Hauv kev tsim khoom semiconductor, lub tshuab photolithography yog ib qho cuab yeej tseem ceeb uas txiav txim siab qhov tseeb ntawm cov chips, thiab lub hauv paus granite, nrog nws ntau yam ntxwv, tau dhau los ua ib qho tseem ceeb ntawm lub tshuab photolithography.
Kev ruaj khov ntawm thermal: Lub "shield" tiv thaiv kev hloov pauv kub
Thaum lub tshuab photolithography ua haujlwm, nws tsim cov cua sov ntau heev. Txawm tias qhov kub hloov pauv ntawm tsuas yog 0.1 ℃ tuaj yeem ua rau deformation ntawm cov khoom siv thiab cuam tshuam rau qhov tseeb ntawm photolithography. Tus coefficient ntawm thermal expansion ntawm granite yog qis heev, tsuas yog 4-8 × 10⁻⁶ / ℃, uas yog kwv yees li 1/3 ntawm cov hlau thiab 1/5 ntawm cov hlau txhuas. Qhov no ua rau lub hauv paus granite tswj tau qhov ruaj khov thaum lub tshuab photolithography ua haujlwm ntev lossis thaum qhov kub ib puag ncig hloov pauv, xyuas kom meej qhov chaw ntawm cov khoom siv kho qhov muag thiab cov qauv kho tshuab.
Kev ua haujlwm tiv thaiv kev co zoo heev: Lub "sponge" uas nqus kev co
Hauv lub Hoobkas semiconductor, kev ua haujlwm ntawm cov khoom siv nyob ib puag ncig thiab kev txav mus los ntawm tib neeg tuaj yeem tsim kev co. Granite muaj qhov ceev ceev thiab cov qauv tawv, thiab nws muaj cov khoom zoo heev, nrog rau qhov sib piv ntawm kev co 2 txog 5 npaug ntawm cov hlau. Thaum cov kev co sab nraud raug xa mus rau lub hauv paus granite, kev sib txhuam ntawm cov pob zeb hauv av hloov lub zog co mus rau hauv lub zog cua sov rau kev tshem tawm, uas tuaj yeem txo qhov kev co hauv lub sijhawm luv luv, tso cai rau lub tshuab photolithography kom rov qab tau qhov ruaj khov sai sai thiab zam kev ua kom tsis meej lossis tsis sib xws ntawm cov qauv photolithography vim kev co.
Kev ruaj khov tshuaj lom neeg: Tus "Tus Saib Xyuas" ntawm Ib puag ncig huv si
Sab hauv ntawm lub tshuab photolithography los sib cuag nrog ntau yam tshuaj lom neeg, thiab cov khoom siv hlau ib txwm muaj feem yuav xeb lossis tso tawm cov khoom me me. Granite yog tsim los ntawm cov zaub mov xws li quartz thiab feldspar. Nws muaj cov khoom siv tshuaj ruaj khov thiab muaj zog tiv taus corrosion. Tom qab raug tsau rau hauv cov kua qaub thiab alkali daws, qhov corrosion ntawm qhov chaw yog me me heev. Lub caij no, nws cov qauv ntom ntom tsim yuav luag tsis muaj cov khib nyiab lossis hmoov av, ua tau raws li qhov yuav tsum tau ua ntawm cov qauv chav huv siab tshaj plaws thiab txo qhov kev pheej hmoo ntawm kev ua qias tuaj ntawm wafer.
Kev hloov pauv tau yooj yim: Cov "khoom siv zoo tshaj plaws" rau kev tsim cov qauv ntsuas meej
Cov khoom tseem ceeb ntawm lub tshuab photolithography yuav tsum tau teeb tsa rau ntawm qhov chaw siv high-precision. Cov qauv sab hauv ntawm granite yog sib xws thiab nws yooj yim rau kev ua tiav mus rau qhov tseeb siab heev los ntawm kev sib tsoo, polishing thiab lwm yam txheej txheem. Nws qhov tiaj tiaj tuaj yeem ncav cuag ≤0.5μm / m, thiab qhov roughness ntawm qhov chaw Ra yog ≤0.05μm, muab lub hauv paus teeb tsa meej rau cov khoom xws li cov iav kho qhov muag.
Siv tau ntev thiab tsis tas yuav saib xyuas: Cov "cuab yeej ntse" rau kev txo nqi
Piv nrog cov khoom siv hlau uas yooj yim qaug zog thiab tawg thaum siv ntev, granite tsis tshua muaj kev hloov pauv yas lossis tawg thaum lub sijhawm thauj khoom ib txwm muaj, thiab nws tsis tas yuav kho qhov chaw, yog li zam kev pheej hmoo ntawm kev tev tawv thiab kev ua qias tuaj. Hauv kev siv tiag tiag, tom qab siv tau ntau xyoo, cov cim qhia kev ua tau zoo tseem tuaj yeem ruaj khov, txo cov nqi khiav lag luam thiab kev saib xyuas ntawm cov khoom siv.
Txij li ntawm kev ruaj khov thermal, kev tiv thaiv kev co mus rau kev tsis muaj tshuaj lom neeg, ntau yam ntxwv ntawm lub hauv paus granite ua tau raws li qhov xav tau ntawm lub tshuab photolithography. Raws li cov txheej txheem tsim khoom chip txuas ntxiv mus rau qhov tseeb dua, cov hauv paus granite yuav txuas ntxiv ua lub luag haujlwm tseem ceeb hauv kev tsim khoom semiconductor.
Lub sijhawm tshaj tawm: Tsib Hlis-20-2025