Hauv lub ntiaj teb ntawm kev tsim khoom siv siab heev—qhov twg qhov kev kam rau siab txo qis dua 5 microns thiab qhov ua tiav ntawm qhov chaw ze rau qhov zoo ntawm qhov muag—cov cuab yeej uas peb vam khom yuav tsum hloov pauv ntau dua li kev lig kev cai. Tau ntau xyoo, hlau thiab granite tau kav lub rooj sib tham txog kev ntsuas. Tab sis thaum cov lag luam xws li cov khoom siv semiconductor, aerospace optics, thiab cov khoom siv kho mob me me thawb mus rau hauv qhov chaw uas txawm tias thermal drift lossis microscopic hnav ua rau muaj qhov yuam kev tsis lees paub, ib chav kawm tshiab ntawm cov cuab yeej siv piv txwv tab tom tshwm sim: cov uas tsis yog ua los ntawm hlau lossis pob zeb, tab sis los ntawm cov khoom siv ceramic siab heev.
Ntawm ZHHIMG, peb tau tsiv mus dhau qhov tsuas yog muabTus Kav Hlau Ncaj Qhalos yog cov khoom lag luam Ceramic Square Ruler. Peb tab tom txhais dua qhov ntug ncaj tuaj yeem ua tau - los ntawm kev sib xyaw cov khoom siv ceramic ruaj khov nrog kev tsim qauv tshiab, suav nrog peb cov cuab yeej Custom Ceramic air floating ruler, ib qho kev daws teeb meem uas tshem tawm kev sib cuag tag nrho thaum xa cov nanometer-level repeatability.
Vim li cas thiaj xaiv cov khoom siv ua los ntawm av nplaum? Cov lus teb pib ntawm theem molecular. Tsis zoo li hlau—uas nthuav dav ntau nrog rau qhov kub—lossis granite—uas, txawm tias nws ruaj khov, tseem muaj qhov porous thiab heterogeneous—cov khoom siv ua los ntawm av nplaum zoo li zirconia-toughened alumina (ZTA) thiab silicon nitride muaj qhov porosity ze li xoom, qhov nyuaj tshwj xeeb (1400–1800 HV), thiab cov coefficients nthuav dav thermal qis li 3–4 µm/m·°C. Qhov no txhais tau tias Ceramic Straight Edge los ntawm ZHHIMG tswj nws cov geometry hla qhov kub thiab txias uas yuav ua rau cov cuab yeej ib txwm hloov pauv los ntawm ntau lub microns.
Tab sis cov khoom siv ib leeg tsis txaus. Qhov ua rau peb cov kav ceramic sib txawv yog qhov tseeb ntawm lawv cov khoom tsim. Siv cov pob zeb diamond sib tsoo, sub-aperture polishing, thiab laser interferometric validation hauv ISO Class 5 cleanrooms, peb ua tiav qhov ncaj ncees zoo dua 0.8 µm dhau 500 mm - tsis yog tsuas yog xyuas thaum xa khoom xwb, tab sis sau tseg hauv cov ntawv qhia calibration tag nrho uas taug qab mus rau NIST thiab PTB cov qauv. TxhuaTus Kav Hlau Ceramic Squaredhau los ntawm kev sim perpendicularity los ntawm kev siv hluav taws xob autocollimation, kom ntseeg tau tias cov ces kaum raug tuav kom tsis pub dhau 1 arc-second (≈0.5 µm deviation ntawm 100 mm).
Cov no tsis yog cov lus qhia theoretical. Lawv yog qhov tseeb ua haujlwm rau cov neeg siv khoom uas tsis tuaj yeem them taus kev sib haum xeeb. Ib tus neeg muab khoom siv EUV lithography tam sim no siv peb tus Ceramic Straight Ruler tsuas yog rau kev sib dhos cov thav duab txhawb nqa iav. "Cov kav hlau tau khoov thaum lub sijhawm ntev," lawv tus kws ntsuas metrologist hais rau peb. "Granite khaws cov khoom me me. Cov qauv ceramic? Nws tau ruaj khov rau 18 lub hlis - tsis tas yuav rov kho dua."
Txawm tias qhov geometry zoo meej kuj tuaj yeem raug cuam tshuam los ntawm kev sib cuag. Rub tus pas ntsuas hla ib qho chaw, thiab koj yuav muaj kev pheej hmoo ntawm kev khawb me me, kev cuam tshuam ntawm cov roj zaj duab xis, lossis kev hloov pauv elastic - tshwj xeeb tshaj yog rau cov hlau mos lossis cov khoom siv polished. Qhov ntawd yog qhov uas ZHHIMG txoj kev tsim kho tshiab dhia mus rau pem hauv ntej nrog Custom Ceramic air floating ruler.
Qhov no tsis yog tsuas yog ib lub ntug ncaj uas muaj qhov rau hauv xwb. Nws yog ib lub tshuab aerostatic uas tau tsim los ntawm kev siv cov txheej txheem suav lej los xa cov cua sib npaug, laminar thoob plaws tag nrho qhov ntev ntawm tus pas ntsuas. Thaum muab cua huv, qhuav (lossis nitrogen rau hauv qhov chaw rhiab heev), tus pas ntsuas yuav ntab 5-10 microns saum toj ntawm qhov workpiece—tshem tawm kev sib cuag ntawm lub cev thaum tswj kev sib phim zoo meej. Qhov tshwm sim? Kev ntsuas tsis sib cuag tiag tiag rau qhov tiaj tus, ncaj, lossis qhov siab ntawm cov kauj ruam, nrog kev rov ua dua mus txog ± 0.2 µm.
Muaj ib lub chaw kuaj quantum computing hauv Switzerland tam sim no siv lub ntsuas cua Ceramic 600-mm Custom Ceramic los tshuaj xyuas cov superconducting chip carriers. "Txhua qhov kev sib cuag - txawm tias nrog lub stylus mos - qhia txog kev ntxhov siab uas hloov pauv qhov kev ua tau zoo qubit," lawv tus kws ua haujlwm piav qhia. "Lub ntsuas cua ceramic floating muab rau peb qhov kev siv uas peb xav tau yam tsis tau kov qhov. Nws tau dhau los ua lub luag haujlwm tseem ceeb."
Qhov ua rau qhov no ua tau yog ZHHIMG txoj kev koom ua ke ntawm cov ntaub ntawv tshawb fawb, kev ua haujlwm kom raug, thiab kev txawj ntse ntawm metrology. Txawm hais tias ntau tus neeg muag khoom kho cov khoom siv ceramics ua cov khoom siv hauv tsev, peb ua kom lawv zoo li cov khoom siv ntsuas. Peb cov qauv Ceramic Square Ruler suav nrog cov npoo chamfered kom tiv thaiv kev tawg, cov nraub qaum tiav matte kom txo qhov ci ntsa iab hauv qab lub teeb pom kev zoo, thiab cov cim fiducial xaiv tau rau cov tshuab pom kev tsis siv neeg. Rau cov ntawv thov chav huv, cov nplaim yog polished rau Ra < 0.02 µm kom txo qis qhov lo rau cov khoom me me.
Thiab vim tias txhua daim ntawv thov txawv, peb tsis ntseeg tias yuav tsum muaj ib qho loj me uas haum rau txhua tus. Xav tau Ceramic Straight Edge nrog cov channel nqus tsev kom tuav cov wafers nyias thaum lub sijhawm tshuaj xyuas? Peb tau tsim nws. Xav tau ibtus pas ntsuas plaub fabnrog cov qhov hla uas phim rau koj lub CMM probe tip? Ua tiav lawm. Xav tau tus kav cua Ceramic Custom floating nrog cov sensors siab sib xyaw ua ke thiab cov lus teb digital leveling? Qhov ntawd twb nyob hauv kev sim beta nrog Tier-1 aerospace client.
Kev lees paub kev lag luam tau ua raws li. Hauv xyoo 2025 Global Advanced Metrology Review, ZHHIMG tau raug hais tias yog tib lub tuam txhab uas muab cov cuab yeej siv ceramic uas tau ntawv pov thawj tiav - suav nrog cov qauv ntab - nrog rau kev lees paub geometric tag nrho thiab kev taug qab digital. Tab sis qhov tseem ceeb tshaj, kev saws txais yuav sai dua: ntau dua 60% ntawm peb cov xaj kav ceramic tam sim no los ntawm cov lag luam uas yav dhau los xav tias cov cuab yeej no "overkill" - txog thaum lawv ntsuas qhov sib txawv.
Ib lub tuam txhab kho mob uas tsim cov khoom siv kho mob uas tau hloov los ntawm hlau mus rau peb lub Ceramic Square Ruler thiab pom lawv thawj zaug dhau los nce 22%. "Lub square qub tau tso cov micro-gouges rau ntawm cov titanium housings," lawv tus thawj coj QA hais. "Peb tsis tau paub txog qhov ntawd txog thaum peb hloov. Tam sim no, txhua qhov chaw dhau qhov kev kuaj xyuas pom thiab qhov ntev ntawm thawj zaug sim."
Yog li thaum koj ntsuam xyuas koj qhov kev hloov kho metrology tom ntej, nug koj tus kheej: Kuv qhov ntug ncaj tam sim no puas ntxiv qhov tsis paub meej - lossis tshem tawm nws?
Yog tias koj cov txheej txheem ua haujlwm ntawm ntug ntawm qhov pom tau, cov lus teb yuav nyob hauv cov khoom siv ceramics - tsis yog qhov tshiab, tab sis yog qhov tsim nyog. Ntawm ZHHIMG, peb tsis yog tsuas yog tsim cov cuab yeej Ceramic Straight Ruler, Ceramic Square Ruler, lossis Ceramic Straight Edge. Peb tsim kev ntseeg siab rau txhua lub micron.
Lub sijhawm tshaj tawm: Lub Kaum Ob Hlis-31-2025