In kev lag luam semiconductor kev lag luam, qhov tseeb ntawm cov khoom siv tshuaj xyuas wafer yog qhov tseem ceeb rau kev ua kom zoo ntawm kev sib xyaw ua ke. High-precision granite tshuab hauv paus, zoo li cov uas muab los ntawm ZHHIMG®, ua lub luag haujlwm tseem ceeb hauv kev txhim kho cov khoom siv zoo li no. Nov yog qhov lawv ua qhov txawv.
Exceptional Dimensional StabilityGranite boasts qhov tsis tshua muaj thermal expansion coefficient, nyob ib ncig ntawm (4–8) × 10⁻⁶ / ℃, ho qis dua ntau cov hlau. Nyob rau hauv nruj tswj ib puag ncig ntawm semiconductor factories, qhov twg txawm me me qhov kub thiab txias fluctuations tuaj yeem ua rau kev ntsuas yuam kev, granite tshuab hauv paus tseem ruaj khov. Qhov kev ruaj ntseg no ua kom ntseeg tau tias qhov chaw ntawm cov khoom hauv cov khoom siv tshuaj ntsuam xyuas wafer nyob twj ywm raug, tiv thaiv cov thermal-induced deviations uas yuav cuam tshuam qhov precision ntawm kev soj ntsuam cov txiaj ntsig.
Superior Vibration DampingProduction pem teb feem ntau muaj kev vibrations los ntawm ntau qhov chaw. Granite lub hauv paus damping zog, nrog ib tug damping piv ntawm 0.05-0.1, zoo nqus thiab dissipate cov vibrations. Rau wafer insp
ection, uas xav tau high-resolution imaging thiab meej sensor nyeem, qhov txo nyob rau hauv vibrations muab los ntawm granite bases yog invaluable. Nws txo qis qhov cuam tshuam uas tuaj yeem ua rau pom cov duab tsis pom lossis cuam tshuam cov ntaub ntawv sensor, ua rau cov khoom siv los ntes cov ntaub ntawv meej thiab meej txog lub wafer qhov chaw thiab cov qauv sab hauv.
High Rigidity thiab Hnav Resistance Nrog qhov ceev ntawm kwv yees li 3100 kg / m³, ZHHIMG® lub granite tshuab hauv paus muaj qhov zoo kawg nkaus rigidity. Lawv tuaj yeem txhawb nqa cov khoom hnyav ntawm cov khoom siv tshuaj xyuas wafer yam tsis muaj deforming, tswj kev sib dhos ntawm cov tshuab kho qhov muag thiab cov tshuab. Tsis tas li ntawd, granite lub siab hardness (Mohs scale 6-7) thiab zoo heev hnav tsis kam xyuas kom meej tias lub hauv paus ntawm lub tshuab tseem tiaj tus thiab du thaum lub sij hawm. Qhov kev sib xws no yog qhov tseem ceeb rau qhov raug mus ntev, vim tias kev hnav lossis deformation ntawm lub hauv paus tuaj yeem maj mam degrade cov cuab yeej precision.
Chemical InertnessSemiconductor manufacturing muaj feem cuam tshuam rau ntau yam tshuaj. Granite cov tshuaj inertness ua rau nws tiv taus corrosion los ntawm cov tshuaj no. Cov cuab yeej no tiv thaiv kev ncaj ncees ntawm lub hauv paus tshuab, tiv thaiv kev puas tsuaj los ntawm cov tshuaj lom neeg uas tuaj yeem cuam tshuam rau kev ruaj ntseg thiab qhov tseeb ntawm cov cuab yeej tshuaj xyuas.
Hauv kev xaus, high-precision granite tshuab hauv paus tsis yog ib qho kev tivthaiv tab sis yog ib qho tseem ceeb rau kev ua tiav qhov tseeb ntawm cov khoom siv tshuaj xyuas wafer. Thaum xaiv granite tshuab hauv paus, xaiv cov chaw muab kev ntseeg siab zoo li ZHHIMG®. Nrog rau ntau daim ntawv pov thawj thiab kev cog lus rau qhov zoo, ZHHIMG® xyuas kom meej tias txhua lub tshuab granite muab cov kev ntseeg siab thiab kev ua tau zoo uas xav tau rau kev tsim khoom semiconductor siab heev.
Post lub sij hawm: Jun-03-2025