Granite platform nplooj siab rau cov chav huv si: Zero hlau ion tso tawm, kev xaiv zoo tshaj plaws rau cov khoom siv tshuaj xyuas wafer.

Nyob rau hauv lub tshav pob ntawm semiconductor wafer tshuaj xyuas, lub purity ntawm lub cleanroom ib puag ncig yog ncaj qha ntsig txog cov khoom yield. Raws li qhov tseeb ntawm cov txheej txheem tsim chip txuas ntxiv txhim kho, qhov yuav tsum tau ua rau lub platform nqa ntawm cov cuab yeej tshawb nrhiav tau dhau los ua nruj. Granite platforms, nrog rau lawv cov yam ntxwv ntawm xoom hlau ion tso tawm thiab tsis tshua muaj kuab paug, tau tshaj cov khoom siv stainless hlau ib txwm muaj thiab dhau los ua cov kev daws teeb meem rau cov khoom siv tshuaj xyuas wafer.

Granite yog ib lub pob zeb uas tsis muaj zog uas yog tsim los ntawm cov hlau tsis muaj hlau xws li quartz, feldspar thiab mica. Cov yam ntxwv no muab qhov zoo ntawm xoom hlau ion tso tawm. Nyob rau hauv sib piv, stainless hlau, raws li ib tug alloy ntawm hlau xws li hlau, chromium thiab npib tsib xee, yog nquag electrochemical corrosion ntawm nws nto vim yaig ntawm dej vapor thiab acidic los yog alkaline gases nyob rau hauv ib tug huv chav tsev, ua rau nag lossis daus ntawm hlau ions xws li Fe²⁺ thiab Cr³⁺. Thaum cov ions me me txuas mus rau saum npoo ntawm wafer, lawv yuav hloov cov khoom hluav taws xob ntawm cov khoom siv semiconductor hauv cov txheej txheem tom ntej xws li photolithography thiab etching, ua rau qhov pib voltage drift ntawm lub transistor, thiab tseem ua rau luv luv Circuit Court. Cov ntaub ntawv pov thawj ntawm lub tsev kawm txuj ci qhia tau hais tias tom qab lub platform granite tau txuas ntxiv mus rau qhov simulated huv chav tsev kub thiab av noo ib puag ncig (23 ± 0.5 ℃, 45% ± 5% RH) rau 1000 teev, qhov tso tawm ntawm cov hlau ions qis dua qhov kev kuaj pom (< 0.1ppb). Qhov tsis xws luag ntawm wafers tshwm sim los ntawm cov hlau ion paug thaum siv stainless hlau platforms yuav siab li 15% mus rau 20%.

Nyob rau hauv cov nqe lus ntawm particle contamination tswj, granite platforms kuj ua tau zoo heev. Cov chav huv huv muaj qhov xav tau siab heev rau qhov concentration ntawm cov khoom tshem tawm hauv huab cua. Piv txwv li, nyob rau hauv ISO Class 1 cleanrooms, tus naj npawb ntawm 0.1μm particles tso cai rau ib lub cubic meter tsis tshaj 10. Txawm hais tias lub stainless steel platform tau undergone polishing kev kho mob, nws tseem yuav ua tau hlau khib nyiab los yog oxide nplai tev tawm vim yog sab nraud quab yuam xws li cov khoom vibration thiab cov neeg ua hauj lwm, uas tuaj yeem cuam tshuam nrog kev tshawb pom kev kho qhov muag lossis khawb ntawm qhov chaw. Granite platforms, nrog lawv cov ntxhia pob zeb qauv (qhov ntom ≥2.7g / cm³) thiab siab hardness (6-7 ntawm Mohs nplai), tsis nquag hnav lossis tawg thaum siv mus ntev. Kev ntsuas ntsuas qhia tau tias lawv tuaj yeem txo qhov concentration ntawm cov khoom raug tshem tawm hauv huab cua ntawm thaj tsam ntawm cov cuab yeej kuaj pom los ntawm ntau dua 40% piv rau cov hlau tsis muaj steel platforms, ua haujlwm zoo tswj cov qauv qib chav huv.

Ntxiv rau nws cov yam ntxwv huv si, kev ua tau zoo ntawm granite platforms kuj tseem nyob deb tshaj ntawm cov hlau tsis muaj steel. Nyob rau hauv cov nqe lus ntawm thermal stability, nws coefficient ntawm thermal expansion tsuas yog (4-8) × 10⁻⁶ / ℃, tsawg tshaj li ib nrab ntawm stainless hlau (kwv yees li 17 × 10⁻⁶ / ℃), uas muaj peev xwm ua kom zoo dua qhov chaw ntawm cov cuab yeej nrhiav kom pom thaum qhov kub thiab txias hauv chav huv si fluctuates. Cov yam ntxwv siab damping (damping ratio> 0.05) tuaj yeem txo qis kev vibration ntawm cov cuab yeej thiab tiv thaiv qhov kev tshawb nrhiav los ntawm kev co. Nws lub ntuj corrosion kuj ua rau nws nyob ruaj khov txawm tias thaum raug photoresist cov kuab tshuaj, etching gases thiab lwm yam tshuaj yam tsis tas yuav tsum muaj kev tiv thaiv txheej ntxiv.

Tam sim no, granite platforms yog dav siv nyob rau hauv advanced wafer manufacturing nroj tsuag. Cov ntaub ntawv qhia tau hais tias tom qab siv lub granite platform, qhov kev txiav txim tsis raug ntawm wafer nto particle nrhiav tau tsawg dua los ntawm 60%, cov khoom siv calibration tau txuas ntxiv peb zaug, thiab tag nrho cov nqi tsim khoom tau nqis los ntawm 25%. Raws li kev lag luam semiconductor txav mus rau qhov siab dua, granite platforms, nrog rau lawv cov txiaj ntsig zoo xws li xoom hlau ion tso tawm thiab cov pa phem tsis zoo, yuav txuas ntxiv muab kev txhawb nqa ruaj khov thiab txhim khu kev qha rau wafer tshuaj xyuas, dhau los ua lub zog tseem ceeb ntawm kev ua haujlwm ntawm kev lag luam.