Kev ruaj ntseg thiab raug ntawm txhua lub tshuab ultra-precision-los ntawm cov tshuab ntsuas loj (CMMs) mus rau cov khoom siv semiconductor lithography-piv txwv li nws lub hauv paus granite. Thaum cuam tshuam nrog monolithic hauv paus ntawm cov nplai tseem ceeb, lossis ntau ntu Granite Flat Panels, kev sib dhos thiab kev teeb tsa yog qhov tseem ceeb raws li kev tsim khoom precision nws tus kheej. Tsuas tso lub vaj huam sib luag tiav tsis txaus; Cov kev cai ib puag ncig thiab cov txheej txheem yuav tsum tau ua kom tau raws li kev khaws cia thiab siv lub vaj huam sib luag cov ntawv pov thawj sub-micron flatness.
1. Lub hauv paus: Ib qho ruaj khov, theem substrate
Qhov kev xav tsis zoo tshaj plaws yog tias cov vaj huam sib luag granite precision, xws li cov khoom siv los ntawm peb cov ZHHIMG® Dub Granite (3100 kg / m³), tuaj yeem kho qhov chaw tsis ruaj khov. Thaum granite muaj qhov tshwj xeeb rigidity, nws yuav tsum tau txais kev txhawb nqa los ntawm cov qauv tsim kho kom tsawg kawg rau lub sijhawm ntev deflection.
Cov cheeb tsam sib dhos yuav tsum muaj cov pob zeb ua pob zeb uas tsis yog qib nkaus xwb tab sis kuj tau kho kom zoo, feem ntau rau cov tub rog-qib specifications rau thickness thiab ceev-mirroring lub $1000mm $ tuab, ultra-hard qhob pem teb hauv ZHHIMG tus kheej lub rooj sib txoos. Qhov tseem ceeb, qhov no substrate yuav tsum tau cais tawm los ntawm lwm qhov chaw vibration. Hauv kev tsim ntawm peb lub hauv paus tshuab loj tshaj plaws, peb suav nrog cov ntsiab lus zoo li lub qhov dej tiv thaiv kev vibration nyob ib puag ncig peb cov chav ntsuas ntsuas kom ntseeg tau tias lub hauv paus nws tus kheej zoo li qub thiab cais tawm.
2. Cov txheej txheem cais: Grouting thiab Leveling
Kev sib cuag ncaj qha ntawm lub vaj huam sib luag granite thiab lub hauv paus pob zeb yog nruj me ntsis zam. Lub hauv paus granite yuav tsum tau txais kev txhawb nqa ntawm qhov tshwj xeeb, lej suav cov ntsiab lus kom tsis txhob muaj kev ntxhov siab sab hauv thiab tuav nws cov ntawv pov thawj geometry. Qhov no yuav tsum muaj cov txheej txheem kev ua haujlwm zoo thiab txheej txheej grouting.
Thaum lub vaj huam sib luag tau raug muab tso rau hauv qhov kev hloov kho tau yooj yim jacks lossis wedges, lub zog siab, uas tsis yog-shrink, precision grout yog pumped rau hauv kab noj hniav ntawm granite thiab substrate. Qhov tshwj xeeb no cov lus txiav txim siab los ua cov high-ceev, uniform interface tus neeg hnyav, tiv thaiv sag lossis distortion uas yog qhia sab hauv kev ntxhov siab thiab lub sijhawm sib zog dhau sijhawm. Cov kauj ruam no ua tau zoo hloov lub vaj huam sib luag granite thiab lub hauv paus mus rau hauv ib qho, cohesive, thiab nruj.
3. Thermal thiab Temporal Equilibrium
Raws li nrog rau tag nrho cov high-precision metrology ua hauj lwm, siab ntev yog qhov tseem ceeb. Lub vaj huam sib luag granite, cov khoom siv grouting, thiab cov pob zeb ua vaj tse yuav tsum ncav cuag thermal sib npaug nrog rau qhov chaw ua haujlwm nyob ib puag ncig ua ntej kev kuaj xyuas zaum kawg. Cov txheej txheem no tuaj yeem siv sijhawm ntau hnub rau cov vaj huam sib luag loj heev.
Tsis tas li ntawd, qhov kev hloov kho theem-ua los ntawm kev siv cov cuab yeej xws li laser interferometers thiab qib hluav taws xob-yuav tsum tau ua kom qeeb, feeb increments, tso cai rau lub sij hawm rau cov khoom los daws teeb meem. Peb cov kws tshaj lij kws tshaj lij, uas ua raws li cov qauv ntsuas thoob ntiaj teb nruj (DIN, ASME), nkag siab tias rushing qhov kawg theem tuaj yeem qhia txog kev ntxhov siab latent, uas yuav tshwm sim tom qab qhov tseeb drift.
4. Kev sib xyaw ua ke ntawm cov khoom siv thiab kev sib dhos
Rau ZHHIMG cov kev cai Granite Cheebtsam los yog Granite Flat Panels uas integrate linear motors, cua bearings, los yog CMM rails, lub rooj sib txoos zaum kawg yuav tsum huv huv. Peb cov chav huv huv sib dhos, uas ua rau cov khoom siv semiconductor ib puag ncig, yog qhov tsim nyog vim tias txawm tias cov plua plav microscopic daig ntawm granite thiab cov hlau tivthaiv tuaj yeem ua rau micro-deflection. Txhua lub interface yuav tsum tau ua tib zoo ntxuav thiab xyuas ua ntej zaum kawg fastening, kom ntseeg tau tias cov khoom ntawm qhov seem stability yog flawlessly pauv mus rau hauv lub tshuab nws tus kheej.
Los ntawm kev hwm cov kev cai nruj no, cov neeg siv khoom xyuas kom lawv tsis yog tsuas yog txhim kho cov khoom siv xwb, tab sis tau ua tiav qhov kawg ntawm Datum rau lawv cov khoom siv ultra-precision-lub hauv paus lav los ntawm ZHHIMG cov khoom siv science thiab kev tsim khoom.
Post lub sij hawm: Oct-29-2025