeb nyob hauv qhov sib sib zog nqus ntawm cov khoom siv thiab cov kev xav tau ntawm engineering. Nyob rau hauv lub neej yav tom ntej, nrog rau kev koom ua ke ntawm cov khoom siv cuab yeej cuab tam (xws li graphene-granite nanocomposites) thiab cov cuab yeej ntse sensing, granite platforms yuav tawg mus rau hauv cov lus qhia ntawm atomic-theem raug, tag nrho-kub ntau yam stability, thiab multi-functional kev koom ua ke, los ua cov txheej txheem ntawm kev tsim cov txheej txheem ua ntej.
Post lub sij hawm: May-28-2025