Ua ntej, qhov zoo ntawm granite puag
Kev nruj siab thiab kev hloov pauv thermal tsawg
Qhov ceev ntawm granite yog siab (kwv yees li 2.6-2.8 g / cm³), thiab Young's modulus tuaj yeem ncav cuag 50-100 GPa, ntau dua li cov khoom siv hlau ib txwm muaj. Qhov kev nruj siab no tuaj yeem tiv thaiv kev co sab nraud thiab kev hloov pauv ntawm lub nra hnyav, thiab ua kom muaj qhov tiaj tus ntawm cov lus qhia ntab cua. Tib lub sijhawm, cov coefficient nthuav dav ntawm granite yog qis heev (kwv yees li 5 × 10⁻⁶ / ℃), tsuas yog 1/3 ntawm txhuas alloy, yuav luag tsis muaj kev hloov pauv thermal hauv qhov kub thiab txias, tshwj xeeb tshaj yog haum rau cov chaw soj nstuam kub tas li lossis cov chaw ua haujlwm nrog qhov sib txawv ntawm qhov kub thiab txias ntawm hnub thiab hmo ntuj.
Kev ua haujlwm zoo heev
Cov qauv polycrystalline ntawm granite ua rau nws muaj cov yam ntxwv ntuj tsim, thiab lub sijhawm co attenuation yog 3-5 zaug sai dua li ntawm cov hlau. Hauv cov txheej txheem ntawm kev ua haujlwm precision, nws tuaj yeem nqus tau cov kev co siab xws li lub cev muaj zog pib thiab nres, txiav cov cuab yeej, thiab zam kev cuam tshuam ntawm resonance rau qhov tseeb ntawm qhov chaw ntawm lub platform txav mus los (tus nqi ib txwm mus txog ± 0.1μm).
Kev ruaj khov ntev mus ntev
Tom qab ntau pua lab xyoo ntawm cov txheej txheem geological tsim granite, nws cov kev ntxhov siab sab hauv tau raug tso tawm tag nrho, tsis zoo li cov khoom siv hlau vim yog kev ntxhov siab seem los ntawm kev hloov pauv qeeb. Cov ntaub ntawv sim qhia tau hais tias qhov kev hloov pauv loj ntawm lub hauv paus granite tsawg dua 1μm / m thaum lub sijhawm 10 xyoo, uas zoo dua li cov hlau cam khwb cia lossis cov hlau welded.
Tiv taus xeb thiab tsis tas yuav saib xyuas
Granite muaj kev kam rau cov kua qaub thiab alkali, roj, dej noo thiab lwm yam ib puag ncig, tsis tas yuav tsum tau txheej txheej tiv thaiv xeb ib yam li cov hlau. Tom qab sib tsoo thiab polishing, qhov roughness ntawm qhov chaw tuaj yeem ncav cuag Ra 0.2μm lossis tsawg dua, uas tuaj yeem siv ncaj qha ua qhov chaw ntawm cov pa ntab qhia kev tsheb ciav hlau kom txo qhov yuam kev sib dhos.
Qhov thib ob, cov kev txwv ntawm granite puag
Qhov nyuaj ntawm kev ua haujlwm thiab teeb meem nqi
Granite muaj Mohs hardness ntawm 6-7, xav tau kev siv cov cuab yeej pob zeb diamond rau kev sib tsoo precision, kev ua haujlwm zoo tsuas yog 1/5 ntawm cov khoom siv hlau. Cov qauv nyuaj ntawm dovetail groove, threaded qhov thiab lwm yam ntxwv ntawm cov nqi ua tiav siab, thiab lub voj voog ua tiav ntev (piv txwv li, kev ua tiav ntawm 2m × 1m platform siv sijhawm ntau dua 200 teev), ua rau tag nrho cov nqi yog 30% -50% siab dua li lub platform txhuas alloy.
Kev pheej hmoo ntawm kev tawg pob txha
Txawm hais tias lub zog compressive tuaj yeem ncav cuag 200-300MPa, lub zog tensile ntawm granite tsuas yog 1/10 ntawm nws. Kev tawg yooj yim tshwm sim hauv qab qhov hnyav hnyav, thiab kev puas tsuaj nyuaj kho. Nws yog qhov tsim nyog kom tsis txhob muaj kev ntxhov siab los ntawm kev tsim qauv, xws li siv cov kev hloov pauv ntawm lub ces kaum puag ncig, nce tus lej ntawm cov ntsiab lus txhawb nqa, thiab lwm yam.
Qhov hnyav coj cov kev txwv ntawm lub kaw lus
Qhov ceev ntawm granite yog 2.5 npaug ntawm cov txhuas alloy, ua rau muaj kev nce ntxiv ntawm qhov hnyav tag nrho ntawm lub platform. Qhov no ua rau muaj qhov yuav tsum tau muaj peev xwm ntawm cov qauv txhawb nqa ntau dua, thiab qhov kev ua tau zoo dynamic yuav raug cuam tshuam los ntawm cov teeb meem inertia hauv cov xwm txheej uas xav tau kev txav mus los ceev (xws li lub rooj lithography wafer).
Cov khoom siv anisotropy
Cov khoom siv pob zeb hauv av ntawm cov granite ntuj yog qhov kev taw qhia, thiab qhov nyuaj thiab thermal expansion coefficient ntawm ntau qhov chaw sib txawv yog txawv me ntsis (kwv yees li ± 5%). Qhov no tuaj yeem ua rau muaj qhov yuam kev tsis tseem ceeb rau cov platforms ultra-precision (xws li nanoscale positioning), uas yuav tsum tau txhim kho los ntawm kev xaiv cov khoom siv nruj thiab kev kho homogenization (xws li calcination kub siab).
Raws li cov khoom siv tseem ceeb ntawm cov khoom siv kev lag luam siab, qhov tseeb static pressure air floating platform yog siv dav hauv kev tsim khoom semiconductor, kev ua cov khoom siv optical, kev ntsuas qhov tseeb thiab lwm yam. Kev xaiv cov khoom siv hauv paus ncaj qha cuam tshuam rau kev ruaj khov, qhov tseeb thiab lub neej ua haujlwm ntawm lub platform. Granite (granite ntuj), nrog nws cov khoom siv lub cev tshwj xeeb, tau dhau los ua cov khoom siv nrov rau cov platform hauv xyoo tas los no.
Lub sijhawm tshaj tawm: Plaub Hlis-09-2025