Yuav siv Granite li cas hauv cov khoom siv ua wafer?

Granite yog ib lub pob zeb ntuj uas tau dhau los ua ib feem tseem ceeb ntawm cov khoom siv ua wafer vim nws cov yam ntxwv tshwj xeeb. Hauv tsab xov xwm no, peb yuav tham txog cov yam ntxwv tseem ceeb ntawm granite thiab nws siv li cas hauv cov khoom siv ua wafer.

Granite yog dab tsi?

Granite yog ib hom pob zeb igneous uas muaj cov qauv crystalline thiab muaj ntau yam minerals sib txawv, suav nrog quartz, feldspar, thiab mica. Nws yog ib qho ntawm cov pob zeb ntuj uas nyuaj tshaj plaws thiab tiv taus kev hnav thiab rhuav, ua rau nws zoo meej rau kev siv hauv cov chaw ua haujlwm. Lub zog thiab kev ruaj khov ntawm granite ua rau nws yog cov khoom siv zoo tshaj plaws rau cov hauv paus tshuab thiab cov khoom.

Siv Granite hauv Wafer Processing Equipment

Muaj ntau txoj hauv kev uas granite siv rau hauv cov khoom siv ua wafer. Qee qhov kev siv feem ntau suav nrog:

Cov Khoom Siv Wafer

Cov wafer chucks yog siv los tuav cov silicon wafers rau hauv qhov chaw thaum lub sijhawm sib txawv ntawm kev ua wafer. Granite yog cov khoom siv zoo tagnrho rau wafer chucks vim nws muaj cov coefficient qis ntawm kev nthuav dav thermal, uas txhais tau tias nws tsis cuam tshuam los ntawm kev hloov pauv kub. Qhov kev ruaj khov no yog qhov tseem ceeb rau kev tswj hwm qhov tseeb uas xav tau thaum lub sijhawm ua wafer.

Cov Cheebtsam Tsim Kho

Granite kuj tseem siv los ua cov khoom siv hauv paus, xws li lub hauv paus tshuab, thav duab, thiab kem. Cov khoom no yuav tsum ruaj khov thiab nruj kom tiv taus kev co thiab kev ntxhov siab uas tshwm sim thaum lub sijhawm ua wafer. Granite muab qhov ruaj khov uas xav tau, ua kom ntseeg tau tias cov khoom siv tswj hwm nws qhov tseeb thiab raug.

Cov Ntaub Txhuam Hniav

Cov ntaub txhuam hniav yog siv los txhuam thiab ua kom cov nplaim ntawm silicon wafers du. Granite yog siv los ua cov ntaub no vim nws muaj cov qauv zoo sib xws uas muab cov txiaj ntsig zoo sib xws. Lub pob zeb kuj tiv taus kev hnav thiab rhuav, txhais tau tias cov ntaub no tuaj yeem siv ntau zaus yam tsis tas yuav hnav sai.

Cov txiaj ntsig ntawm kev siv Granite hauv cov khoom siv ua wafer

Muaj ntau yam txiaj ntsig ntawm kev siv granite hauv cov khoom siv ua wafer. Qee qhov txiaj ntsig no suav nrog:

Kev Ruaj Ntseg

Granite muaj cov coefficient qis ntawm thermal expansion, uas txhais tau tias nws tsis cuam tshuam los ntawm kev hloov pauv kub. Qhov kev ruaj khov no ua kom ntseeg tau tias cov khoom siv ua wafer tseem raug thiab raug, txawm tias thaum muaj kev hloov pauv kub.

Kev ruaj khov

Granite yog ib yam khoom siv uas ruaj khov thiab tiv taus kev puas tsuaj. Nws muab kev ruaj khov rau cov hauv paus tshuab thiab cov khoom siv, ua kom ntseeg tau tias cov khoom siv siv tau ntev thiab txhim khu kev qha.

Kev Ntsuas Tseeb

Qhov sib npaug ntawm cov qauv ntawm granite ua kom cov khoom siv tswj tau nws qhov tseeb thiab raug. Qhov no yog qhov tseem ceeb thaum lub sijhawm ua cov wafer uas txawm tias qhov kev hloov pauv me me tuaj yeem ua rau cov wafer tsis lees txais.

Xaus lus

Xaus lus, kev siv granite hauv cov khoom siv ua wafer yog ib qho tseem ceeb ntawm cov txheej txheem tsim khoom semiconductor. Nws cov yam ntxwv tshwj xeeb ntawm kev ruaj khov, kev ua haujlwm ntev, thiab kev ua kom raug ua rau nws yog cov khoom siv zoo tshaj plaws rau kev siv hauv cov hauv paus tshuab, cov khoom, thiab cov ntaub polishing. Kev siv granite hauv cov khoom siv ua wafer tau txhim kho qhov zoo, kev ua kom raug, thiab kev ntseeg siab ntawm kev lag luam semiconductor, kom ntseeg tau tias cov khoom siv hluav taws xob thiab thev naus laus zis tshiab tshaj plaws tau tsim nrog cov qauv zoo tshaj plaws.