Nyob rau hauv cov teb ntawm precision manufacturing thiab kev tshawb fawb kev tshawb fawb, lub flatness ntawm granite precision platforms yog ib tug tseem ceeb qhia kom paub tseeb tias cov khoom raug. Cov hauv qab no yog cov lus qhia ntxaws ntxaws rau ntau txoj hauv kev tshawb pom thiab lawv cov txheej txheem ua haujlwm rau koj. cov
I. Laser interferometer Detection method
Lub laser interferometer yog cov cuab yeej zoo tshaj plaws rau kev kuaj pom qhov flatness siab. Siv lub ZYGO GPI XP laser interferometer ua piv txwv, nws qhov kev daws teeb meem tuaj yeem ncav cuag 0.1nm. Thaum ua qhov kev kuaj pom, ua ntej kho qhov teeb pom kev ntawm lub interferometer nrog lub platform thiab faib lub platform nto rau hauv 50mm × 50mm kab sib chaws. Tom qab ntawd, cov ntaub ntawv cuam tshuam nrog cov ntaub ntawv tau sau los ntawm qhov taw tes, thiab cov ntaub ntawv raug tsim thiab tshuaj xyuas siv Zernike polynomial kom tau txais qhov kev ua yuam kev flatness. Txoj kev no siv tau rau cov platforms siab thiab tuaj yeem kuaj xyuas qhov tsis sib xws ntawm ≤0.5μm / m². Nws yog feem ntau siv hauv kev tshawb nrhiav cov tshuab photolithography thiab high-end peb-coordinate ntsuas tshuab platforms. cov
Ii. Electronic Level Array Method
Qhov ntsuas hluav taws xob qib array yog qhov yooj yim rau kev khiav lag luam thiab ua haujlwm tau zoo. TESA A2 hluav taws xob theem (nrog rau kev daws teeb meem ntawm 0.01μm / m) tau xaiv thiab teem rau hauv 9 × 9 array raws X / Y axis kev taw qhia ntawm lub platform. Los ntawm synchronously sau cov ntaub ntawv inclination ntawm txhua qib thiab tom qab ntawd siv qhov tsawg tshaj plaws square txoj kev suav, tus nqi flatness tuaj yeem raug tau. Txoj kev no tuaj yeem txheeb xyuas qhov pom ntawm lub zos concavity thiab convexity ntawm lub platform. Piv txwv li, qhov hloov pauv ntawm 0.2μm hauv 50mm ntau kuj tuaj yeem kuaj pom, uas tsim nyog rau kev tshawb pom sai hauv kev tsim khoom loj. cov
Iii. Optical Flat Crystal Method
Txoj kev kho qhov muag tiaj tus siv lead ua yog tsim rau kev tshawb pom ntawm thaj chaw me me platforms. Txuas lub optical tiaj tus siv lead ua nruj nreem rau saum npoo yuav tsum tau sim ntawm lub platform thiab saib xyuas cov kev cuam tshuam fringes tsim ntawm lawv nyob rau hauv lub illumination ntawm ib tug monochromatic teeb qhov chaw (xws li sodium teeb). Yog hais tias cov kab txaij yog cov kab txaij ncaj ncaj, nws qhia tias zoo flatness. Yog hais tias nkhaus kab txaij tshwm sim, xam qhov flatness yuam kev raws li qib ntawm kab txaij curvature. Txhua kab kab nkhaus sawv cev qhov siab sib txawv ntawm 0.316μm, thiab cov ntaub ntawv flatness tuaj yeem tau los ntawm kev hloov pauv yooj yim. cov
Plaub. Peb-coordinate Measuring machine Inspection method
Lub tshuab ntsuas peb-coordinate tuaj yeem ua tiav qhov kev ntsuas siab hauv qhov chaw peb sab. Muab lub granite platform rau ntawm lub rooj ua haujlwm ntawm lub tshuab ntsuas thiab siv qhov kev sojntsuam kom sib sau cov ntaub ntawv los ntawm ntau lub ntsiab lus ntsuas ntawm qhov chaw ntawm lub platform. Lub tshuab ntsuas cov txheej txheem txheej txheem thiab tshuaj xyuas cov ntaub ntawv no los tsim cov ntaub ntawv qhia txog kev sib tw ntawm lub platform. Txoj kev no tuaj yeem tsis tsuas yog ntes flatness, tab sis kuj tau txais lwm yam geometric tsis ntawm lub platform ib txhij, thiab yog qhov tsim nyog rau kev tshawb pom dav dav ntawm granite platforms loj. cov
Kev paub txog cov kev tshawb pom no tuaj yeem pab koj txheeb xyuas qhov tiaj tus ntawm granite precision platform thiab muab kev lees paub txhim khu kev qha rau kev ua haujlwm ruaj khov ntawm cov cuab yeej precision.
Post lub sij hawm: May-29-2025