Nyob rau hauv tej-ntug teb xws li semiconductor manufacturing thiab kho qhov muag ntsuas los ua ke, kev nrhiav ntawm sub-micron los yog txawm nanometer-theem positioning raug los ntawm multi-axis precision worktables yog kawg. High-density granite (nrog qhov ntom ntawm ≥3100kg / m³) yog ib qho khoom siv tseem ceeb rau kev ua kom zoo ntawm cov khoom ua haujlwm vim nws lub cev tshwj xeeb. Cov hauv qab no yog ib qho kev soj ntsuam ntawm nws qhov txiaj ntsig tsis tuaj yeem hloov tau los ntawm plaub qhov loj me.
1. Kev ruaj ntseg zoo: Ib qho "natural barrier" los cuam tshuam kev vibration
Thaum lub rooj ua haujlwm ntau lub axis nyob rau hauv kev ua haujlwm siab ceev (nrog cov kab nrawm tshaj 500mm / s) lossis hauv kev sib txuas ntawm ntau lub axis, kev vibrations nyuaj yuav tshwm sim. Cov ntxhia hauv cov khoom ntawm high-density granite yog sib cuam tshuam, nrog lub ntuj zaus tsawg li 10-20Hz, thiab tuaj yeem nqus tau ntau dua 90% ntawm lub zog sab nraud. Nyob rau hauv cov txheej txheem semiconductor nti ntim, nws tuaj yeem tswj qhov chaw ua haujlwm hloov chaw yuam kev nyob rau hauv ± 0.5μm, tsis txhob xaim offset lossis nti puas los ntawm kev co. Piv nrog rau cov khoom siv hlau cam khwb cia, qhov kev vibration attenuation tus nqi ntawm granite yog peb zaug sai dua, txhim kho qhov sib xws ntawm kev ua haujlwm.
2. Thermal stability: "Stabilizing thauj tog rau nkoj" tiv thaiv qhov kub thiab txias
Nyob rau hauv qhov chaw ua haujlwm precision, qhov kub hloov pauv ntawm 0.1 ℃ tuaj yeem ua rau cov khoom deformation ntawm 0.1μm / m. Lub coefficient ntawm thermal expansion ntawm high-density granite tsuas yog (4-8) × 10⁻⁶ / ℃, uas yog kwv yees li 1/6 ntawm aluminium alloy. Nyob rau hauv cov xwm txheej siab xws li kev sib tsoo ntawm qhov muag pom, txawm tias qhov chaw ua haujlwm kub hloov pauv los ntawm ± 2 ℃, lub hauv paus granite tseem tuaj yeem tswj hwm qhov micron-theem qhov tseeb ntawm cov khoom tseem ceeb ntawm lub rooj zaum ua haujlwm, kom ntseeg tau tias lub lens curvature yuam kev tsawg dua 0.01D, deb tshaj qhov kev lag luam tus qauv.
3. Ultra-high rigidity: Lub "Solid Foundation Pob zeb" rau kev coj tus kheej hnyav
Multi-axis worktables feem ntau nruab nrog cov khoom hnyav xws li lub taub hau laser thiab sojntsuam arrays (nrog rau ib qho kev thauj khoom ntau tshaj 200kg). Lub zog compressive ntawm high-density granite yog ≥200MPa, thiab nws tuaj yeem tiv taus cov khoom hnyav ntawm ntau dua 1000kg / m² yam tsis muaj deformation mus tas li. Tom qab qee lub tuam txhab aerospace tau txais cov khoom siv no, thaum nws lub rooj ua haujlwm tsib-axis nqa ib qho kev ua haujlwm ntawm 500kg, Z-axis verticality yuam kev tsuas yog nce los ntawm 0.3μm, ua kom muaj txiaj ntsig zoo ntawm cov txheej txheem nkhaus.
4. Kev ua haujlwm ntev ntev: Txo cov nqi tag nrho lub neej
Mohs hardness ntawm granite nce mus txog 6 mus rau 7, thiab nws hnav tsis kam yog ntau tshaj tsib npaug ntawm cov hlau zoo tib yam. Nyob rau hauv 3C cov khoom lag luam ntau lawm kab uas ua haujlwm rau qhov nruab nrab ntawm 16 teev hauv ib hnub, lub hauv paus granite tuaj yeem ua tiav kev ua haujlwm tsis pub dawb rau 8 txog 10 xyoo, thaum lub hauv paus hlau cam khwb cia pom tias hnav ntawm cov lus qhia kev sib cuag ntawm qhov chaw (qhov tob> 5μm) tom qab 3 xyoos. Tsis tas li ntawd, nws cov tshuaj inertness ua rau nws tswj tau qhov roughness ntawm Ra≤0.2μm nyob rau hauv acidic thiab alkaline ib puag ncig, tsis tu ncua muab ib tug ruaj khov installation siv rau precision Cheebtsam xws li grating rulers thiab linear motors.
Xaus: High-density Granite - "Hidden Champion" ntawm Precision Manufacturing
Los ntawm nanoscale qhov chaw mus rau kev ua haujlwm hnyav, high-density granite yog reshaping cov txheej txheem kev ua haujlwm ntawm ntau lub axis precision worktables nrog nws cov kev ua tau zoo tsis sib xws. Rau cov lag luam uas ua raws li qhov kawg thiab kev ntseeg siab, xaiv cov khoom zoo granite hauv paus (xws li ZHHIMG® cov khoom muaj ntawv pov thawj los ntawm ISO peb lub tshuab) tsis yog tsuas yog lav rau kev tsim khoom tam sim no tab sis kuj yog ib qho kev nqis peev hauv kev txhim kho yav tom ntej.
Post lub sij hawm: Jun-09-2025