Thaum tsim cov khoom ua haujlwm raug, lub rooj ua haujlwm XY precision zoo li "tus kws ua tes ua taw zoo heev", uas yog tus saib xyuas kev sib tsoo cov khoom kom zoo ib yam. Tab sis qee zaum, txawm tias kev ua haujlwm zoo, cov khoom tsim tawm tsis ua raws li tus qauv. Qhov no yuav yog vim lub hauv paus granite ntawm lub rooj ua haujlwm "ua rau chim siab"! Hnub no, cia peb tham txog qhov tseem ceeb ntawm kev sib xws ntawm cov ntaub ntawv granite rau kev ua haujlwm raug.
Cov khoom siv "tsis sib npaug", thiab qhov teeb meem tau tawg lawm
Xav txog lub hauv paus granite, qee qhov nyuaj thiab qee qhov mos; Yuav ua li cas yog tias qee qhov chaw nthuav dav dua thaum cua sov thiab qee qhov chaw nthuav dav tsawg dua?
Kev co tsis sib npaug: Yog tias qhov ceev ntawm qhov chaw sib txawv ntawm lub hauv paus tshuab granite tsis zoo ib yam, thaum lub rooj ua haujlwm txav mus sai, nws yuav zoo li ib tug neeg taug kev, ib qho siab thiab ib qho qis, ua rau co. Hom kev co no yog qhov loj heev hauv kev ua tiav. Piv txwv li, thaum polishing optical lenses, nws yuav ua rau qhov chaw ntawm cov lens ua ntxhib. Cov lenses uas tuaj yeem ua tiav qhov zoo li daim iav yuav muaj lawv cov nqi seem nce siab txog 30% ncaj qha!
Kub "ua rau muaj teeb meem": Hauv cov txheej txheem semiconductor photolithography, yuav tsum tau tswj qhov chaw kom meej. Txawm li cas los xij, yog tias cov coefficients thermal expansion ntawm thaj chaw sib txawv ntawm lub hauv paus granite sib txawv heev, thaum qhov kub hloov pauv, lub hauv paus yuav "deform thiab distort", ua rau muaj qhov yuam kev loj dua thiab tej zaum tag nrho cov wafer raug pov tseg.
Kev hnav tsis sib xws: Lub hauv paus uas muaj qhov tawv tsis sib xws zoo li ib khub khau uas muaj ntau qib hnav sib txawv. Tom qab siv ntev, cov khoom uas muaj qhov tawv qis dua ntawm lub rooj ua haujlwm yuav hnav sai dua. Txoj kev txav mus los ncaj nraim yuav dhau los ua nkhaus, thiab qhov ncaj yuav poob qis heev. Tus nqi txij nkawm kuj tseem yuav nce ntxiv.
Tsuas yog thaum cov ntaub ntawv sib xws xwb thiaj li ua tau qhov kev ua tiav ruaj khov zoo li Mount Tai.
Thaum cov khoom siv ntawm lub hauv paus granite yog sib xws thiab sib xws, cov txiaj ntsig yog tam sim ntawd:
Kev ua haujlwm ruaj khov, raug thiab muaj zog: Lub hauv paus ua los ntawm cov khoom siv sib xws tuaj yeem nqus tau kev co thaum lub rooj ua haujlwm pib, nres lossis tig sai. Ua li no, qhov tseeb ntawm qhov rov ua dua tuaj yeem ncav cuag qhov xav tsis thoob ± 0.3μm, uas sib npaug rau qhov tseeb ntawm kev faib cov plaub hau tib neeg ua 300 qhov ntxiv!
Kev teb kub kom meej: Ib qho coefficient ntawm kev nthuav dav thermal zoo li kev teeb tsa "lub kaw lus tswj kub ntse" ntawm lub hauv paus. Cov kws ua haujlwm tuaj yeem kwv yees qhov deformation ntawm lub hauv paus thaum qhov kub hloov pauv. Los ntawm kev them nyiaj algorithm, qhov yuam kev deformation thermal raug tswj hauv ± 0.5μm.
"Lub neej ua haujlwm ntev": Qhov tawv thiab qhov ceev sib npaug ua kom txhua qhov ntawm lub hauv paus "muaj kev ntxhov siab sib npaug", zam kev hnav ntau dhau. Cov hauv paus tshuab ib txwm yuav tsum tau hloov txhua tsib xyoos, thaum cov zoo ua los ntawm cov khoom siv sib xws tuaj yeem kav ntev li yim txog kaum xyoo, txuag tau ntau cov nqi hloov khoom siv.
Yuav ua li cas ib tug neeg thiaj li xaiv tau lub hauv paus dav hlau granite "txhim khu kev qha"?
Txheeb xyuas "keeb kwm": Xaiv cov granite uas tau khawb los ntawm tib txheej minerals thiab tib thaj chaw, ib yam li khaws cov txiv hmab txiv ntoo los ntawm tib tsob ntoo, qhov no tuaj yeem ua kom ntseeg tau tias cov khoom xyaw minerals zoo sib xws.
"Kev kuaj lub cev" nruj: Cov hauv paus tshuab granite txhim khu kev qha yuav tsum dhau 12 "qhov chaw kuaj xyuas" xws li kev tshuaj xyuas spectral thiab kev kuaj qhov ceev, thiab txhua yam khoom siv tsis zoo raug tshem tawm.
Xyuas "Daim npav ID": Thov kom tus neeg muag khoom muab daim ntawv pov thawj zoo thiab cov ntawv qhia kev xeem. Tsuas yog lub hauv paus uas muaj daim ntawv pov thawj pom zoo thiaj li siv tau nrog kev thaj yeeb nyab xeeb dua.
Hauv lub ntiaj teb ntawm kev ua haujlwm precision, cov ntsiab lus txiav txim siab qhov ua tiav lossis tsis ua tiav. Cov khoom siv sib xws ntawm lub hauv paus granite yog qhov txuas tseem ceeb los xyuas kom meej qhov tseeb thiab txo cov nqi. Lub sijhawm tom ntej thaum xaiv cov khoom siv, tsis txhob saib tsis taus qhov "me me me" no dua!
Lub sijhawm tshaj tawm: Lub Rau Hli-17-2025