Hauv cov khoom siv semiconductor, cov tub ntxhais kawm ntawv twg yog granite feem ntau siv?

Granite yog ib qho ntawm cov khoom siv nrov tshaj plaws siv hauv cov khoom siv semiconductor.Nws yog ib hom pob zeb uas tawv, tsis muaj pob zeb uas tuaj hauv cov xim sib txawv ntawm grey, liab, thiab dawb.Granite paub txog nws cov kav ntev, tsis tshua muaj thermal expansion coefficient, thiab thermal conductivity zoo heev, ua rau nws yog ib qho khoom siv zoo tshaj plaws rau kev siv hauv cov khoom siv semiconductor subsystems.

Ib qho ntawm cov thawj subsystems uas siv granite hauv semiconductor li yog wafer tuav thiab ua subsystem.Qhov no subsystem plays lub luag haujlwm tseem ceeb hauv kev tsim cov khoom siv semiconductor.Lub wafer yog qhov pib substrate rau cov cuab yeej, thiab kev tuav thiab kev ua haujlwm subsystem yog lub luag haujlwm rau kev hloov wafers ntawm cov chav sib txawv thiab cov khoom siv ua haujlwm.Granite yog siv los tsim cov khoom zoo meej thiab tiaj tus wafer tuav thiab muab lub platform ruaj khov rau kev ua wafer.

Lwm qhov tseem ceeb subsystem uas siv granite yog lub tshuab nqus tsev subsystem.Hauv cov khoom siv semiconductor, lub tshuab nqus tsev yog siv kom tsis txhob muaj kev sib kis thaum tsim khoom.Rau cov txheej txheem no kom ua haujlwm tau zoo, lub chamber yuav tsum tau muab kaw kom tiav, uas yog qhov chaw uas granite tuaj rau hauv. Granite yog cov khoom siv zoo tshaj plaws rau lub tshuab nqus tsev vim tias nws muaj cov nqi qis heev thiab tuaj yeem tswj tau lub tshuab nqus tsev ruaj khov.Tsis tas li ntawd, granite lub siab machining precision tso cai rau kev tsim cov foob zoo meej, muab lub tshuab nqus tsev ruaj khov rau kev ua wafer.

Qhov kev sib raug zoo subsystem yog lwm qhov tseem ceeb uas ua rau siv granite cov khoom tshwj xeeb.Lub subsystem no yog lub luag hauj lwm rau aligning qhov sib txawv ntawm semiconductor li nrog precision thiab raug.Granite yog siv rau hauv kev tsim thiab kev tsim kho ntawm cov theem sib dhos kom ntseeg tau siab rigidity thiab stability.Lub siab tawv ntawm granite pab kom ua tiav qhov kev sib raug zoo siab, ua rau kev tsim cov khoom siv tau zoo thiab txhim khu kev qha semiconductor.

Thaum kawg, lub metrology subsystem yog lwm qhov system ntawm semiconductor li uas siv granite.Metrology plays lub luag haujlwm tseem ceeb hauv kev ua haujlwm wafer, thiab qhov tseeb ntawm qhov system subsystem yog qhov tseem ceeb hauv kev ua kom cov cuab yeej zoo.Granite muab lub platform ruaj khov thiab tawv tawv uas pab txo qis kev vibrations thiab txo qhov cuam tshuam ntawm qhov kub thiab txias.Qhov no, nyob rau hauv lem, pab nyob rau hauv kev ua tau zoo heev ntsuas nyob rau hauv lub metrology subsystem, ua rau zus tau tej cov high-zoo semiconductor li.

Hauv kev xaus, granite yog cov khoom siv tseem ceeb hauv kev tsim cov khoom siv semiconductor.Nws yog cov khoom tshwj xeeb xws li siab nruj, tsis tshua muaj thermal expansion, thiab thermal conductivity zoo heev ua rau nws cov khoom zoo heev rau ntau lub subsystems hauv cov khoom siv semiconductor, suav nrog wafer tuav thiab ua, lub tshuab nqus tsev, kev sib txuas subsystem, thiab metrology subsystem.Tsis tas li ntawd, kev siv granite hauv cov khoom siv semiconductor tau pab hauv kev tsim cov khoom siv tau zoo, txhim khu kev qha thiab muaj txiaj ntsig uas tau hloov pauv ntau yam kev lag luam.