Xaiv Ntawm Granite thiab Ceramic rau Next-Gen Lithography

Hauv lub ntiaj teb nanometer ntawm semiconductor lithography, qhov kev co me me ntawm cov qauv lossis qhov kev nthuav dav thermal me me tuaj yeem ua rau ntau lab daus las silicon wafer tsis muaj txiaj ntsig. Thaum kev lag luam txav mus rau 2nm nodes thiab dhau mus, cov ntaub ntawv siv rau cov hauv paus tshuab tsis yog "kev txhawb nqa" xwb - lawv yog cov neeg koom nrog hauv kev nrhiav kev raug.

Ntawm ZHHIMG, peb raug nug ntau ntxiv los ntawm cov OEMs thoob ntiaj teb: Peb puas yuav tsum lo rau qhov ruaj khov ntawm cov granite precision, lossis nws yog lub sijhawm hloov mus rau cov khoom siv ceramics siab heev? Cov lus teb nyob rau hauv lub cev tshwj xeeb ntawm koj daim ntawv thov.

Lub Physics ntawm Kev Ruaj Ntseg: Granite vs. Ceramic

Thaum sib pivcov khoom siv granite precisionthiab cov tswv cuab ceramic, peb yuav tsum saib "peb tug dawb huv" ntawm kev ua haujlwm precision: Damping, Thermal Stability, thiab Stiffness.

1. Kev Tiv Thaiv Kev Co: Qhov Zoo ntawm Cov Qauv Me Me Ntuj

Kev co yog tus yeeb ncuab ntawm kev xa tawm. Granite, ib lub pob zeb igneous ntuj, muaj cov qauv polycrystalline nyuaj uas ua haujlwm ua lub zog nqus dej ntuj. Qhov kev sib txhuam sab hauv no tso cai rau granite kom tshem tawm lub zog tshuab tau zoo dua li feem ntau cov khoom siv hluavtaws.

Qhov sib txawv, cov khoom siv ceramics zoo li Silicon Carbide (SiC) lossis Alumina yog cov khoom tawv heev. Txawm hais tias qhov kev tawv no zoo rau kev teb zaus siab, cov khoom siv ceramics muab kev cuam tshuam sab hauv tsawg dua. Hauv ib puag ncig lithography, qhov twg theem txav mus los nrog kev nrawm heev, lub hauv paus granite los ntawm ZHHIMG muab qhov chaw "ntsiag to" uas tsim nyog rau cov optics kom nyob sib haum xeeb zoo.

2. Kev Ua Haujlwm Kub: Kev Tswj Xyuas Micron

Kev nthuav dav ntawm cua sov feem ntau yog qhov teeb meem hauv kev raug mus sij hawm ntev. Cov pob zeb granite ntuj muaj cov coefficient ntawm thermal expansion (CTE) qis heev, feem ntau nyob ib puag ncig 5 × 10^{-6}/K txog 6 × 10^{-6}/K.

Cov khoom siv ceramic siab heev tuaj yeem ua tiav cov nqi CTE qis dua, tab sis lawv feem ntau muaj qhov kub qis dua. Qhov no txhais tau tias thaum lawv nthuav dav tsawg dua, lawv teb sai dua rau qhov kub thiab txias hloov pauv. Granite lub thermal mass loj ua haujlwm ua "buffer," ua rau nws yog qhov kev xaiv zoo tshaj plaws rau kev ua haujlwm loj.cov hauv paus tshuab lithographyqhov twg ib puag ncig yuav tsum nyob ruaj khov dhau ntau teev ntawm kev ua haujlwm tas mus li.

Cov ntaub ntawv rau Lithography Frontier

Lub tshuab lithography niaj hnub no tej zaum yog cov khoom siv nyuaj tshaj plaws uas tau tsim. Rau cov thav duab tseem ceeb, kev lag luam tau vam khom rau keeb kwmCov Cheebtsam Granite Precisionvim lawv qhov tsis yog hlau nplaum thiab kev tiv thaiv corrosion.

Txawm li cas los xij, rau cov khoom txav mus los ceev ceev hauv cov lithography stack - xws li wafer chucks lossis cov theem luv luv - ceramics tau nce av vim lawv qhov sib piv zoo dua rau qhov hnyav. Ntawm ZHHIMG, peb pom yav tom ntej tsis yog kev sib tw ntawm cov ntaub ntawv no, tab sis ua kev sib koom ua ke zoo. Los ntawm kev siv lub hauv paus granite rau lub hauv paus thiab ceramic rau cov khoom siv siab-dynamic, cov engineers tuaj yeem ua tiav qhov sib npaug ntawm damping thiab ceev.

Vim li cas ZHHIMG thiaj yog tus neeg muab khoom thoob ntiaj teb uas nyiam

Ua ib tug thawj cojtus neeg muag khoom ntawm cov khoom siv granite precision, ZHHIMG nkag siab tias qhov tseeb tsis yog hais txog cov khoom siv raw xwb; nws yog hais txog qhov ntsuas tom qab nws. Peb lub chaw siv lub tshuab nqus tsev rau txhua qhov kev sib dhos thiab cov txheej txheem lapping siab uas tshaj DIN 876 Qib 00 cov qauv.

Peb tshwj xeeb hauv:

• Cov Pob Zeb Granite Tshwj Xeeb rau OEM: Cov qauv geometries nrog cov ntxig xov sib xyaw rau cov lus qhia linear.

• Cov Cheebtsam Lithography Uas Muaj Kev Sib Txawv: Tsim cov hauv paus loj uas tswj tau qhov tiaj tiaj hauv 1 micron hla ntau meters.

• Kev Ntsuas Qib Siab: Muab cov qauv siv rau cov khoom siv tshuaj xyuas uas rhiab heev tshaj plaws hauv ntiaj teb.

Xaus Lus: Txoj Kev Npaj Mus Tom Ntej

Kev xaiv ntawm granite thiab ceramic yuav tsum tau nkag siab tob txog koj lub tshuab qhov dynamic profile. Txawm hais tias ceramics muaj kev ruaj khov ntau zaus, qhov ntuj damping thiab thermal mass ntawm granite tseem tsis tau sib piv rau kev ruaj khov loj.

Thaum peb saib mus rau xyoo 2026, ZHHIMG txuas ntxiv tsim kho tshiab ntawm qhov kev sib tshuam ntawm cov pob zeb ntuj thiab cov khoom sib xyaw siab heev. Peb tsis yog tsuas yog muab lub hauv paus xwb; peb muab qhov tseeb tias koj cov khoom siv yuav ua haujlwm rau nws qhov kev txwv theoretical.

Tiv tauj pab pawg tsim kho ZHHIMG hnub no kom tau txais daim ntawv qhia txog kev sib piv lossis los tham txog koj cov kev xav tau ntawm qhov project.