Ua ntej, qhov zoo ntawm granite puag
High rigidity thiab tsawg thermal deformation
Qhov ceev ntawm granite yog siab (kwv yees 2.6-2.8 g / cm³), thiab cov Young's modulus tuaj yeem ncav cuag 50-100 GPa, deb tshaj ntawm cov khoom siv hlau zoo tib yam. Qhov siab rigidity no tuaj yeem cuam tshuam rau sab nraud kev co thiab thauj khoom deformation, thiab xyuas kom meej qhov flatness ntawm huab cua ntab qhia. Nyob rau tib lub sijhawm, linear expansion coefficient ntawm granite yog tsawg heev (kwv yees li 5 × 10⁻⁶ / ℃), tsuas yog 1/3 ntawm txhuas alloy, yuav luag tsis muaj thermal deformation nyob rau hauv qhov kub thiab txias, tshwj xeeb tshaj yog haum rau qhov kub thiab txias qhov chaw kuaj mob los yog muaj xwm txheej nrog kub sib txawv nruab hnub thiab hmo ntuj.
Kev ua haujlwm damping zoo heev
Cov qauv polycrystalline ntawm granite ua rau nws muaj cov yam ntxwv damping, thiab lub sijhawm vibration attenuation yog 3-5 zaug sai dua li cov hlau. Nyob rau hauv tus txheej txheem ntawm precision machining, nws muaj peev xwm nqus tau high-frequency vibration xws li lub cev muaj zog pib thiab nres, lub cuab tam txiav, thiab tsis txhob muaj kev cuam tshuam ntawm resonance ntawm lub positioning raug ntawm lub tsiv platform (tus nqi raug mus txog ± 0.1μm).
Lub sij hawm ntev stability
Tom qab ntau pua lab xyoo ntawm cov txheej txheem geological tsim granite, nws cov kev ntxhov siab sab hauv tau raug tso tawm tag nrho, tsis zoo li cov ntaub ntawv hlau vim qhov seem ntawm kev ntxhov siab los ntawm qeeb deformation. Cov ntaub ntawv sim qhia tau hais tias qhov hloov pauv loj ntawm lub hauv paus granite yog tsawg dua 1μm / m hauv lub sijhawm 10 xyoo, uas yog qhov zoo dua li cov hlau cam khwb cia lossis welded steel qauv.
Corrosion-resistant thiab tu-dawb
Granite rau cov kua qaub thiab alkali, roj, noo noo thiab lwm yam ib puag ncig muaj lub siab ntev, tsis tas yuav tsum tau txheej txheej los tiv thaiv xeb tsis tu ncua raws li cov hlau puag. Tom qab kev sib tsoo thiab polishing, qhov roughness ntawm qhov chaw tuaj yeem ncav cuag Ra 0.2μm lossis tsawg dua, uas tuaj yeem siv ncaj qha raws li cov kabmob ntawm cov huab cua ntab qhia kev tsheb ciav hlau kom txo tau kev sib dhos yuam kev.
Qhov thib ob, cov kev txwv ntawm granite puag
Kev ua haujlwm nyuaj thiab teeb meem nqi
Granite muaj Mohs hardness ntawm 6-7, yuav tsum tau siv cov cuab yeej pob zeb diamond rau kev sib tsoo precision, kev ua haujlwm tsuas yog 1/5 ntawm cov ntaub ntawv hlau. Cov qauv nyuaj ntawm dovetail zawj, threaded qhov thiab lwm yam kev ua haujlwm ntawm tus nqi yog siab, thiab lub voj voog ua haujlwm ntev (piv txwv li, kev ua haujlwm ntawm 2m × 1m platform yuav siv sijhawm ntau tshaj 200 teev), ua rau tag nrho cov nqi yog 30% -50% siab dua aluminium alloy platform.
Brittle fracture txaus ntshai
Txawm hais tias lub zog compressive tuaj yeem ncav cuag 200-300MPa, lub zog tensile ntawm granite tsuas yog 1/10 ntawm nws. Brittle fracture yog ib qho yooj yim uas tshwm sim nyob rau hauv qhov hnyav load, thiab kev puas tsuaj yog ib qho nyuaj rau kho. Nws yog ib qho tsim nyog kom tsis txhob muaj kev ntxhov siab los ntawm kev tsim qauv, xws li siv lub kaum sab xis hloov pauv, nce tus naj npawb ntawm cov ntsiab lus txhawb nqa, thiab lwm yam.
Qhov hnyav nqa qhov system txwv
Qhov ntom ntawm granite yog 2.5 npaug ntawm aluminium alloy, uas ua rau muaj kev nce ntxiv hauv qhov hnyav tag nrho ntawm lub platform. Qhov no ua rau muaj kev xav tau ntau dua ntawm cov kabmob muaj peev xwm ntawm cov qauv kev txhawb nqa, thiab kev ua haujlwm zoo tuaj yeem cuam tshuam los ntawm cov teeb meem inertia hauv cov xwm txheej uas xav tau kev txav siab ceev (xws li lithography wafer rooj).
Khoom siv anisotropy
Cov ntxhia particle faib ntawm ntuj granite yog kev taw qhia, thiab hardness thiab thermal expansion coefficient ntawm cov haujlwm sib txawv me ntsis txawv (li ± 5%). Qhov no tuaj yeem ua kom paub qhov tsis zoo rau cov txheej txheem ultra-precision (xws li qhov chaw nanoscale), uas yuav tsum tau txhim kho los ntawm kev xaiv cov khoom nruj thiab kev kho homogenization (xws li kub-calcination).
Raws li cov ntsiab lus tseem ceeb ntawm cov khoom siv high-precision industrial, precision static siab cua ntab platform yog dav siv hauv semiconductor manufacturing, optical processing, precision ntsuas thiab lwm yam. Kev xaiv ntawm cov khoom siv hauv paus ncaj qha cuam tshuam rau kev ruaj ntseg, raug thiab kev pabcuam lub neej ntawm lub platform. Granite (natural granite), nrog nws cov khoom tshwj xeeb ntawm lub cev, tau dhau los ua cov khoom siv nrov rau cov platforms hauv xyoo tas los no.
Post lub sij hawm: Apr-09-2025