Hauv kev tsim khoom semiconductor, lub tshuab photolithography yog cov cuab yeej tseem ceeb uas txiav txim siab qhov tseeb ntawm cov chips, thiab granite puag, nrog nws ntau yam ntxwv, tau dhau los ua ib qho tseem ceeb ntawm lub tshuab photolithography.
Thermal stability: Lub "Shield" tiv thaiv kub hloov
Thaum lub tshuab photolithography ua haujlwm, nws tsim kom muaj cua sov ntau. Txawm tias qhov kub thiab txias ntawm tsuas yog 0.1 ℃ tuaj yeem ua rau deformation ntawm cov khoom siv thiab cuam tshuam rau qhov tseeb photolithography. Lub coefficient ntawm thermal expansion ntawm granite yog tsawg heev, tsuas yog 4-8 × 10⁻⁶ / ℃, uas yog kwv yees li 1/3 ntawm cov hlau thiab 1/5 ntawm cov aluminium alloy. Qhov no ua rau lub hauv paus granite kom muaj kev ruaj ntseg ntawm qhov ntev thaum lub tshuab photolithography ua haujlwm ntev los yog thaum qhov kub thiab txias ib puag ncig hloov, kom ntseeg tau qhov tseeb qhov chaw ntawm cov khoom siv kho qhov muag thiab cov khoom siv tshuab.
Super anti-vibration kev ua tau zoo: "sponge" uas absorbs kev co
Nyob rau hauv lub Hoobkas semiconductor, kev ua haujlwm ntawm cov khoom siv nyob ib puag ncig thiab kev txav ntawm tib neeg tuaj yeem tsim kev vibrations. Granite muaj qhov ntom ntom ntom thiab ib qho kev siv tawv, thiab nws muaj cov khoom siv damping zoo, nrog cov damping piv 2 txog 5 zaug uas muaj hlau. Thaum cov kev co sab nraud raug xa mus rau lub hauv paus granite, kev sib txhuam ntawm cov pob zeb hauv cov pob zeb hauv av hloov cov kev vibration zog rau hauv lub zog hluav taws xob rau dissipation, uas tuaj yeem txo qhov kev vibration hauv lub sij hawm luv luv, tso cai rau lub tshuab photolithography kom ceev nrooj rov qab ruaj khov thiab tsis txhob plam lossis misalignment ntawm photolithography qauv vim kev co.
Chemical stability: "Tus Saib Xyuas" ntawm ib puag ncig huv
Sab hauv ntawm lub tshuab photolithography tuaj rau hauv kev sib cuag nrog ntau yam tshuaj lom neeg tshaj tawm, thiab cov khoom siv hlau zoo tib yam muaj kev cuam tshuam los yog kev tso tawm ntawm cov khoom. Granite yog tsim los ntawm cov zaub mov xws li quartz thiab feldspar. Nws muaj cov tshuaj lom neeg ruaj khov thiab muaj zog corrosion kuj. Tom qab tau soaked nyob rau hauv cov kua qaub thiab alkali daws, lub nto corrosion yog heev me me. Lub caij no, nws cov qauv ntom ntom ua rau yuav luag tsis muaj cov khib nyiab lossis plua plav, ua tau raws li qhov yuav tsum tau ua ntawm cov qauv huv huv siab tshaj plaws thiab txo qhov kev pheej hmoo ntawm wafer paug.
Kev ua kom yoog raws: "cov khoom siv zoo tagnrho" rau kev tsim cov qauv zoo
Cov khoom tseem ceeb ntawm lub tshuab photolithography yuav tsum tau muab ntsia rau ntawm qhov chaw siv high-precision. Cov txheej txheem sab hauv ntawm granite yog ib yam nkaus thiab nws yog ib qho yooj yim rau kev ua tiav rau qhov siab heev los ntawm kev sib tsoo, polishing thiab lwm yam kev siv. Nws qhov flatness tuaj yeem ncav cuag ≤0.5μm / m, thiab qhov roughness ntawm Ra yog ≤0.05μm, muab lub hauv paus meej rau cov khoom xws li cov lo ntsiab muag kho qhov muag.
Ntev lifespan thiab txij nkawm-dawb: "cov cuab yeej ntse" kom txo nqi
Piv nrog rau cov ntaub ntawv hlau uas ua rau qaug zog thiab tawg dhau kev siv mus sij hawm ntev, granite tsis tshua muaj cov yas deformation los yog tawg nyob rau hauv ib txwm loads, thiab nws tsis tas yuav tsum tau kho deg, yog li tsis txhob muaj kev pheej hmoo ntawm txheej tev thiab kab mob. Hauv kev siv tswv yim, tom qab siv tau ntau xyoo, qhov tseem ceeb ntawm kev ua tau zoo ntawm lub hauv paus granite tseem tuaj yeem nyob ruaj khov, txo cov nqi khiav lag luam thiab kho cov khoom siv.
Los ntawm thermal stability, kev co tsis kam mus rau tshuaj inertness, ntau yam ntxwv ntawm granite puag zoo kawg nkaus ua tau raws li qhov yuav tsum tau ntawm lub tshuab photolithography. Raws li cov txheej txheem tsim cov nti txuas ntxiv txhim kho mus rau qhov siab dua, cov hauv paus granite yuav txuas ntxiv mus ua lub luag haujlwm tsis tuaj yeem hloov pauv hauv kev tsim khoom semiconductor.
Post lub sij hawm: May-20-2025