Hauv thaj tsam ntawm semiconductor wafer txiav, qhov yuam kev ntawm 0.001mm tuaj yeem ua rau lub nti siv tsis tau. Lub hauv paus zoo li tsis tseem ceeb granite, ib zaug nws qhov zoo tsis ua raws li cov qauv, yog ntsiag to thawb koj cov khoom mus rau brink ntawm kev pheej hmoo siab thiab tus nqi siab! Tsab ntawv xov xwm no coj koj ncaj qha mus rau qhov kev phom sij zais ntawm cov hauv paus tsis zoo, tiv thaiv kev txiav raug thiab kev ua haujlwm ntau lawm.
Lub "invisible foob pob" ntawm substandard granite bases
1. Runaway thermal deformation: Tus neeg tua neeg tuag ntawm qhov tseeb
Tsawg-zoo granite muaj ntau coefficient ntawm thermal expansion. Nyob rau hauv qhov kub-kub ib puag ncig ntawm wafer txiav (txog 150 ℃ hauv qee qhov chaw), nws yuav raug deformation ntawm 0.05mm / m! Vim lub thermal deformation ntawm lub hauv paus nyob rau hauv ib tug tej yam wafer fabrication cog, qhov luaj li cas ntawm cov txiav wafers tshaj ± 5μm, thiab cov ib-batch seem tus nqi nce mus rau 18%.
2. Lub zog tsis txaus: Lub neej ua haujlwm ntawm cov khoom siv yog "halved"
Cov hauv paus tsis tsim nyog nrog qhov ntom ntom qis dua 2600kg / m³ muaj 50% txo qhov hnav tsis kam thiab tsis muaj peev xwm ua kom muaj peev xwm ua tau. Raws li kev txiav kev vibrations, qhov saum npoo ntawm lub hauv paus yog nquag hnav thiab micro-cracks tshwm hauv. Yog li ntawd, qee yam khoom siv txiav tau muab pov tseg ob xyoos ua ntej lub sijhawm, thiab tus nqi hloov pauv tau tshaj li ib lab.
3. Tsis muaj tshuaj lom neeg ruaj khov: Corrosion yog fraught nrog txaus ntshai
Granite uas tsis ua raws li cov qauv muaj zog corrosion kuj. Cov kua qaub thiab alkali Cheebtsam nyob rau hauv cov kua txiav yuav maj mam erode lub hauv paus, uas ua rau deterioration ntawm flatness. Cov ntaub ntawv los ntawm ib lub chaw soj nstuam qhia tau hais tias los ntawm kev siv cov hauv paus tsis zoo, cov khoom siv calibration voj voog tau luv luv los ntawm rau lub hlis mus rau ob lub hlis, thiab tus nqi tu tau nce peb npaug.
Yuav txheeb xyuas qhov txaus ntshai li cas? Plaub Cov Ntsiab Lus Ntsuas Koj Yuav Tsum Nyeem!
Kev ntsuam xyuas ntom ntom ntom: Ua tau zoo Granite ≥2800KG / m³, hauv qab no tus nqi postosity tsis muaj peev xwm muaj;
✅ Coefficient ntawm thermal expansion test: Thov daim ntawv ntsuam xyuas ntawm <8 × 10⁻⁶/℃, tsis muaj "kub kub deformation huab tais";
✅ Kev kuaj xyuas flatness: ntsuas nrog lub laser interferometer, flatness yuav tsum yog ≤ ± 0.5μm / m, txwv tsis pub txiav kev tsom xam yog qhov ua haujlwm hloov;
✅ Daim ntawv pov thawj kev pov thawj: Pom zoo ISO 9001, CNAS thiab lwm yam ntawv pov thawj, tsis lees txais "peb-tsis muaj" hauv paus.
Kev tiv thaiv precision pib los ntawm lub hauv paus!
Txhua qhov txiav ntawm lub wafer yog qhov tseem ceeb rau kev ua tiav lossis tsis ua haujlwm ntawm cov nti. Tsis txhob cia cov hauv paus tsis zoo granite ua "tumbling block" rau qhov tseeb! Nyem kom tau "Wafer Cutting Base Quality Assessment Manual", tam sim ntawd txheeb xyuas cov khoom siv phom sij, thiab qhib cov kev daws teeb meem siab tshaj plaws!
Post lub sij hawm: Jun-13-2025